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6. MAINTENANCE
Some of the component units and parts of HELIOT need scheduled maintenance and
replacement. Some parts are deteriorated after prolonged use and must be replaced in case
of trouble.
Maintenance and replacing procedures are described below.
!
CAUTION
Overhaul
Components used in HELIOT include consumables and parts that are subject
to secular deterioration (O-rings, drive parts).
Be sure to overhaul HELIOT to maintain its performance, preferably once
every year.
!
CAUTION
Power OFF
Before removing the external panel for check and replacement of parts, turn
OFF the primary power on the switchboard and unplug the power cable from
HELIOT.
High voltage is present in HELIOT and can cause danger to human body like
electric shock and damage the equipment.
!
CAUTION
Complete shutdown
The compound molecular pump is rotating at a high speed by inertia for about
five minutes after the pump is shut down.
Before checking and replacing parts, wait for more than five minutes after the
pump is shut down.
Otherwise, danger to human body and damage to equipment can result.
!
CAUTION
Analyzer tube is hot
The analyzer tube is very hot immediately after shutdown. Before checking
and replacing its part, wait for more than five minutes and carry out work
carefully. Otherwise, you may get burned or the equipment may be
damaged.
!
CAUTION
Solenoid valve is hot
The coil of the solenoid valve is very hot immediately after shutdown.
Before checking and replacing its part, wait for more than five minutes and
carry out work carefully. Otherwise, you may get burned or the equipment
may be damaged.
!
CAUTION
Rotary pump is hot
The rotary pump is very hot immediately after shutdown. Before checking
and replacing its part, wait for more than five minutes and carry out work
carefully. Otherwise, you may get burned or the equipment may be
damaged.
!
CAUTION
Don't use grease
No grease is used for the piping junctions and valve interior.
Do not use grease in disassembly and reassembly.
Malfunction of equipment or failure of parts can result.
!
CAUTION
Don’t touch parts in vacuum
Parts in vacuum and parts on vacuum side have been degreased and are clean.
Do not touch them by naked hand during disassembly and reassembly.
The performance of components may be deteriorated.
!
CAUTION
Remove dust
O-rings are used for the piping junctions.
Remove dust from the O-ring before disassembly and reassembly. Also
remove sweat, oil etc. with alcohol.
Malfunction of component or part failure can result.
Содержание HELIOT 301
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