
OM-SC7610
Fault Finding
Issue 1
29
SC7610 Sputter Coater
8
Fault Finding
We hope that you experience the minimum of problems throughout the lifespan of the instrument
but inevitably problems may occur. Any known problems associated with this type of instrument
have been listed below with the possible cause and suggestions to what to do. If problems continue
to occur, for example the fuse blows immediately when a new one is fitted, contact the Customer
Service Department at Quorum Technologies or your local agent, see Section 9 for list of agents
8.1
Trouble Shooting / Fault Finding
OBSERVATION
POSSIBLE CAUSE
REMEDY
PARA
Unit appears dead
- Cable connections not made
- Fuse blown
- Interlock not activating
- Check all cable connections
-
Replace fuse (F1) on back panel
10A 1
1
/
4
“ Anti-surge. - 240V supply
or
15A 1
1
/
4
“ Anti-surge. - 120V supply
- Check interlock is operating
5.2.1
4.6.2
-
Rotary Pump not Working
-
Unit not switched on
- Cable connections not made
- Fuse blown
- Check switch on Rotary Pump
- Check all cable connections
-
Replace fuse (F4) on back panel
2A 20mm Anti-surge. - 240V supply
or
3A 20mm Anti-surge. - 120V supply
-
5.2.1
4.6.2
Triangular patterns or holes
on Target
Target at end of life
-
Replace
Target
7.3
No Discharge Current
- Low or No Vacuum Pressure
- Fuse blown
- Leaks in System or Pipework
- Vent in Open
-
Replace fuse (F3) inside unit
630mA 20mm Anti-surge.
-
Replace fuse (F2) on back panel
2A 20mm Anti-surge. - 240V supply
or
3A 20mm Anti-surge. - 120V supply
6.3
4.6.1
7.4
4.6.2
Table 8.1 - Trouble Shooting
8.2
Fault Prevention
It is assumed that with a system in regular use and that the system was installed in a suitable
environment and in regular use, faults will be repaired as they occur.
To maintain the equipment to the best operating conditions a maintenance schedule is suggested
as part of a fault prevention programme, the following items are suggested to be included in such a
programme. The frequency of checking will depend on the usage of the equipment.
ITEM
REGULARLY
OCCASIONALLY
Inspect all connections (vacuum, gas and electric) for signs of wear and that
they are securely retained in position.
X
Check all control knobs are secure and operate correctly
X
Check that the lid interlock is operating correctly
X
Check all earthing cables and connections are secure
X
Cleaning
X
Table 8.2 - Fault Prevention