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OM-SC7610

Contents

Issue 1

5

SC7610 Sputter Coater

Chapter 6 - Operation  .............................................................................................. 22

6.1

Test Procedure ............................................................................... 22

6.2

Coating Process ............................................................................. 23

6.3

Coating Specimens ........................................................................ 23

6.4

Sputtering Rates  ............................................................................ 25

Chapter 7 - Maintenance .......................................................................................... 26

7.1   

Maintenance - General  .................................................................. 26

7.2

Cleaning ......................................................................................... 26

7.2.1

Vacuum Chamber Cleaning  ................................................... 26

7.3

Target Replacement  ...................................................................... 27

7.3.1

Target Removal ...................................................................... 27

7.3.2

Refit New Target  .................................................................... 27

7.4

No Discharge Current  .................................................................... 28

7.5

Spare Parts ..................................................................................... 28

Chapter 8 - Fault Finding ......................................................................................... 29

8.1   

Trouble Shooting / Fault Finding  .................................................... 29

8.2

Fault Prevention  ............................................................................. 29

Chapter 9 - Agents  ................................................................................................... 30

Chapter 10 - Index  .................................................................................................... 31

Содержание SC7610

Страница 1: ...SC7610 Sputter Coater Operating Manual Document Number OM SC7610 Issue 1 01 02...

Страница 2: ...and manufactured by Quorum Technologies contact your local representative or directly to Quorum Technologies at the address above Carbon and Sputter Coaters Plasma Reactor for ashing and etching High...

Страница 3: ...escription Identifies each of the equipment items and provides an overview of their functions and how they work Chapter 5 Installation Instructions on how this Instrument should be installed and the c...

Страница 4: ...Hazard to Operator 9 2 6 Risk Analysis 10 2 6 1 Personal Operational Risks 10 2 6 2 Hazardous Materials 10 2 7 Good Working Practices 11 2 8 SC7610 Sputter Coater Specific Safety Hazards 11 2 8 1 Con...

Страница 5: ...ates 25 Chapter 7 Maintenance 26 7 1 Maintenance General 26 7 2 Cleaning 26 7 2 1 Vacuum Chamber Cleaning 26 7 3 Target Replacement 27 7 3 1 Target Removal 27 7 3 2 Refit New Target 27 7 4 No Discharg...

Страница 6: ...Figure 4 2 SC7610 Sputter Coater Operation 16 Figure 4 3 SC7610 Sputter Coater Front Panel Controls 17 Figure 4 4 SC7610 Sputter Coater Rear Panel Connections 18 Figure 5 1 SC7610 Connections 21 Figur...

Страница 7: ...perator or in a service capacity Quorum Technologies is committed to providing a safe working environment for its employees and those that use it s equipment and conducts its business responsibly and...

Страница 8: ...electronic equipment or dismantling of the instruments Service Engineers who are suitably trained to assess and isolate electrical mechanical and vacuum hazards should be the only personnel who acces...

Страница 9: ...3 2 5 5 Serious Damage to Instruments WARNING Do NOT operate without first filling the reservoir with water as this will damage both the pump and the heater Figure 2 4 Typical Warning sign as shown in...

Страница 10: ...ore use in the vacuum system It should be noted that isopropanol is a flammable liquid and as such should not be used on hot surfaces In addition it is recommended that protective gloves are worn when...

Страница 11: ...nces in an appropriate manner Use the correct tool for the job Keep a straight back and bend from the knees when lifting heavy objects Wear protective clothing when using liquid nitrogen Affix pressur...

Страница 12: ...ch covers failure during the first 12 months after delivery Returns must be sent carriage paid Quorum Technologies will cover the return carriage costs This covers defects which arise as a result of a...

Страница 13: ...ater SC502 314C Platinum Target SC502 314D Nickel Target SC502 314E Silver Target SC502 314G Palladium Target 4 1 2 Accessories The following accessories are available from Quorum Technologies E5005G...

Страница 14: ...be simply converted to deposit carbon by the addition of an optional carbon evaporation attachment consisting of a switchable Voltage power supply CA7615 and a Carbon fibre head CA076F or Carbon rod...

Страница 15: ...ry electrical and gas connections between the top plate and the rear panel connectors of the cabinet The SC7610 Sputter Coater produces uniform fine grain coating for SEM applications The sputter head...

Страница 16: ...ard the target causing erosion of the target material The dislodged target atoms falling toward the sample follow multiple paths due to collisions with the ionized gas coating the sample on all expose...

Страница 17: ...rrent START PROCESS Operation of this non latching switch initiates the sputtering process the HV supply is activated until disconnected by the timer LEAK This valve leaks gas into the vacuum chamber...

Страница 18: ...h forms an integral part of the pressure interlock switch Only accessible when the rear panel is removed HT High voltage socket connects a negative supply to the cathode mounted in the top plate assem...

Страница 19: ...at a suitable mains electricity supply 110 Vac 20amps or 240 Vac 13amps frequency 50 60 Hz is available Check that the voltage label attached to the side of the cabinet is suitable for the local volta...

Страница 20: ...f the cabinet i Connect 3mm bore gas tubing supplied from argon cylinder regulator to GAS IN hose nipple ii Connect 20mm bore vacuum tubing supplied from the rotary pump to the VACUUM connector Ensure...

Страница 21: ...OM SC7610 Installation Issue 1 21 SC7610 Sputter Coater Figure 5 1 SC7610 Connections...

Страница 22: ...et the rear panel mounted POWER ON OFF switch to the down position ON b Set vacuum pressure i Operate START PUMP switch the integeral indicator will illuminate and the rotary pump will start ii After...

Страница 23: ...n experimentally determined constant based on The metal being sputtered The gas being used 45 mm approx target to sample distance For gold used with argon K 0 17 approx For gold used with air K 0 07 a...

Страница 24: ...r the vacuum pressure When the pressure begins to rise intermittently operate the SET PLASMA button continuing to adjust the LEAK valve The PROCESS CURRENT meter will register the current flow Open or...

Страница 25: ...urrent Evacuation of the work chamber was achieved with a 90 l min two stage rotary pump Each target was cleaned by sputtering at 25mA for three minutes prior to coating for the measurements The graph...

Страница 26: ...reason to clean the system If the system is contaminated by handling or air bourne pollution carry out the following procedure For cleaning use a nylon abrasive pad Scotchbrite or similar and Cleanin...

Страница 27: ...king surface d To release the Shroud loosen the 3 mm set screw Remove the Shroud e Unscrew and remove the Target Clamp if the Target Clamp will not unscrew lubricate lightly with isopropanol Remove an...

Страница 28: ...for future use iv Remove two screws to release the VACUUM IN connector retain the screws for future use v Ease the rear panel away from the main assembly vi F3 fuse holder is mounted on top of the Pr...

Страница 29: ...nti surge 240V supply or 3A 20mm Anti surge 120V supply 5 2 1 4 6 2 Triangular patterns or holes on Target Target at end of life Replace Target 7 3 No Discharge Current Low or No Vacuum Pressure Fuse...

Страница 30: ...68324 Tel 65 289 5500 Fax 65 289 5522 Agar Scientific 66a Cambridge Road STANSTEAD Essex CM24 8DA UNITED KINGDOM Tel 1279 813519 Fax 1279 815106 Ax Lab A S Srandboulavarden 64 DK 2100 COPENHAGEN DENMA...

Страница 31: ...enance General 26 Maintenance 26 Manual Layout 3 No Discharge Current 28 Operation 22 Operators and Service Engineers 8 Optional Items 13 Overview 14 Personal Operational Risks 10 Physical Description...

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