Orbotech SPTS Xactix e1 Series, Руководство пользователя

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Manual Version e1-4.3.0.ae-R3. Page
93
Removing Gas Bottle
To remove the XeF
2
bottle you have chosen, use a 3/4” standard wrench on the female or larger nut.
You will also use a 5/8” standard wrench on the male or smaller nut that is attached to the bottle. The
male nut is held firmly, while rotating the wrench on the female nut to loosen the female nut.
WARNING
THERE MAY STILL BE RESIDUAL XENON DIFLUORIDE IN
THE REMOVED BOTTLE SO BE CERTAIN THAT THE
BOTTLE VALVE REMAINS CLOSED.
Replacing Gas Bottle
Before reattaching the gas bottle after verifying the old gasket is removed, a nickel-plated Swagelok
gasket (NI-4-VCR-2-VS) must be inserted between the male and female nuts to insure a good seal (see
A. in Figure 40). A retainer gasket (NI-4-VCR-2-GR-VS) is also available and acceptable to use on the
Xetch, the retainer gasket makes completing the seal less complicated by attaching itself over the VCR
fitting gland. The un-retained gaskets require balancing the fittings until finger tight is established but
can certainly be used successfully. Use latex gloves when handling the gaskets to prevent dust or
grease degrading the seal’s performance. If the gasket falls on the floor or is suspected of having
scratches, THROW IT AWAY. If not, you could damage the VCR gland or face. Mate the male and
female nuts to finger tight by turning female nut clockwise (see B. in Figure 40). Mark the male and
female nuts position with a line across each to establish 1/8 turn (see C. in Figure 40). Then holding the
lower male nut firmly with the 5/8” wrench, turn the upper female nut with the 3/4” wrench clockwise 1/8
turn (see D. in Figure 40). Note that over tightening may damage the VCR gland and under tightening
may result in poor gasket seal.
CAUTION
The steps on the next page must be followed exactly to
ensure proper gasket installation.