Description
OM-SC7610
SC7610 Sputter Coater
18
Issue 1
4.6.2
SC7610 Rear Panel Connections
The connection points and other components mounted on the rear panel of the SC7610 Sputter
Coater are described below and identified in Figure 4.4 and described in Table 4.2.
Figure 4.4 – SC7610 Sputter Coater, Rear Panel Connections.
CONNECTION
DESCRIPTION
POWER ON/OFF
A vertically operated paddle switch acts as a mains isolator.
POWER IN
A flying lead provides the connection of power to the system.
F1
Main supply fuse, (240 Volt, 10 Amp, A/S), (110 Volt, 15 Amp, A/S).
F3 (internal)
The 630 mA A/S HT fuse which forms an integral part of the pressure
interlock switch.
Only accessible when the rear panel is removed.
HT
High voltage socket, connects a negative supply to the cathode mounted in
the top plate assembly.
F4
Pirani timer/ controller supply fuse, 2 Amp or 3 Amp.
ROTARY PUMP
A three way mains outlet socket provides power to the rotary pump.
GROUND
Earth connecting point, from the top plate assembly.
GAS IN
A 3 mm nipple provides the gas (argon) input connection point.
VACUUM
A 20 mm vacuum hose connection point, connects to the vacuum pump.
F2
Power supply PCB fuse, 2 Amp or 3 Amp.
WATER
Two 6mm nipples provide Inlet and outlet connections for cooling water
supplies. On systems not equipped with water cooling, panel cut-outs are
fitted with blind grommets.
Table 4.2 – SC7610 Rear Panel Components
