Orbotech SPTS Xactix e1 Series, Руководство пользователя

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Manual Version e1-4.3.0.ae-R3. Page
54
5.3.3 Performing an Etch
In order to perform an etch, the “perform etch” button in the main menu must be selected. The Xetch
will prompt you to enter the lot number of the sample being etched. Press done once number is
entered. The “perform etch” screen is shown below with lot number, “EXAMPLE” in this case; the
screen pictured is for the normal etch mode.
It is important to note that in the “perform etch” screen, some options may not be available to certain
users depending on the privileges which were given during the creation of their account.
The e1 Series software may be run in one of three operating modes that can be used during an etch.
Two operating modes (Normal and Normal with Delays) are included with the system. The others are
optional upgrades. The etch mode at the bottom middle of the “perform etch” screen can be used to
select the etch mode.
•
The normal mode, (included at delivery) utilizes a pulsed etch with a set xenon difluoride and
nitrogen (if desired) pressure and etch time.
•
Normal with delays mode, (included at delivery) utilizes a pulsed etch with a set xenon
difluoride and nitrogen (if desired) pressure and etch time but also allows for a chill time for the
sample to cool between each cycle.
•
An advanced normal etch mode (optional upgrade) allows for the user to set the expansion
chamber pump-out pressure between cycles.
•
High conductivity etch mode (optional upgrade) is like Normal with delays mode but also adds
in a flush of nitrogen between each cycle to quickly cool the sample and also remove effluents.
All modes offer unique advantages; therefore the user must determine which etch mode will be best
suited for his/her process. Each of these modes is described in detail in the following pages.