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Agents

OM-SC7610

SC7610 Sputter Coater

Issue 1

Agents

List of Agents Supporting QUORUM TECHNOLOGIES Products.

H D Scientific Supplies Pty Ltd
P O Box 6044
Blacktown Business Centre
SIDNEY
NSW 2148

AUSTRALIA

Tel:

61 2962 16955

Fax:

61 2967 12293

Philips Electron Optics BV
Building AAE
Achtseweg Noord 5
PO Box 218
5600 MD EINDHOVEN

HOLLAND

Tel:

31 40276 6786

Fax:

31 40276 5141

Medic Corporation Ltd.
20 Peterkin Street
Wingate, Private Bag
LOWER HUTT

NEW ZEALAND

Tel:

64 577 0000

Fax:

64 577 2000

Omega Scientific Taiwan Ltd.
5F-1,415 Sec. 4
Hsin Yi Road
TAIPEI

TAIWAN,

ROC

Tel:

886 28780 5228

Fax:

886 28780 5225

Labco gmbH
Dr - Tritemmel - Gasse 8
A3013 PRESSBAUM

AUSTRIA

Tel:

43 2233 53838

Fax:

43 2233 53176

OED Technology Limited
22/F Beltrade Commercial Building
3 Burrows Street
WANCHAI

HONG KONG, CHINA

Tel:

852 838 2377

Fax:

852 838 0091

Nerliens Kemisk-Tekniske
Aktieselskap
Kampengaten 18
N-0654 OSLO

NORWAY

Tel:

47 2268 5070

Fax:

47 2267 6506

Zen-Yan Scientific Co. Ltd.
N

19, Lane 43 His-Tsun Road

Dai-Li City
TAICHUNG

TAIWAN,

ROC

Tel:

886 4393 2897

Fax:

886 4393 2401

Soquelec Limited
5757 Cavendish Building
Suite 101 MONTREAL
QUEBEC H4W 2W8

CANADA

Tel:

1 514 482 6427

Fax:

1 514 482 1929

Auro-Science Consulting Ltd
Varosfal Kos 5
Postabok 234
1300 BUDAPEST

HUNGARY

Tel:

361 242 1390

Fax:

361 242 1391

Solid Quest Inc
7

Floor Westgate Tower

Investment Drive
Madrigal Business Park
Ayala Alabang
MUNTINLUPA CITY 1780

PHILIPPINES

Tel:

632 850 5759

Fax:

632 850 5961

Becthai Bangkok Equip. Co Ltd.
308/1 Phaholyothin Road
Phayathai
BANGKOK 10400

THAILAND

Tel:

66 2615 2130

Fax:

66 2271 4533

Soquelec Ltd.
P O Box 42056
128 Queen Street South
Mississauga
ONTARIO L5M 4ZO

CANADA

Tel:

1 905 569 6613

Fax:

1 905 569 7171

Harley Instruments
Plot No. 4, Survey No. 47
Poona Satara Road
POONA 411009

INDIA

Tel:

91 2042 20602

Fax:

91 2042 20843

Labometer Lda
Rue Duque de Palmela
No. 30 10 F/G
1250-098 LISBOA

PORTUGAL

Tel:

351 2135 10180

Fax:

351 2135 25066

Tekser Koll Sti
Acibadem Ca. Erdem Sok
Baver Apr. No 6/1
Uskudar
ISTANBUL 81010

TURKEY

Tel:

90 216 327 4041

Fax:

90 216 327 4046

Edrin s.r.o
Kon vova 141
130 83 PRAHA 3

CZECH REPUBLIC

Tel:

42 2671 08255

Fax:

42 2671 08335

Eisenberg Brothers
13 Gush Etzion St
GIVAT SHUMEL 54030

ISRAEL

Tel:

972 3532 1715

Fax:

972 3532 5696

Antech Instruments PTE Ltd.
150 Kampong Ampat
#05-02 KA Centre

SINGAPORE 368324

Tel:

65 289 5500

Fax:

65 289 5522

Agar Scientific
66a Cambridge Road
STANSTEAD
Essex, CM24 8DA

UNITED KINGDOM

Tel:

1279 813519

Fax:

1279 815106

Ax Lab A/S
Srandboulavarden 64
DK-2100 COPENHAGEN

DENMARK

Tel:

45 3543 1881

Fax:

45 3543 0073

Jeol (Italia) S.p.A.
Centro Direzionale Ripamonti
Via Dei Tulipani 1
PIEVE EMANUELE (MI) 20090

ITALY

Tel:

39 02904 1431

Fax:

39 02904 14303

Set-Point Technology
SMM House, 543 Kyalami Boulevard
Kyalami Business Park
Midrand, 1686
PO Box 11400, VORNA VALLEY

SOUTH AFRICA

Tel:

27 11466 2200

Fax:

27 11466 2268

ISS
Pellowe House
Francis Road
Withington
MANCHESTER, M20 9XP

UNITED KINGDOM

Tel:

161 445 5446

Fax:

161 445 4914

Elexience
ZA Des Godets
9 Rue Des Petits-Ruisseaux
91370 VERRIERS-le-BUISSON

FRANCE

Tel:

33 1695 38000

Fax:

33 1601 19809

Nanovision SrL
Via Treviso, 33
20127 MILANO

ITALY

Tel:

39 2261 7204

Fax:

39 2261 7215

DAE IL Commerce
2F Jinsung B/D
326-34 Magoek-dong
Kangseo-gu
SEOUL

SOUTH KOREA

Tel: 82 2665 8056
Fax: 82 2665 8059

Jeol (UK) Ltd.
Silver Court, Watchmead
WELWYN GARDEN CITY
Herts, AL7 1LT

UNITED KINGDOM

Tel:

1707 377 117

Fax:

1707 373 254

Gala Instrumente gmbH
An der Schmalmach 42
BAD SCHMALMACH D-65307

GERMANY

Tel:

49 6124 77952

Fax:

49 6124 60274

Topcon Electron Beam Services Corp
75 - 1 Hasunuma - Cho
Itabashi - KU
TOKYO 174

JAPAN

Tel:

813 3558 2588

Fax:

813 5392 4992

Leica Espana SA
Nicaragua 46
BARCELONA 08029

SPAIN

Tel:

34 93 49 49530

Fax:

34 93 49 49532

Leo Electron Microscopy Ltd.
Clifton Road
CAMBRIDGE, CB1 3QH

UNITED KINGDOM

Tel:

1223 414 166

Fax:

1223 412 776

Asteriadis S.A
56 - 58 Spirou Trikoupi
PO Box 26140
GR-100 22
ATHENS

GREECE

Tel:

30 1 823 5383

Fax:

30 1 823 9567

Hi-Tech Instruments Sdn
60 Jalan Ind. PBP 3
Taman Ind Pusot, Bandar, Puchong
47100 PUCHONG, Selangor

MALAYSIA

Tel:

60 3589 11638

Fax:

60 3589 11639

Aname
C/Jose Fernandex Cuevas
14-B-282244 Pozvelo de Alarcon
MADRID

SPAIN

Tel: 34 91 352 3084
Fax: 34 91 352 3322

Rontec (UK) Ltd
Pellowe House
Withington
MANCHESTER, M20 9XP

UNITED KINGDOM

Tel:

161 448 0688

Fax:

161 448 0224

Goffin Meyvis
P O Box 265, Pergolesilaan 4
4600 AG BERGEN op ZOOM

HOLLAND
(

Also covers

, BELGIUM &

LUXEMBOURG)

Tel:

31 1642 90000

Fax:

31 1642 66651

Prisma Scientific Instruments Services
S/B (P.S.I.S.)
No. 15B & 15C Jalan Kenari 8
Puchong Jaya
Selangor Darul Ehsan
PUCHONG 47100

MALAYSIA

Tel:

60 3575 2035

Fax:

60 3575 3104

Atema Instrument
P O Box 7075
Gillbostraket 8
S-19207 SOLLENTUNA

SWEDEN

Tel:

46 8626 8365

Fax:

46 8626 8355

Energy Beam Sciences
PO Box 468
11 Bowles Road
AGAWAM MA01001

UNITED STATES OF AMERICA

Tel:

1 413 786 9322

Fax:

1 413 789 2786

Содержание SC7610

Страница 1: ...SC7610 Sputter Coater Operating Manual Document Number OM SC7610 Issue 1 01 02...

Страница 2: ...and manufactured by Quorum Technologies contact your local representative or directly to Quorum Technologies at the address above Carbon and Sputter Coaters Plasma Reactor for ashing and etching High...

Страница 3: ...escription Identifies each of the equipment items and provides an overview of their functions and how they work Chapter 5 Installation Instructions on how this Instrument should be installed and the c...

Страница 4: ...Hazard to Operator 9 2 6 Risk Analysis 10 2 6 1 Personal Operational Risks 10 2 6 2 Hazardous Materials 10 2 7 Good Working Practices 11 2 8 SC7610 Sputter Coater Specific Safety Hazards 11 2 8 1 Con...

Страница 5: ...ates 25 Chapter 7 Maintenance 26 7 1 Maintenance General 26 7 2 Cleaning 26 7 2 1 Vacuum Chamber Cleaning 26 7 3 Target Replacement 27 7 3 1 Target Removal 27 7 3 2 Refit New Target 27 7 4 No Discharg...

Страница 6: ...Figure 4 2 SC7610 Sputter Coater Operation 16 Figure 4 3 SC7610 Sputter Coater Front Panel Controls 17 Figure 4 4 SC7610 Sputter Coater Rear Panel Connections 18 Figure 5 1 SC7610 Connections 21 Figur...

Страница 7: ...perator or in a service capacity Quorum Technologies is committed to providing a safe working environment for its employees and those that use it s equipment and conducts its business responsibly and...

Страница 8: ...electronic equipment or dismantling of the instruments Service Engineers who are suitably trained to assess and isolate electrical mechanical and vacuum hazards should be the only personnel who acces...

Страница 9: ...3 2 5 5 Serious Damage to Instruments WARNING Do NOT operate without first filling the reservoir with water as this will damage both the pump and the heater Figure 2 4 Typical Warning sign as shown in...

Страница 10: ...ore use in the vacuum system It should be noted that isopropanol is a flammable liquid and as such should not be used on hot surfaces In addition it is recommended that protective gloves are worn when...

Страница 11: ...nces in an appropriate manner Use the correct tool for the job Keep a straight back and bend from the knees when lifting heavy objects Wear protective clothing when using liquid nitrogen Affix pressur...

Страница 12: ...ch covers failure during the first 12 months after delivery Returns must be sent carriage paid Quorum Technologies will cover the return carriage costs This covers defects which arise as a result of a...

Страница 13: ...ater SC502 314C Platinum Target SC502 314D Nickel Target SC502 314E Silver Target SC502 314G Palladium Target 4 1 2 Accessories The following accessories are available from Quorum Technologies E5005G...

Страница 14: ...be simply converted to deposit carbon by the addition of an optional carbon evaporation attachment consisting of a switchable Voltage power supply CA7615 and a Carbon fibre head CA076F or Carbon rod...

Страница 15: ...ry electrical and gas connections between the top plate and the rear panel connectors of the cabinet The SC7610 Sputter Coater produces uniform fine grain coating for SEM applications The sputter head...

Страница 16: ...ard the target causing erosion of the target material The dislodged target atoms falling toward the sample follow multiple paths due to collisions with the ionized gas coating the sample on all expose...

Страница 17: ...rrent START PROCESS Operation of this non latching switch initiates the sputtering process the HV supply is activated until disconnected by the timer LEAK This valve leaks gas into the vacuum chamber...

Страница 18: ...h forms an integral part of the pressure interlock switch Only accessible when the rear panel is removed HT High voltage socket connects a negative supply to the cathode mounted in the top plate assem...

Страница 19: ...at a suitable mains electricity supply 110 Vac 20amps or 240 Vac 13amps frequency 50 60 Hz is available Check that the voltage label attached to the side of the cabinet is suitable for the local volta...

Страница 20: ...f the cabinet i Connect 3mm bore gas tubing supplied from argon cylinder regulator to GAS IN hose nipple ii Connect 20mm bore vacuum tubing supplied from the rotary pump to the VACUUM connector Ensure...

Страница 21: ...OM SC7610 Installation Issue 1 21 SC7610 Sputter Coater Figure 5 1 SC7610 Connections...

Страница 22: ...et the rear panel mounted POWER ON OFF switch to the down position ON b Set vacuum pressure i Operate START PUMP switch the integeral indicator will illuminate and the rotary pump will start ii After...

Страница 23: ...n experimentally determined constant based on The metal being sputtered The gas being used 45 mm approx target to sample distance For gold used with argon K 0 17 approx For gold used with air K 0 07 a...

Страница 24: ...r the vacuum pressure When the pressure begins to rise intermittently operate the SET PLASMA button continuing to adjust the LEAK valve The PROCESS CURRENT meter will register the current flow Open or...

Страница 25: ...urrent Evacuation of the work chamber was achieved with a 90 l min two stage rotary pump Each target was cleaned by sputtering at 25mA for three minutes prior to coating for the measurements The graph...

Страница 26: ...reason to clean the system If the system is contaminated by handling or air bourne pollution carry out the following procedure For cleaning use a nylon abrasive pad Scotchbrite or similar and Cleanin...

Страница 27: ...king surface d To release the Shroud loosen the 3 mm set screw Remove the Shroud e Unscrew and remove the Target Clamp if the Target Clamp will not unscrew lubricate lightly with isopropanol Remove an...

Страница 28: ...for future use iv Remove two screws to release the VACUUM IN connector retain the screws for future use v Ease the rear panel away from the main assembly vi F3 fuse holder is mounted on top of the Pr...

Страница 29: ...nti surge 240V supply or 3A 20mm Anti surge 120V supply 5 2 1 4 6 2 Triangular patterns or holes on Target Target at end of life Replace Target 7 3 No Discharge Current Low or No Vacuum Pressure Fuse...

Страница 30: ...68324 Tel 65 289 5500 Fax 65 289 5522 Agar Scientific 66a Cambridge Road STANSTEAD Essex CM24 8DA UNITED KINGDOM Tel 1279 813519 Fax 1279 815106 Ax Lab A S Srandboulavarden 64 DK 2100 COPENHAGEN DENMA...

Страница 31: ...enance General 26 Maintenance 26 Manual Layout 3 No Discharge Current 28 Operation 22 Operators and Service Engineers 8 Optional Items 13 Overview 14 Personal Operational Risks 10 Physical Description...

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