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2-2 Pumping

System

Diagram

No.

Symbol

Function

Test port. Connect a test object.

Calibration leak. Provides reference helium.

CLV

Calibration leak open/close valve.

Vent valve. Vents the test port to atmospheric pressure.

PiG

Pirani gauge sensor head. Measures the pressure at the test port.

TV1

Test valve. Valve for fine leak flow.

TV2

Test valve. Valve for middle leak flow.

TV3

Test valve. Valve for gross leak flow.

ANA

Analyzer tube. Ionizes and detects helium.

CMP

Compound molecular pump.

CVV

Vent valve of compound molecular pump.

12 FV

Fore

line

valve.

FVV

Fore line vent valve.

14 FP

Fore

pump.

Содержание HELIOT 301

Страница 1: ...with Ver 2000 Software This manual is for instruments serial Nos 3000 and higher Read this manual before use and keep it in your file for future reference Components Division ULVAC Inc 2500 Hagisono...

Страница 2: ...part without written consent by ULVAC Denotations for Safety WARNING The following denotations are used throughout this manual and labeled on the instrument to call operator s attention to safety The...

Страница 3: ...re inspection or part replacement wait for more than five minutes after deactivating it and carry out work carefully Otherwise you may get burned or the equipment may be damaged CAUTION Rotary pump at...

Страница 4: ...p the instrument free from vibration or impact from surrounding equipment The instrument may be damaged CAUTION Electrical connection Make electrical wiring after completing installation CAUTION Setti...

Страница 5: ...than operation of the controller The equipment can be damaged CAUTION Venting the test port Before venting do not remove the blank flange or test object from the test port nor vent the test port to a...

Страница 6: ...ed the equipment can be damaged CAUTION Maximum voltage Voltage applied to the pin of output signal is 5 V to 55 VDC recommended value 24 VDC If a voltage out of this range is applied the equipment ca...

Страница 7: ...quipment may be damaged CAUTION Gas feeding pressure Feed gas at a pressure below 0 02 MPaG If a pressure in excess of this is applied malfunction or damage to equipment can result CAUTION Mounting fi...

Страница 8: ...r to human body like electric shock and damage to the equipment can result Be sure to turn OFF the power before inspection maintenance and carry out work with the power cable disconnected from the ins...

Страница 9: ...ration leak 21 4 4 Setting the Controller 22 4 4 1 Setting up the setting mode 22 1 To set up the mode before startup 22 2 To set up the setting mode when on standby in the test mode 22 3 To set up th...

Страница 10: ...her equipment 55 6 MAINTENANCE 56 6 1 List of Maintenance Items 57 6 2 Maintenance Procedure 58 6 2 1 Removing the external panel 58 1 Front panel 58 2 Top panel 58 3 Left side panel 59 4 Right side p...

Страница 11: ...in Quick start Approx 3 min Stop time Approx 5 min Sensitivity calibration Automatic with calibration leak temperature compensation Leak rate display Direct reading display Digital display LCD Analog...

Страница 12: ...flow sensitivity calibration Gross leak flow sensitivity calibration Performs gross leak flow sensitivity calibration Zero adjustment Performs zero point measurement Test mode standby Ready for execut...

Страница 13: ...re is medium Pump compression ratio is high Inlet position is away from the analyzer tube Difficulty for helium to reach analyzer tube Helium detecting efficiency is low Sensitivity is low Testing pre...

Страница 14: ...ow mode however in which the rotary pump is changed over to a drag molecular pump after pumping to a pressure of 70 Pa the pumping speed increases before it decreases Thus the roughing time is shorter...

Страница 15: ...pressure of 1000 Pa and a sensitivity range of E 12 to E 4 Pa m3 sec The compound molecular pump is provided with a wider measurement range by changing over the revolution to 90000 rpm or 67000 rpm wi...

Страница 16: ...o atmospheric pressure 5 PiG Pirani gauge sensor head Measures the pressure at the test port 6 TV1 Test valve Valve for fine leak flow 7 TV2 Test valve Valve for middle leak flow 8 TV3 Test valve Valv...

Страница 17: ...e maintenance of the compound molecular pump and rotary pump 7 Connector panel Input output of power and accessories 8 Casters Used for movement over a short distance 9 Test port NW16 flange port for...

Страница 18: ...Test valve for middle leak flow 8 Test valve 3 TV3 Test valve for gross leak flow 9 Calibration vent valve CLV Valve that opens closes the calibration leak 10 Vent valve VV Valve that vents the test...

Страница 19: ...YU 254 I O and analog circuit boards 3 Power supply 1 AD240 24 Power supply for valves etc 4 Power supply 2 P30E 5 Power supply for filament 5 Power supply 3 PMC30 2 Power supply for CPU 6 Compound m...

Страница 20: ...scale the range 9 Pirani bar graph Displays the pressure at the test port 10 Log scale lamp Lit when the leak rate display is set to Log 11 Linear scale lamp Lit when the leak rate display is set to L...

Страница 21: ...the voltage inscribed on the plate to the basic unit 5 EXT V connector Outputs the output signal of big flow valve and helium spray output signal 6 SEN switch Changes over the sensitivity H L 7 REC OU...

Страница 22: ...nsmitted from equipment in the surrounding area 3 When installing it on a rack see to it that the weight of the basic unit is borne on the entire surface of the aluminum die cast frame located at the...

Страница 23: ...it may not function properly 3 4 Electrical Connection CAUTION Electrical connection Make electrical connection after completion of installation 1 Plug the power cable to the AC INPUT connector on th...

Страница 24: ...ts each item from the controller This mode can be set up from the initial mode or test mode 4 Startup mode Press START STOP Startup mode Pumping This mode warms up the pumping system and performs auto...

Страница 25: ...ting Set flow and current flow selects auto flow currently gross Contents of action roughing Test mode flow being changed over Auto flow Change Mid flow Set flow and subsequent flow selects auto flow...

Страница 26: ...switch No DIP switch OFF DIP switch ON No 1 Select by local operation remote operation signal Only remote operation is feasible No 5 Normal venting single Double venting No 7 Setpoint system error sig...

Страница 27: ...tor as an external signal only remote operation is valid until it comes to a stop No 1 ON Local operation invalid Remote operation valid Only remote operation by external signal is valid Operable inpu...

Страница 28: ...e test port to atmospheric pressure by pressing the switch for a second time No 5 OFF Normal vent valid Double vent invalid No 5 ON Normal vent valid Double vent invalid When only remote operation is...

Страница 29: ...the ROM initial value Verify all settings including the values of the built in calibration leak and enter the set values again if necessary Method of executing RAM clearing ULVAC HELIOT Initializing S...

Страница 30: ...h The revolution of the compound molecular pump is 90000 rpm which is the normal revolution Sensitivity H Sensitivity is high Set it in the H position of the SEN switch The revolution of the molecular...

Страница 31: ...th and in the same manner Standard leak Temp coef 2 3 Press twice 7 When a 4 digit numerical value is entered temperature coefficient and factor value are displayed 8 It is not necessary to change thi...

Страница 32: ...e setting mode The setting mode can be set up when the main power is turned ON or when in the test mode standby state after startup 1 To set up the mode before startup ULVAC HELIOT Initializing 1 Turn...

Страница 33: ...Select bar graph Linear scale Press Bar graph display selection mode Sets the display format of the bar graph for leak rate Printer ON Press Printer print selection mode Sets output signal ON OFF to...

Страница 34: ...Condition H L Range selection mode Select range Auto Auto Auto fix Bar graph display selection mode Select bar graph Linear Linear Linear log Printer printout selection mode Printer ON ON ON OFF Filam...

Страница 35: ...is displayed Enter the set value again and press to set it again Inhibited settings The sniffer mode and big flow mode cannot be set when in the flow selection mode of HELIOT 301 The setpoint H value...

Страница 36: ...st port gross leak flow middle leak flow fine leak flow Startup mode Zero adjusting 5 Adjust the zero point which is the reference of leak rate Startup mode He peak adjusting 6 The calibration leak va...

Страница 37: ...t 4 The message Please wait is displayed Select test mode Gross leak flow 5 The set flow is displayed several seconds later Input of setting is completed 3 Entering the setting of the unit selection m...

Страница 38: ...m3 sec 8 The value set previously is displayed several seconds later This completes input of setting 5 Entering the setting of setpoint L input mode Sets the setpoint L value for leak rate This can b...

Страница 39: ...several seconds later This completes the input of setting 7 Entering the setting of the bar graph display selection mode Sets the bar graph display format This mode permits selection of the linear di...

Страница 40: ...g of the filament change mode The ion source used for HELIOT has two filaments If one filament is deteriorated and sensitivity has lowered or burns out it is automatically changed with the other filam...

Страница 41: ...pheric air is 5 ppm however the instrument will recognize the concentration as 5 ppm regardless of whether the concentration is 10 ppm or 100 ppm when actually making atmospheric sensitivity calibrati...

Страница 42: ...Press and change the numerical value of the second digit Press 5 Press and enter the second digit Standard concentration 3 4E 02 ppm 6 Enter the third and fourth digits in the same manner Press Please...

Страница 43: ...rt about 3 three minutes though the time depends on the instrument condition Even when quick start is selected the data in memory will be erased under the following conditions and the instrument will...

Страница 44: ...urn ON the main power ULVAC HELIOT Push START Press START 2 The initial messages changes in several seconds and the initial screen Push START is displayed 3 Press the START STOP switch or once Startup...

Страница 45: ...to be understood that the reliability of leak test error of direct reading of leak rate etc when quick start is used at startup is out of warranty ULVAC HELIOT Initializing 1 Turn ON the main power U...

Страница 46: ...Pa m3 sec Sensitivity mode Gross leak flow Middle leak flow Fine leak flow Auto flow SEN L E 4 to E 9 E 5 to E 10 E 6 to E 11 E 4 to E 11 SEN H E 5 to E 10 E 6 to E 11 E 7 to E 12 E 5 to E 12 CAUTION...

Страница 47: ...Press the test switch once Test starts Auto flow Evacuating 3 Work is rough pumped evacuated If the pressure does not come down to below 1000 Pa within three minutes error processing is made for the...

Страница 48: ...rk is rough pumped evacuated If the pressure does not come down to below 1000 Pa within three minutes error processing is made for the roughing fault and stops and invalidates the test Gross leak flow...

Страница 49: ...port Press 2 Press the test switch once Test starts Middle leak flow Evacuating 3 Work is rough pumped evacuated If the pressure does not come down to below 70 Pa within three minutes error processin...

Страница 50: ...o the test port Press 2 Press the test switch once Test starts Fine leak flow Evacuating 3 Work is rough pumped evacuated If the pressure does not come down to below 10 Pa within three minutes error p...

Страница 51: ...wer from E 8 to E 10 or may not lower from E 8 depending on the condition A second press on the zero switch when is displayed when function is ON extinguishes and deactivates the function If the funct...

Страница 52: ...lent to that of the data obtained previously Auto flow fine 1 8E 10 Pa m3 s Press 1 Test is under way by auto flow Press the mode switch when the leak rate has lowered and is stabilized Auto flow fine...

Страница 53: ...mode standby state 2 Double venting Auto flow fine 1 8E 10 Pa m3 s 1 Test is under way by auto flow Press Test mode L Test complete Press 2 Press the vent switch once 3 Test is completed 4 Press the...

Страница 54: ...VAC HELIOT Please wait Several seconds later 3 The stop mode is set up The electrical system and pumping system are automatically turned OFF and the main power can be turned OFF ULVAC HELIOT Push STAR...

Страница 55: ...ror If error occurs reset the error mode after verifying the symptom by the message Make check and repair referring to Troubleshooting 4 8 1 Error mode The error mode is set up if any trouble occurs T...

Страница 56: ...t is shut down or control returns to test mode standby depending on the contents of the error If the error occurs during test the test will be inactive Specific examples are given below Auto flow fine...

Страница 57: ...47 If Notice is displayed during startup the stop mode is set up simultaneously with the resetting of the error message and the instrument is shut down Same action as when Caution is displayed...

Страница 58: ...tice 2 F flow invalid Fine leak flow cannot be executed Pressure does not lower pressure fault has occurred Notice 3 M flow invalid Middle leak flow cannot be executed Pressure does not lower pressure...

Страница 59: ...uto flow Auto range Log display Explanation It is assumed that this case is common Setting sensitivity L allows measurement of leak rates of E 11 to E 4 Pa m3 sec If the ultimate pressure or leak rate...

Страница 60: ...ermits start of test from 1000 Pa Since the standard sensitivity range of gross leak flow is on order of E 9 to E 4 measurement can be made with no problem against this acceptance criterion Since this...

Страница 61: ...thing is that the background leak rate under test before helium is sprayed is sufficiently low and is stabilized with respect to the desired leak rate Also it is important to minimize the amount of he...

Страница 62: ...made with no problem against this acceptance criterion because the standard sensitivity range of gross leak flow is on order of E 9 to E 4 The recommended display is linear display that can display t...

Страница 63: ...and the rotary pump Helium in the chamber is pumped by the turbomolecular pump only and its exhaust can be taken into HELIOT Here helium is pumped by the rotary pump and HELIOT independently but heli...

Страница 64: ...the turbomolecular pump If the difference in pumping speed between the rotary pump and HELIOT is large the pumping performance of the turbomolecular pump will lower and the pressure in the chamber wi...

Страница 65: ...quipment HELIOT is to be connected referring to Case 5 It is also to be noted that when making leak test of a component with the instrument running it must be shut down before movement but when test i...

Страница 66: ...mmediately after shutdown Before checking and replacing its part wait for more than five minutes and carry out work carefully Otherwise you may get burned or the equipment may be damaged CAUTION Solen...

Страница 67: ...r pump Bearing Biannually Pirani gauge sensor head Sensor head When burnt out WP 01 Ion source Ion source slit When burnt out or deteriorated B A type ion source Ir filament Code No 07937 Battery Cont...

Страница 68: ...oceed as follows 1 Front panel 1 Remove the one M6 screw at the bottom of the front panel 2 Slide the front panel upward to remove it 2 Top panel 1 Remove the front panel 2 Remove the two M4 screws on...

Страница 69: ...his time do not pull the controller cable with undue force The left side panel cannot be removed before the front panel is removed 4 Right side panel 1 Remove the front panel 2 Remove the top panel 3...

Страница 70: ...t 2 Oil contamination To be free from discoloring and dust contamination 2 How to check 1 Remove the right side panel 2 The rotary pump comes in sight Check oil for oil level and contamination through...

Страница 71: ...t Remove the screw cap on the rear of the pump 3 The wick holder comes in sight Hold the wire and take out the wick holder 4 Check that the wick holder is not contaminated not dry and not discolored 5...

Страница 72: ...ow to check 1 Remove the front panel 2 The Pirani gauge sensor head comes in sight Remove the connector 3 Turn the clamp ring to remove it 4 Pull out the Pirani gauge sensor head The clamp ring O ring...

Страница 73: ...the focus electrode cap screw to remove the ion source from the ion source flange 7 Reassemble the ion source by reversing the disassembling procedure If the slit is contaminated polish it with sandp...

Страница 74: ...TION Solenoid valve at high temperature The coil section of the solenoid valve is very hot immediately after it is deactivated Before inspection or part replacement wait for more than five minutes aft...

Страница 75: ...problem in 1 through 3 above rotary pump may have failed Caution 2 Main pump trip Trouble symptom Troubleshooting Corrective action 1 Is input voltage within 100 V 10 all time 1 Keep input voltage wi...

Страница 76: ...judged to have burnt out Restart Caution 4 PiG failure Trouble symptom Troubleshooting Corrective action Pirani gauge sensor head has burnt out 1 Is Pirani gauge sensor head connected securely 1 Secu...

Страница 77: ...t be executed Test port pressure does not lower Pressure fault has occurred 2 Check if pressure rise has occurred during test 2 Fine low will be in error if pressure rise occurs at above 3 Pa with sen...

Страница 78: ...ure fault has occurred 2 Check if pressure rise has occurred during test 2 Gross leak flow will be in error if pressure rise occurs at above 500 Pa with sensitivity H and at above 1000 Pa with sensiti...

Страница 79: ...to below 500 Pa with sensitivity H to below 1000 Pa with sensitivity L b Middle leak flow will be in error if pressure does not lower to below 18 Pa with sensitivity H and to below 70 Pa with sensiti...

Страница 80: ...en replacing ion source 4 Tighten focus electrode cap screw 5 Check if ion source slit is discolored or contaminated 5 Polish discolored or contaminated portion with sandpaper of about 400 6 Is ion so...

Страница 81: ...as displayed 1 Make automatic sensitivity calibration Refer to 4 4 5 1 Entering the setting of the sensitivity calibration mode 7 3 Other RS 232C Error Trouble symptom Troubleshooting Corrective actio...

Страница 82: ...ed ON OFF by the action of the load The equipment may be damaged if the load is not provided CAUTION Contact Provide a contact or open collector between pin 10 through pin 14 to be used for input of s...

Страница 83: ...open GND Input SYSTEM START STOP Start stop of system 14 Normally open GND 2 Description of signals Output signal COM ANALOG GND Common for open collector output SET POINT L Outputted when the leak r...

Страница 84: ...tem The instrument is activated while the signal is inputted Enter one shot signal for about one second Malfunction can result if the input time is short The output form of the SETPOINT L and H and SY...

Страница 85: ...ge applied to pin 9 is 5 V to 55 VDC recommended value 24 V 3 Provide a contact or open collector between pin 10 through pin 14 and GND Input a signal by the action of the contact 4 Input AUTO ZERO CA...

Страница 86: ...h input CALIBRATION Enter with after selecting mode switch Same as right Signal input enter with after selecting mode switch PRINT OUT Return switch input Same as right Signal input enter with return...

Страница 87: ...stops Error No Error message HELIOT action System error output Notice 1 Error The current state is restored by resetting the message with No output Notice 2 Fine flow invalid Notice 3 M flow invalid N...

Страница 88: ......

Страница 89: ...EM START STOP EXT V output HELIUM SPRAY 1 Setpoint is outputted when roughing is completed and the test mode is set up 2 Setpoint output is reset when test is completed 3 START UP OK output is reset d...

Страница 90: ...rminal Contents Signal format REC OUT red Leak rate output 0 to 10 VDC maximum REC OUT black Leak rate output GND Output voltage of linear display Leak rate value Output voltage V Leak rate value Outp...

Страница 91: ...ort pin and pin The equipment may be damaged 1 Output signal 1 Big flow valve output This output is the power source for external valve drive in HELIOT 303 A voltage of 24 VDC is outputted with the ti...

Страница 92: ...f the instrument Also the test measurement value at that point leak rate is automatically printed when venting at the end of test The test measurement value can be printed by pressing the return switc...

Страница 93: ...260 C LEFT B 1 270 IF C CHR 32 THEN PRINT Roughing GOTO LOP1 280 IF C CHR 33 THEN PRINT Proceeds to TV1 flow GOTO LOP1 290 IF C CHR 34 THEN PRINT Proceeds to TV2 flow GOTO LOP1 300 IF C CHR 35 THEN PR...

Страница 94: ...xecution OK Request again Unexecutable R1 R2 R3 R4 Test stop A2 Under execution OK Request again Unexecutable R1 R2 R3 R4 Auto zero A3 Under execution OK Request again Unexecutable R1 R2 R3 R4 Sensiti...

Страница 95: ...y nitrogen gas Use of other types of gas will shorten the life of parts including consumables or may damage the equipment CAUTION Gas pressure Keep the pressure of the gas to be fed below 0 02 MPaG If...

Страница 96: ...nsumables are not covered by this warranty Consumables out of warranty 1 O rings and packings used in HELIOT 2 Ion source B A type 3 Pirani gauge sensor head WP 01 4 Rotary pump oil R 2 5 Compound mol...

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