Ulvac HELIOT 301, Инструкция по эксплуатации

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4-4-4 Inhibition of input of setting
If an inhibited item is entered for an input value or item selection in setting, the message
"Error" will be displayed. In that event, press to reset the message and enter the
correct setting.
Setpoint H
5.0E-16 Pa·m
3
/s
1) Enter 5.0E-16 at the setpoint.
↓
Press
2) Press the input switch .
Error
3) The error message “Error" is displayed.
↓
Press
4) Press the input switch to clear the message.
Setpoint H
5.0E-08 Pa·m
3
/s
5) The previous input is inactivated and the previous setting is
displayed.
Enter the set value again and press to set it again.
<Inhibited settings>
• The sniffer mode and big flow mode cannot be set when in the flow selection mode of
HELIOT 301.
• The setpoint H value cannot be entered unless it is greater than the setpoint L value.
• The setpoint L value cannot be entered unless it is smaller than the setpoint H value.
• The setpoint value cannot be entered unless it is within the range of E-11 through E-2.
• When log. display is selected, fixed range cannot be set.
• If the graph display is set to log. when “FIX” range is selected, auto range will
automatically be set.
• The sniffer mode cannot be set by other than Model 302.
• The big flow mode cannot be set by other than Model 303.