Ulvac HELIOT 301, Инструкция по эксплуатации

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4-3-3 Setting the value of built-in calibration leak
This is a mode of entering the setting of the value of the built-in calibration leak. This is an
important value that will be reference in calculating sensitivity in automatic sensitivity
calibration. This mode is independent of other modes. Set up this mode with the main
power turned OFF.
Method of setting
↓
Press + main power ON
Standard leak
2.2E-08 Pa·m
3
/s
↓
↓
Press
1) Verify that the main power is turned OFF and the instrument
is completely shut down.
2) Turn ON the main power while pressing the mode switch
on the controller.
Standard leak
2.0E-08 Pa·m
3
/s
↓
↓
↓
↓
↓
Press
3) Several seconds later, "Standard leak" and the current set
value are displayed.
4) Press the input change switch once.
5) After changing the value by pressing , press the return
switch once.
6) When the cursor has moved to the next value, enter a value
with and in the same manner.
Standard leak
Temp. coef. 2.3%
↓
↓
↓
↓
Press twice
7) When a 4-digit numerical value is entered, temperature
coefficient and factor value are displayed.
8) It is not necessary to change this value because the
temperature coefficient of the calibration leak built in
HELIOT is 2.3%/°C. You can press the return key
twice to ignore the change of value.
Please wait
↓
Several seconds later
Standard leak
2.0E-08 Pa·m
3
/s
↓
Main power OFF
9) With completion of input of the temperature coefficient,
"Please wait" is displayed.
10) The changed set value is displayed several seconds later.
11) Turn OFF the main power
↓
Setting is completed.
* One of the characteristics of the calibration leak is that the calibration leak value changes with
temperature and time. Temperature change can be ignored because the temperature sensor in
HELIOT corrects temperature by measuring the temperature of the tube surface of the calibration
leak, but regarding change with time (secular change), the set value must be corrected by the
user.
(Temperature coefficient 2.3%/°C) (Aging factor –2.3%/year)