
OM-SC7610
Index
Issue 1
31
SC7610 Sputter Coater
10
Index
A
ccessories
13
Agents
30
C
hapter Contents
4
Cleaning
26
Coating Process
23
Coating Specimens
23
Conformity
7
Connections 20
Contamination
11
Contents
3
COSHH
7
D
escription
13
Disclaimer
8
E
quipment 13
F
ault Finding
29
Fault Prevention
29
G
ood Working Practices
11
H
azard Labels used on Equipment
8
Hazard Signal Words
8
Hazard Signals and Signs
8
Hazard to Operator
9
Hazardous Materials
10
Health and Safety
7
I
llustrations
6
Index
31
I
nterlocks
16
Introduction
12
Installation
19
Instrument Functionality Signs
9
M
aintenance - General
26
Maintenance
26
Manual Layout
3
N
o Discharge Current
28
O
peration
22
Operators and Service Engineers
8
Optional Items
13
Overview
14
P
ersonal Operational Risks
10
Physical Description
15
Preparation 19
Pumping Requirements
16
R
efit New Target
27
Return of Goods
12
Returns Procedure
12
Risk Analysis
10
S
afety Policy
7
SC7610 Front Panel Controls
17
SC7610 Installation
20
SC7610 Coater Specification
14
SC7610 Rear Panel Connections
18
SC7610 Specific Safety Hazards
11
Serious Damage to Instruments
9
Servicing
8
Spare Parts
28
Sputtering Rates
25
T
ables
6
Target Removal
27
Target Replacement
27
Technical Specification
14
Test Procedure
22
Trouble Shooting / Fault Finding
29
U
npacking Checklist
19
V
acuum Chamber Cleaning
26
W
arning Labels used in Manuals
9