OM-SC7610
Description
Issue 1
17
SC7610 Sputter Coater
4.6
SC7610 Panel Details
The SC7610 Sputter Coater is designed to be bench mounted, it provides 0 - 1.2 kV D.C. output.
Process current of up to 0 - 50 mA is available with a 180 second timer to control the process.
4.6.1
SC7610 Front Panel Controls
The controls and indicators mounted on the SC7610 Sputter Coater front panel are described below
and identified in Figure 4.3 and described in Table 4.1.
Figure 4.3 – SC7610 Sputter Coater, Front Panel Controls
CONTROL or
INDICATOR
DESCRIPTION
START PUMP
A press to operate / press to release switch sets the vacuum pump to ON. After 10-15
seconds a fall in pressure within the chamber will be indicated on the
CHAMBER
PRESSURE
meter.
SET PLASMA
This non-latching switch (hold to operate) is used during the setting of the
LEAK
valve, which is adjusted to set the correct plasma current.
START PROCESS
Operation of this non-latching switch initiates the sputtering process, the HV supply is
activated, until disconnected by the timer.
LEAK
This valve leaks gas into the vacuum chamber to control the plasma current. Used in
conjunction with the
SET PLASMA
switch to adjust the correct operating conditions.
VENT
This valve is opened to admit air into the system after a sputtering process has been
completed and the vacuum pump has been turned OFF. During the sputtering
process the valve must be SHUT (fully clockwise).
TIME-SECONDS
A twelve position rotary switch sets the required process time, between 15 and 180
seconds, in 15 second steps.
CHAMBER
PRESSURE mbar
This meter provides an indication of pressure within the chamber. The normal
readings are:
Pressure with leak valve closed 0.03 - 0.04 mbar or better.
Pressure with leak valve adjusted 0.06 mbar (approx).
PROCESS
CURRENT mA
This meter provides an indication of plasma current flow. Under the recommended
operating conditions:
Plasma current approx. 18 mA.
Table 4.1 – SC7610 Front Panel Control Descriptions
