Contents
OM-SC7610
SC7610 Sputter Coater
6
Issue 1
1.3
Illustrations
Figure 2.1 - Hazard Warning Symbols ....................................................................... 8
Figure 2.2 - International Warning Symbols ............................................................... 9
Figure 2.3 - Typical Signs as shown in this Manual .................................................... 9
Figure 2.4 - Typical Signs as shown in this Manual ................................................... 9
Figure 2.5 - Typical Warnings, as shown in this Manual ............................................ 9
Figure 4.1 - SC7610 Sputter Coater ........................................................................... 15
Figure 4.2 - SC7610 Sputter Coater Operation........................................................... 16
Figure 4.3 - SC7610 Sputter Coater, Front Panel Controls ........................................ 17
Figure 4.4 - SC7610 Sputter Coater, Rear Panel Connections .................................. 18
Figure 5.1 - SC7610 Connections .............................................................................. 21
Figure 6.1 - SC7610 Sputtering Rates ....................................................................... 25
Figure 7.1 - Target Replacement ............................................................................... 27
1.4
Tables
Table 2.1 - Personal Operational Risks ...................................................................... 10
Table 4.1 - SC7610 Sputter Coater, Front Panel Control Descriptions ...................... 17
Table 4.2 - SC7610 Sputter Coater, Rear Panel Connection Descriptions ................ 18
Table 7.1 - Spare Parts .............................................................................................. 28
Table 8.1 - Trouble Shooting ...................................................................................... 29
Table 8.2 - Fault Prevention ....................................................................................... 29