Orbotech SPTS Xactix e1 Series, Руководство пользователя

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Manual Version e1-4.3.0.ae-R3. Page
80
XeF2 Pressure Estimation # Bins
The pressure overshoot is also recorded separately for different fill targets. This parameter allows the
user to set the number of “bins” that the pressure range between 0T and 8T is divided into. For
example, 4 bins would mean that the 4 bins would be from 0 to 1.999T, 2T to 3.999T, 4T to 5.999T, and
6T to 8T. During a process, say the fill target is 2.5T, the overshoot for 2.5T would be learned and
stored for all processes that fall into the 2
nd
bin from 2T to 3.999T. Therefore, a subsequent process
that would have a 3.5T setpoint would start with the use of the overshoot information learned from the
2.5T run. This feature only applies to Pressure Estimation Pre-Cycles.
N2 Pressure Estimation # Bins
Allows the user to set the number of pressure overshoot bins for N2 pressure between 0T and 30T.
This feature only applies to Pressure Estimation Pre-Cycles.
Max Pressure Estimation Age
Allows the user to predetermine the longest amount of time, between 0 and 120 hours, that Pressure
Estimation Pre-Cycles information expires. This feature only applies to Pressure Estimation Pre-
Cycles.
Pressure Estimation Pre-Cycles
Allows the user to set the number, between 0 and 10, of pre-cycle pressure purging cycles and only
applies if Wait for pre-etch stability is not selected. This is the number of pre-cycles (cycles that only fill
and empty the expansion chamber without exposing the wafer to etch gases) that will be run before
starting the etch (please note that the XeF2 Pressure Estimation # Bins, N2 Pressure Estimation # Bins,
and Pressure Estimation Pre-Cycles are related to this feature). If a process was not run within a time
less than the Max. Pressure Estimation Age that had an XeF
2
and N
2
sepoint within the same XeF
2
and
N2 bins, these pre-cycles would be run to determine the overshoot parameters to accurately run the
process.
N2 fill pressure delta
This setting relates to the pressure that the nitrogen inlet valve, V11 closes in advance of reaching the
expansion chamber nitrogen fill pressure setpoint to minimize the pressure jump during expansion
chamber evacuation. This pressure jump is due to the nitrogen pressure that is trapped between V3
and V11 that is released when V3 opens during the expansion chamber evacuation. By closing V11 in
advance of closing V3 during the expansion chamber fill, some of this excess nitrogen pressure is bled
out of the line which minimizes the evacuation pressure jump.