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OM-SC7610

Description

Issue 1

15

SC7610 Sputter Coater

  4.4

Physical Description

The SC7610 Sputter Coater is a simple to operate compact magnetron sputtering system designed to
be used for coating Scanning Electron Microscopy (SEM) specimens.  The system can only be
operated in manual mode.

The SC7610 Sputter Coater is comprised of three main parts:

The Cabinet assembly
The Vacuum chamber
The Sputter head

The cabinet assembly, which supports the vacuum chamber, contains a high voltage power supply,
vacuum manifold and gauging. Mounted on the front panel of the cabinet are switches and meters
which provide the operator interface to the system.  All service connections to the system are made via
the rear panel. The cabinet is constructed in a manner so as to comply with the European EMC
regulations.

The vacuum chamber is formed by the sputter head top plate assembly, the glass work chamber and
the baseplate assembly mounted on the top panel of the cabinet. A safety interlock, conforming to IEC
204, is also incorporated. The integrity of the vacuum is maintained by circular "L" gaskets either end
of the vacuum chamber.

The top plate supports the cathode (target) and magnetic deflection system incorporating a dark space
shield and a radially magnetised 6 pole magnet which confines the plasma within the target area.
Connectors (secured to the top plate), provide the necessary electrical and gas connections between
the top plate and the rear panel connectors of the cabinet.

The SC7610 Sputter Coater produces uniform fine grain coating for SEM applications. The sputter
head operates at fixed voltage of 800V DC. Coating time is controlled by a 180 second solid state timer
with 15 second resolution. The vacuum level and plasma current are monitored by analogue meters.
The standard adjustable height specimen stage can be replaced by an optional water cooled stage.

The front panel, includes the chamber pressure and plasma current analogue meters, the timer select
switch, the pump start switch, the process (coat) start switch, the set plasma current momentary action
switch, and the argon leak and vent valves.

The rear panel incorporates the power on/off switch, the rotary pump electrical outlet socket, the
vacuum hose connection port, the argon inlet nipple connected internally to the leak and vent valves,
the HV and ground connection sockets, the hose connection nipple for the pressure safety switch and
the various fuses. The water connectors are only incorporated when the water cooled stage is
incorporated into the baseplate.

For carbon coating (SEM applications only), the top plate assembly can be replaced with an optional
carbon rod or carbon fibre evaporation source operated from a low voltage, high current power supply
(10V/100A (rod), 20V/50A(fibre)). The sputter head, for safety reasons, is vacuum interlocked to
prevent operation of the integral HV Power Supply when the Carbon Evaporation Top plate is used.

Figure 4.1 SC7610 Sputter Coater

Содержание SC7610

Страница 1: ...SC7610 Sputter Coater Operating Manual Document Number OM SC7610 Issue 1 01 02...

Страница 2: ...and manufactured by Quorum Technologies contact your local representative or directly to Quorum Technologies at the address above Carbon and Sputter Coaters Plasma Reactor for ashing and etching High...

Страница 3: ...escription Identifies each of the equipment items and provides an overview of their functions and how they work Chapter 5 Installation Instructions on how this Instrument should be installed and the c...

Страница 4: ...Hazard to Operator 9 2 6 Risk Analysis 10 2 6 1 Personal Operational Risks 10 2 6 2 Hazardous Materials 10 2 7 Good Working Practices 11 2 8 SC7610 Sputter Coater Specific Safety Hazards 11 2 8 1 Con...

Страница 5: ...ates 25 Chapter 7 Maintenance 26 7 1 Maintenance General 26 7 2 Cleaning 26 7 2 1 Vacuum Chamber Cleaning 26 7 3 Target Replacement 27 7 3 1 Target Removal 27 7 3 2 Refit New Target 27 7 4 No Discharg...

Страница 6: ...Figure 4 2 SC7610 Sputter Coater Operation 16 Figure 4 3 SC7610 Sputter Coater Front Panel Controls 17 Figure 4 4 SC7610 Sputter Coater Rear Panel Connections 18 Figure 5 1 SC7610 Connections 21 Figur...

Страница 7: ...perator or in a service capacity Quorum Technologies is committed to providing a safe working environment for its employees and those that use it s equipment and conducts its business responsibly and...

Страница 8: ...electronic equipment or dismantling of the instruments Service Engineers who are suitably trained to assess and isolate electrical mechanical and vacuum hazards should be the only personnel who acces...

Страница 9: ...3 2 5 5 Serious Damage to Instruments WARNING Do NOT operate without first filling the reservoir with water as this will damage both the pump and the heater Figure 2 4 Typical Warning sign as shown in...

Страница 10: ...ore use in the vacuum system It should be noted that isopropanol is a flammable liquid and as such should not be used on hot surfaces In addition it is recommended that protective gloves are worn when...

Страница 11: ...nces in an appropriate manner Use the correct tool for the job Keep a straight back and bend from the knees when lifting heavy objects Wear protective clothing when using liquid nitrogen Affix pressur...

Страница 12: ...ch covers failure during the first 12 months after delivery Returns must be sent carriage paid Quorum Technologies will cover the return carriage costs This covers defects which arise as a result of a...

Страница 13: ...ater SC502 314C Platinum Target SC502 314D Nickel Target SC502 314E Silver Target SC502 314G Palladium Target 4 1 2 Accessories The following accessories are available from Quorum Technologies E5005G...

Страница 14: ...be simply converted to deposit carbon by the addition of an optional carbon evaporation attachment consisting of a switchable Voltage power supply CA7615 and a Carbon fibre head CA076F or Carbon rod...

Страница 15: ...ry electrical and gas connections between the top plate and the rear panel connectors of the cabinet The SC7610 Sputter Coater produces uniform fine grain coating for SEM applications The sputter head...

Страница 16: ...ard the target causing erosion of the target material The dislodged target atoms falling toward the sample follow multiple paths due to collisions with the ionized gas coating the sample on all expose...

Страница 17: ...rrent START PROCESS Operation of this non latching switch initiates the sputtering process the HV supply is activated until disconnected by the timer LEAK This valve leaks gas into the vacuum chamber...

Страница 18: ...h forms an integral part of the pressure interlock switch Only accessible when the rear panel is removed HT High voltage socket connects a negative supply to the cathode mounted in the top plate assem...

Страница 19: ...at a suitable mains electricity supply 110 Vac 20amps or 240 Vac 13amps frequency 50 60 Hz is available Check that the voltage label attached to the side of the cabinet is suitable for the local volta...

Страница 20: ...f the cabinet i Connect 3mm bore gas tubing supplied from argon cylinder regulator to GAS IN hose nipple ii Connect 20mm bore vacuum tubing supplied from the rotary pump to the VACUUM connector Ensure...

Страница 21: ...OM SC7610 Installation Issue 1 21 SC7610 Sputter Coater Figure 5 1 SC7610 Connections...

Страница 22: ...et the rear panel mounted POWER ON OFF switch to the down position ON b Set vacuum pressure i Operate START PUMP switch the integeral indicator will illuminate and the rotary pump will start ii After...

Страница 23: ...n experimentally determined constant based on The metal being sputtered The gas being used 45 mm approx target to sample distance For gold used with argon K 0 17 approx For gold used with air K 0 07 a...

Страница 24: ...r the vacuum pressure When the pressure begins to rise intermittently operate the SET PLASMA button continuing to adjust the LEAK valve The PROCESS CURRENT meter will register the current flow Open or...

Страница 25: ...urrent Evacuation of the work chamber was achieved with a 90 l min two stage rotary pump Each target was cleaned by sputtering at 25mA for three minutes prior to coating for the measurements The graph...

Страница 26: ...reason to clean the system If the system is contaminated by handling or air bourne pollution carry out the following procedure For cleaning use a nylon abrasive pad Scotchbrite or similar and Cleanin...

Страница 27: ...king surface d To release the Shroud loosen the 3 mm set screw Remove the Shroud e Unscrew and remove the Target Clamp if the Target Clamp will not unscrew lubricate lightly with isopropanol Remove an...

Страница 28: ...for future use iv Remove two screws to release the VACUUM IN connector retain the screws for future use v Ease the rear panel away from the main assembly vi F3 fuse holder is mounted on top of the Pr...

Страница 29: ...nti surge 240V supply or 3A 20mm Anti surge 120V supply 5 2 1 4 6 2 Triangular patterns or holes on Target Target at end of life Replace Target 7 3 No Discharge Current Low or No Vacuum Pressure Fuse...

Страница 30: ...68324 Tel 65 289 5500 Fax 65 289 5522 Agar Scientific 66a Cambridge Road STANSTEAD Essex CM24 8DA UNITED KINGDOM Tel 1279 813519 Fax 1279 815106 Ax Lab A S Srandboulavarden 64 DK 2100 COPENHAGEN DENMA...

Страница 31: ...enance General 26 Maintenance 26 Manual Layout 3 No Discharge Current 28 Operation 22 Operators and Service Engineers 8 Optional Items 13 Overview 14 Personal Operational Risks 10 Physical Description...

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