Ulvac HELIOT 301, Инструкция по эксплуатации

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1-2 Operating Modes
HELIOT runs according to the program installed in the basic unit. Its operating modes can
roughly divided into the initial state, startup mode, test mode, stop mode and error mode.
Representative series of actions are given below.
Initial state Main power ON The main power is turned ON.
↓
Press START/STOP.
Pumping system starting The molecular compound pump is in static rotation.
↓
Zero adjustment Measures the zero point (background).
↓
He peak adjustment Searches for the most efficient voltage for helium
detection.
↓
Fine leak flow sensitivity calibration Performs fine leak flow sensitivity calibration.
↓
Startup mode Middle leak flow sensitivity
calibration
Performs middle leak flow sensitivity calibration.
↓
Gross leak flow sensitivity calibration Performs gross leak flow sensitivity calibration.
↓
Zero adjustment Performs zero point measurement.
↓
Test mode standby Ready for execution of test.
↓
Press TEST
Test port roughing Pumps the test port from atm. pressure.
↓
Test mode Gross leak flow Executes test of gross leak flow.
↓
Middle leak flow Executes test of middle leak flow.
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Fine leak flow Executes test of fine leak flow.
↓
Press VENT
Test mode standby Ready for execution of test.
↓
Press START/STOP.
Stop mode Pumping system OFF Terminates the action of pumping system.
↓
Electrical system OFF Turns OFF the electrical system.
↓
Main power OFF
Message display Displays error message
↓
Error mode On standby Waits by displaying message.
↓
Press
Returns to test mode standby In case of "Notice" display, returns to standby.
↓
Stop mode execution In case of "Caution" display, executes the stop mode.