Maintenance
OM-SC7610
SC7610 Sputter Coater
28
Issue 1
7.4
No Discharge Current
If after switching power on,
SET PLASMA
is operated and the Sputter Coater does not respond,
check the following:
(a)
If
SET PLASMA
indicator is illuminated, ensure the vacuum pressure is 10
-1
mbar or better, if
pressure is above this level check for leaks (check
VENT
is closed).
(a) If
SET PLASMA
indicator is not illuminated check fuse F2 (control supply fuse, fitted to the
sputter coater rear panel and F3 (pressure interlock fuse fitted within the sputter coater). If
fuse is blown replace with the correct fuse F3, 630mA anti-surge as follows:
(i)
Ensure power supplies to the Sputter Coater are set to OFF.
(ii)
Remove all electrical and gas connections to the rear panel.
(iii)
Remove 10 screws to release the rear panel, retain the screws for future use.
(iv)
Remove two screws to release the
VACUUM IN
connector, retain the screws for future
use.
(v)
Ease the rear panel away from the main assembly.
(vi)
F3 fuse holder is mounted on top of the Pressure Interlock Assembly mounted on the
rear panel.
(vii)
Remove the fuse, test and if necessary replace. Discard the blown fuse.
(viii)
Reassemble the Sputter Coater.
7.5
Spare Parts
Those parts, which due to wear and tear are more commonly required, are listed in the table as
follows.
PART NUMBER
DESCRIPTION
QTY
E5004
Oil Mist Filter
1
SC502-314A
SC502-314B
SC502-314C
SC502-314D
SC502-314E
SC502-314G
Gold Target
Gold/Palladium Target
Platinum Target
Nickel Target
Silver Target
Palladium Target
1
1
1
1
1
1
351270380A
351220320
Argon Gas Tubing
Vacuum Tubing
2 metres
1metre
405150310
405100310
405020210
405030210
405006210
Fuse – 15A Type T 1
1
/
4
” (F1- 110V)
Fuse – 10A Type T 1
1
/
4
” (F1- 240V)
Fuse – 2A Type T 20mm (F2, F4- 110V)
Fuse – 3A Type T 20mm (F2, F4- 240V)
Fuse – 630mA Type T 20mm (F3)
1
1
1
1
1
Table 7.1 - Spare Parts
