Ulvac HELIOT 301, Инструкция по эксплуатации

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4-4-5 Methods of entering settings
(1) Method of entering the setting of the sensitivity calibration execute mode.
Used when making automatic sensitivity calibration in the test mode standby state.
This can be used effectively when the background has changed in a test over a long
time or due to stagnation of helium in the piping and detector.
Automatic sensitivity calibration can be executed in the test mode standby state.
Test mode L
Standby
↓
Press
1) Attach a blank flange to the test port.
2) Press the mode switch
once in the test mode standby
state. Sensitivity calibration starts.
Calibration
Enter to start
3) Press the return switch once in the test mode standby
state.
↓
Press
Automatic sensitivity calibration starts.
Startup mode
Pumping
↓
4) The test port is pumped after roughing of test port
→
gross
leak flow
→
middle leak flow
→
fine leak flow.
Startup mode
Zero adjusting
5) Adjust the zero point, which is the reference of leak rate.
↓
Startup mode
He peak adjusting
6) The calibration leak valve opens and the helium characteristic
peak is adjusted.
↓
Startup mode
F. calibrating
7) Makes sensitivity calibration of fine leak flow.
↓
Startup mode
M. calibrating
8) Makes sensitivity calibration of middle leak flow.
↓
Startup mode
G. calibrating
9) Makes sensitivity calibration of gross leak flow.
↓
Startup mode
Zero adjusting
10) Verify the helium peak and sensitivity against zero point.
↓
Startup mode
Startup complete
11) Sensitivity calibration is completed.
↓
Test mode L
Standby
12) Reset the sensitivity calibration mode and vent the test port to
return to test mode standby.
!
CAUTION
Sensitivity calibration
Before making sensitivity calibration, attach a blank flange to the test port.
If sensitivity calibration is made with piping of large capacity attached,
there can be an error in sensitivity.