4-5-2 Quick start.......................................................................................................35
4-6 Test Mode ............................................................................................................36
4-6-1 Standby ............................................................................................................37
4-6-2 Auto flow..........................................................................................................37
4-6-3 Gross
leak flow ................................................................................................38
4-6-4 Middle
leak flow ..............................................................................................39
4-6-5 Fine
leak flow ..................................................................................................40
4-6-6 Zero
tracking function.....................................................................................41
4-6-7
How to use the internal calibration leak........................................................ 42
4-6-8 Test end ...........................................................................................................43
4-7 Stop Mode............................................................................................................44
4-7-1 How
to
shut down............................................................................................44
4-7-2 After
shutdown ................................................................................................44
4-8 Error Mode ..........................................................................................................45
4-8-1 Error mode.......................................................................................................45
(1) “Caution” .............................................................................................................45
(2) “Notice”................................................................................................................46
4-8-2 List
of
error messages .....................................................................................48
5. EXAMPLES
OF APPLICATION...............................................................................49
Case 1 (Test object with small capacity) ....................................................................49
Case 2 (Test object with large capacity).....................................................................50
Case 3 High sensitivity test........................................................................................51
Case 4 (Test object with large capacity, with fore pumping system)........................ 52
Case 5 (Leak test of other equipment) .......................................................................55
6. MAINTENANCE........................................................................................................56
6-1
List of Maintenance Items..................................................................................57
6-2 Maintenance Procedure ......................................................................................58
6-2-1 Removing
the
external panel ..........................................................................58
(1) Front
panel..........................................................................................................58
(2) Top
panel.............................................................................................................58
(3) Left
side panel.....................................................................................................59
(4) Right
side panel ..................................................................................................59
(5) Rear
panel ...........................................................................................................60
6-2-2 Maintenance
of rotary pump ..........................................................................60
6-2-3 Maintenance
of
compound molecular pump...................................................61
6-2-4 Maintenance
of
Pirani gauge sensor head ..................................................... 62
6-2-5 Maintenance
of ion source...............................................................................63
7. TROUBLESHOOTING..............................................................................................64
7-1 Caution ................................................................................................................65
7-2 Notice...................................................................................................................67
7-3 Other....................................................................................................................71
8. INPUT/OUTPUT........................................................................................................72
8-1 ACCESSORY
Input/Output ...............................................................................72
(1)
List of input/output signals ................................................................................73
(2) Description
of signals..........................................................................................73
(3) Output signal ......................................................................................................74
(4) Input
signal .........................................................................................................75
(5) Operable
input format ........................................................................................76
(6) List
of
system errors ...........................................................................................77
(7) Input/output
timing chart ..................................................................................79
8-2 REC.
OUT Output...............................................................................................80
8-3 EXT.
V Output ....................................................................................................81
8-4 PRINTER Output ...............................................................................................82
8-5 RS232C
Input/Output.........................................................................................83
9. MISCELLANEOUS ...................................................................................................85
9-1 Method
of
Test Port Purge..................................................................................85
10. WARRANTY ...........................................................................................................86
Содержание HELIOT 301
Страница 88: ......
