Manual Version e1-4.3.0.ae-R3.
Page
12
CAUTION
Chemical Hazard: Before undertaking air sampling checks,
full protective clothing must be worn including a respirator.
The immediate area must be well ventilated. All non-
essential personnel must be evacuated to a safe area and
air sampling warning notices must be displayed in the
immediate vicinity. When undertaking air sampling tests,
checks must be made to ascertain the concentration of
residual gases and hazardous by-product gases such as
XeF
2
and HF.
2.9 Hazardous Substances
2.9.1
Working with Hazardous Substances
All work with any hazardous substance must be in accordance with the manufacturer’s instructions,
Material Safety Data Sheet (MSDS) and local regulations concerning the control of substances
hazardous to health.
•
The substance’s MSDS must be consulted prior to the start of any work if the user is not
familiar with the hazardous material.
•
Special care must be exercised with substances provided by the customer.
•
It is the responsibility of the customer to ensure that any substance provided is suitable for its
intended purpose and is safe to use in that context.
•
MSDSs must always be consulted for health and safety information for any substance with
which the service engineer is not completely familiar.
2.9.2
Spillage of Hazardous Substances
If a spillage occurs:
1) The Manager of the area together with the Environmental & Safety Manager must be informed
immediately and the area cleared of personnel depending on the liquid released.
2) PPE may be required. Collect the spillage kit and immediately surround the spillage with the
absorbent cloths, pillows, etc., until the spillage has been contained.
3) Obtain the MSDS and read the section which relates to emergency release measures. The MSDS
will also give you the relevant information on the chemical make up of the liquid.
4) Clean up the spillage as quickly as possibly by following the instructions on the MSDS. Further
information can be obtained by speaking with the Environmental & Safety Manager.
5) The MSDS will also inform you of what disposal methods may be required. Some liquids do not mix
with water and by adding water to dilute the spillage the following may occur: fumes or an acidic
liquid. NEVER add water to a liquid spillage unless you have consulted the MSDS first.
6) Using the correct PPE (as stated on the MSDS), clean up the contaminated absorbent and place
into the empty spillage kit.
7) Label the spillage kit stating that the kit has been used for a liquid spillage. Together with this place
a copy of the MSDS onto the outside of the container.
8) Inform site services as soon as the clean up procedure has been completed so they can arrange
for collection of the spillage kit into the designated holding area. Remember to inform site services
of the location of this used spillage kit.
9) Inform the Environmental & Safety Manager when the spillage has been dealt with so a report can
be created.
10) When it is safe to re-enter the area inform this fact to the Manager of the area.
Содержание SPTS Xactix e1 Series
Страница 1: ...Manual Version e1 4 3 0 ae R3 2015 04 Xactix e1 Series System Manual ...
Страница 38: ...Manual Version e1 4 3 0 ae R3 Page 36 Figure 23 Shroud ventillation connection Shroud ventilation connection ...
Страница 40: ...Manual Version e1 4 3 0 ae R3 Page 38 Figure 26 Showerhead stop installed ...
Страница 48: ...Manual Version e1 4 3 0 ae R3 Page 46 Figure 29 Chamber ventilation shroud moved to back ...
Страница 49: ...Manual Version e1 4 3 0 ae R3 Page 47 Figure 30 Chamber ventilation shroud pulled forward ...
Страница 83: ...Manual Version e1 4 3 0 ae R3 Page 81 ...
Страница 86: ...Manual Version e1 4 3 0 ae R3 Page 84 ...
Страница 101: ...Manual Version e1 4 3 0 ae R3 Page 99 Figure 46 Gax box heater ...
Страница 103: ...Manual Version e1 4 3 0 ae R3 Page 101 Figure 48 Vacuum interlock switches Chamber vacuum switch Main vacuum switch ...
Страница 109: ...Manual Version e1 4 3 0 ae R3 Page 107 9 Set number of purge cycles to 0 and Hard Pump Time to 10 minutes ...