OM-SC7610
Installation
Issue 1
19
SC7610 Sputter Coater
5 Installation
Quorum Technologies has carefully packed the
SC7610 Sputter Coater
instrument so that it will
reach its destination in perfect operating order. Do NOT discard any packing materials until the unit
has been inspected for any transit damage and the instrument has been used to the customers
satisfaction.
If any damage is found, notify the carrier and Quorum Technologies (or local agent) immediately. If
it is necessary to return the shipment, use the packaging as supplied and follow the instructions in
this manual for return of goods paragraph 3.1.
5.1
Unpacking Checklist
The
Equipment package will normally be despatched from the factory in one box. Inside the box the
following will be found, refer and check each item off against the supplied packing list.
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SC7610 Sputter Coater
- packed in its own internal packaging, (Target fitted to Top
Plate).
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SC7610 Class Cylinder – packed separately.
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SC7610 START-UP kit - packed in a polythene bag.
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Optional Spares - packed individually.
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Documentation - Inserted in a folder, containing the operating manual and a standard
forms pack.
5.1.1 Preparation
(a)
Ensure that a suitable
mains electricity supply
(110 Vac - 20amps or 240 Vac - 13amps,
frequency 50/60 Hz) is available. Check that the voltage label attached to the side of the
cabinet is suitable for the local voltage and frequency.
The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is
250VA excluding the rotary pump. The rotary pump outlet is rated at 230V 10A or 110V at
16A. The 240V pump outlet uses a 3-pin plug (404440310) which is supplied or 110V
standard US plug (not supplied).
(b)
Ensure that a suitable
gas supply
is available.
Typically: A commerical cylinder of Argon Gas (Zero Grade), fitted with a two stage regulator,
in order to deliver gas at a pressure around 5-10 psi (0.7bar).
(c)
Ensure that a suitable
cooling
water supply
is available.
This service is not required, unless the water-cooled stage option is fitted.
Ensure that a suitable supply of cooling water is available, a flow rate of 1 - 3 litres / minute of
clean water is required. If a closed circuit recirculating chiller is used, avoid operating below
dew point.
(d)
Ensure that a suitable
vacuum pump
is available.
Where a rotary pump is used, ensure that the rotary pump has been filled with oil, in
accordance with the manufacturers instructions. The exhaust should be filtered or expelled to
a safe area. All pumps supplied by Quorum Technologies are fitted with an exhaust filter.