Manual Version e1-4.3.0.ae-R3.
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53
5.3 Software operation details
5.3.1
Recipe Storage
To save a recipe, click on the save button located near the top of the “perform etch screen”. The save
new recipe screen is pictured below. By using the toggle switch in the middle of the screen users can
save the new recipe to their Personal Directory or the accessible to all users Global Recipes directory
(the ability to save recipes to the global directory may be turned off for some users as described below).
5.3.2
Recipe Manager
The recipe manager may be used to copy other users’ recipes, located in their personal directory to the
current user’s personal directory. This option is limited to users with configurable etch access. The
current user’s personal recipes are displayed in the left box (in this case admin). The personal directory
for other users is found in the right box. The pull down bar at the top right can be used to select from
the personal recipes of various users. To copy a recipe into the current user’s directory, select the
desired recipe and click on the left arrow icon between the two directory windows.
A recipe may also be copied from the user’s personal directory to the global directory (if the user has
global write access). This is done by highlighting a recipe in the user’s directory, selecting Global
Recipes in the right window and then using the right arrow to copy it to the Global Directory.
Содержание SPTS Xactix e1 Series
Страница 1: ...Manual Version e1 4 3 0 ae R3 2015 04 Xactix e1 Series System Manual ...
Страница 38: ...Manual Version e1 4 3 0 ae R3 Page 36 Figure 23 Shroud ventillation connection Shroud ventilation connection ...
Страница 40: ...Manual Version e1 4 3 0 ae R3 Page 38 Figure 26 Showerhead stop installed ...
Страница 48: ...Manual Version e1 4 3 0 ae R3 Page 46 Figure 29 Chamber ventilation shroud moved to back ...
Страница 49: ...Manual Version e1 4 3 0 ae R3 Page 47 Figure 30 Chamber ventilation shroud pulled forward ...
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Страница 86: ...Manual Version e1 4 3 0 ae R3 Page 84 ...
Страница 101: ...Manual Version e1 4 3 0 ae R3 Page 99 Figure 46 Gax box heater ...
Страница 103: ...Manual Version e1 4 3 0 ae R3 Page 101 Figure 48 Vacuum interlock switches Chamber vacuum switch Main vacuum switch ...
Страница 109: ...Manual Version e1 4 3 0 ae R3 Page 107 9 Set number of purge cycles to 0 and Hard Pump Time to 10 minutes ...