OM-SC7610
Description
Issue 1
15
SC7610 Sputter Coater
4.4
Physical Description
The SC7610 Sputter Coater is a simple to operate compact magnetron sputtering system designed to
be used for coating Scanning Electron Microscopy (SEM) specimens. The system can only be
operated in manual mode.
The SC7610 Sputter Coater is comprised of three main parts:
The Cabinet assembly
The Vacuum chamber
The Sputter head
The cabinet assembly, which supports the vacuum chamber, contains a high voltage power supply,
vacuum manifold and gauging. Mounted on the front panel of the cabinet are switches and meters
which provide the operator interface to the system. All service connections to the system are made via
the rear panel. The cabinet is constructed in a manner so as to comply with the European EMC
regulations.
The vacuum chamber is formed by the sputter head top plate assembly, the glass work chamber and
the baseplate assembly mounted on the top panel of the cabinet. A safety interlock, conforming to IEC
204, is also incorporated. The integrity of the vacuum is maintained by circular "L" gaskets either end
of the vacuum chamber.
The top plate supports the cathode (target) and magnetic deflection system incorporating a dark space
shield and a radially magnetised 6 pole magnet which confines the plasma within the target area.
Connectors (secured to the top plate), provide the necessary electrical and gas connections between
the top plate and the rear panel connectors of the cabinet.
The SC7610 Sputter Coater produces uniform fine grain coating for SEM applications. The sputter
head operates at fixed voltage of 800V DC. Coating time is controlled by a 180 second solid state timer
with 15 second resolution. The vacuum level and plasma current are monitored by analogue meters.
The standard adjustable height specimen stage can be replaced by an optional water cooled stage.
The front panel, includes the chamber pressure and plasma current analogue meters, the timer select
switch, the pump start switch, the process (coat) start switch, the set plasma current momentary action
switch, and the argon leak and vent valves.
The rear panel incorporates the power on/off switch, the rotary pump electrical outlet socket, the
vacuum hose connection port, the argon inlet nipple connected internally to the leak and vent valves,
the HV and ground connection sockets, the hose connection nipple for the pressure safety switch and
the various fuses. The water connectors are only incorporated when the water cooled stage is
incorporated into the baseplate.
For carbon coating (SEM applications only), the top plate assembly can be replaced with an optional
carbon rod or carbon fibre evaporation source operated from a low voltage, high current power supply
(10V/100A (rod), 20V/50A(fibre)). The sputter head, for safety reasons, is vacuum interlocked to
prevent operation of the integral HV Power Supply when the Carbon Evaporation Top plate is used.
Figure 4.1 SC7610 Sputter Coater