Ulvac HELIOT 301, Инструкция по эксплуатации

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2-3-2 Pumping system
No. Name Function
1 Compound molecular pump
(CPM)
Main pump (TMH063-003-002 30 l/sec)
2 Rotary pump (RP) Roughing and fore pump (Model GHD-030, 30 l/min)
3 Analyzer tube ion source Ionizes helium molecules.
4 Analyzer tube preamplifier Detects helium ions by microammeter.
5 Pirani gauge sensor head Measures the pressure at the test port.
6 Test valve 1 (TV1) Test valve for fine leak flow.
7 Test valve 2 (TV2) Test valve for middle leak flow.
8 Test valve 3 (TV3) Test valve for gross leak flow.
9 Calibration vent valve (CLV) Valve that opens/closes the calibration leak.
10 Vent valve (VV) Valve that vents the test port.
11 Fore line vent valve (FVV) Valve that vents the fore line.
12 Fore line valve (FV) Valve that isolates the compound molecular pump (CPM)
and rotary pump (RP).
13 TMP vent valve (CVV) Valve that vents CPM to atm. pressure.
14 Test port NW16 test object connecting port.
15 Calibration leak Outputs helium leak as reference.
16 Vent port Equipped with a sinter metal filter as standard.
17 Blank flange Used to seal the test port.