
Installation
OM-SC7610
SC7610 Sputter Coater
20
Issue 1
5.2 SC7610
Installation
WARNING
HAZARD TO HEALTH!
Potentially lethal voltages are used in this equipment.
Before making / breaking connections to the equipment, ensure power is
switched off and that it is safe to proceed.
WARNING
HAZARD TO HEALTH!
Precautions to be taken when lifting this equipment.
Weight of unit is 25 Kilograms (55lbs)
(a)
Position the Sputter Coater Cabinet on a suitable level working surface, Access to both front
and rear of the cabinet are required.
(b)
Clean the ‘L’ section gaskets using a cloth moistened with isopropanol and fit to the glass
cylinder, then position the cylinder centrally on the base plate (mounted on top of the
cabinet).
(c)
Position the top plate assembly on the glass cylinder.
(d)
Position the vacuum pump as close as possible to the Sputter Coater.
5.2.1
Connections
The connections to be made are described below and illustrated in figure 5.1.
(a)
Make the following hose connections to the rear panel of the cabinet.
(i)
Connect 3mm bore gas tubing (supplied) from argon cylinder regulator to
(GAS IN)
hose nipple.
(ii)
Connect 20mm bore vacuum tubing (supplied) from the rotary pump to the
(VACUUM)
connector. Ensure the minimum length of hose is used.
(iii)
If the system is fitted with water cooling make connections to the
WATER
hose nipples
using 6 mm bore tubing.
(b)
Connect the Top Plate assembly to the rear panel of the cabinet using the attached
connectors:
(i)
Connect the HV cable, to the
HT
socket on rear panel.
(ii)
Connect the green/yellow (earth) lead, to the
GROUND
terminal on the rear panel.
(iii)
Connect the 3 mm bore gas tubing, to the hose nipple (identified as F3) on the rear
panel.
(c)
Make the following electrical connections to the rear panel of the cabinet:
(i)
Connect between the sputter coater power outlet
(ROTARY PUMP)
socket and the
vacuum pump.
If the rotary pump is supplied with the Sputter Coater a suitable connecting cable is
supplied with the pump, otherwise a suitable 3-way plug (which can be wired by the
user) is supplied.
(ii)
Connect the mains
(POWER IN)
cable via a suitable plug to the local supply, in
accordance with the cable colour coding:
Brown
-
Live
Blue
-
Neutral
Green/Yellow
-
Earth