Quorum SC7610, Руководство по эксплуатации, Страница: 13 / 31

OM-SC7610
Description
Issue 1 13 SC7610 Sputter Coater
4 Description
4.1 Equipment
Each SC7610 Sputter Coater when supplied as a complete package, includes the basic unit, a Gold
Palladium target, a start up kit and operation manual. Items can be ordered as a full package or
separately against the following numbers:
SC7610 Sputter Coater 220-240V complete, consisting of the following:
LA761002D Sputter Coater 220-240V. With Gold/Palladium target
SC7610-STARTUP Start up Kit
OM-SC7610 Operation Manual
SC7610/110V Sputter Coater 110-120V complete, consisting of the following:
LA761003D Sputter Coater 110-120V. With Gold/Palladium target
SC7610-STARTUP Start up Kit
OM-SC7610 Operation Manual
4.1.1 Optional items
The following optional items are available from Quorum Technologies:
SC502-314A Gold Target
SC502-314B Gold/Palladium Target (1 off supplied with Sputter Coater)
SC502-314C Platinum Target
SC502-314D Nickel Target
SC502-314E Silver Target
SC502-314G Palladium Target
4.1.2 Accessories
The following accessories are available from Quorum Technologies:
E5005G Rotary Pump, 90 1/m, 110/240 Volt, 50/60Hz, fitted with E5004 rotary pump
exhaust filter.
WS7608 A kit of parts to add a water cooled specimen stage to a SC7610 Sputter Coater,
the kit contains: Water Cooled Stage, Inlet and Outlet Connectors, Piping and
Fixings.
CA7615 A carbon coating accessory which can be associated with any of the following
sputter coaters manufactured by Quorum Technologies is available:
SC7620 or SC7640.
This accessory which makes use of the vacuum pump and vacuum control
facilities of the associated sputter coaters, utilises either carbon fibre or carbon
rods in the evaporation process.
A 110 volt version is available as part number CA7615/110V
CA076R Carbon Rod Head for use with the CA7615.
CA076F Carbon Fibre Head for use with the CA7615.
For further information about the CA7615 carbon coating accessory refer to operating manual OM-
CA7615.