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Guildline 6530 Series, Руководство оператора

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Section 4 

OM6530-C1-00 
19 November, 2019   

4-23 

4.6.1.

 

Surface Resistivity Configure 

 

 

 

 

 

The  effective  perimeter  and  distance  are  fixed  parameters  for  the  Model  8009 
Resistivity Test Fixture. For a detailed description of these parameters consult the 
Keithley Model 8009 manual. This is only used for custom fixtures and is not part 
of the menu selection when the fixture is standard. (see configure). 

 

4.7.

 

Volume Resistivity 

Select 

<Measure>

 function key in the 

Main Menu 

Select 

<Volume>

 function key in the 

  

Measure Option Menu 

 

 

 

 

 

 

 

 

 

<Continue>

 will set the system in Volume Resistivity mode and start the Ohms 

Menu (4.4) 

 

Содержание 6530 Series

Страница 1: ...etary to Guildline Instruments Limited They are to be used only as a guide to the operation and maintenance of the equipment with which this manual was issued and may not be duplicated or transmitted...

Страница 2: ......

Страница 3: ...4 2 4 2 DISPLAY 2 4 2 4 3 CONNECTORS 2 4 2 4 3 1 SOURCE CONNECTOR 2 5 2 4 3 2 INPUT CONNECTOR 2 5 2 4 4 REAR PANEL CONTROLS 2 6 2 4 4 1 IEEE 488 INTERFACE 2 6 2 4 4 2 RS232 INTERFACE 2 6 2 4 4 3 Groun...

Страница 4: ...1 Summary 4 16 4 4 8 2 Detail Graph 4 17 4 4 8 3 Detail 4 18 4 4 8 4 Window 4 18 4 5 Current MEASURING PICOAMPERES 4 19 4 5 1 AUTORANGING Current 4 20 4 5 2 MANUAL RANGING Current 4 20 4 6 Surface Re...

Страница 5: ...5 5 5 3 RS 232C INTERFACE 5 5 5 3 1 RS 232C RESPONSES 5 6 5 4 COMMAND LANGUAGE 5 6 5 4 1 GENERAL SYNTAX FOR COMMANDS 5 6 5 4 2 GENERAL SYNTAX FOR NUMBERS 5 7 5 4 3 REMOTE AND LOCAL OPERATION 5 7 5 4 4...

Страница 6: ...SYSTEM TIME 5 24 5 6 35 SYSTem VERSion DISPLAY SYSTEM VERSION 5 24 5 6 36 SYSTem VERBose SET SYSTEM TO VERBOSE 5 24 5 6 37 CALibration CAPacitor UPDATE COEFFICIENT 5 24 5 6 38 CALibration CAPacitor D...

Страница 7: ...31 5 6 89 SENSe RESistivity THICkness 5 31 5 6 90 SENSe RESistivity THICkness 5 31 5 6 91 SENSe RESistivity AREA 5 31 5 6 92 SENSe RESistivity AREA 5 31 5 6 93 SENSe RESistivity PERimeter 5 32 5 6 94...

Страница 8: ...4 6 2 5 AUTO CALIBRATION 6 5 6 2 6 CAPACITOR CALIBRATION 6 6 6 2 7 THRESHOLD CALIBRATION 6 7 6 2 8 ZERO COEFFICIENT CALIBRATION 6 9 6 3 CALIBRATION REPORT 6 10 6 4 CALIBRATION THEORY 6 12 6 4 1 Rprot...

Страница 9: ...ification 8 12 8 9 1 3 Precision Centigrade Temperature Sensor 8 13 8 9 1 4 Pressure Sensor 8 13 8 9 1 5 Integrated Pressure Sensor Specifications 8 13 8 9 2 Surface Volume Resistivity Test Fixture Mo...

Страница 10: ...RE 2 5 TYPICAL EXTERNAL TRIGGER CIRCUITS 2 8 FIGURE 2 6 TYPICAL INTERLOCK CIRCUIT CONFIGURATION 2 8 FIGURE 3 1 2 TERMINAL RESISTANCE MEASUREMENT SCHEMATIC 3 2 FIGURE 3 2 3 TERMINAL RESISTANCE MEASUREM...

Страница 11: ...TABLE 5 6 STATUS BYTE REGISTER 5 20 TABLE 6 1 RECOMMENDED VERIFICATION TEST EQUIPMENT 6 1 TABLE 6 2 RECOMMENDED CALIBRATION TEST EQUIPMENT 6 4 TABLE 6 3 SAMPLE CALIBRATION REPORT FORMAT 6 11 TABLE 8 1...

Страница 12: ...OM6530 C1 00 19 November 2019 x...

Страница 13: ...r very small DC currents It combines the proven technology of previous Guildline Teraohmmeters i e Models 9520 6500 and 6520 with the latest in measurement circuitry and microprocessor technology In b...

Страница 14: ...dards and to protect the measurement circuitry from EMI All indicators and frequently used controls are located on the front panel together with two connectors for connection of the unknown resistor o...

Страница 15: ...t threshold voltage points Knowing the test voltage and magnitude of the current the microprocessor can determine the value of the unknown resistor The test voltage is selectable from 7 standard value...

Страница 16: ...two communication control buses The calculated value of the unknown resistor is displayed on the front panel and is made available to instruments attached to either control bus The Model 6530 provides...

Страница 17: ...ut over time delta t When current is being measured Vin can be replaced by iR which simplifies 1 to the form C x delta Vout i ________________ delta t 3 In the Model 6530 Vin is the test voltage for r...

Страница 18: ...Section 1 OM6530 C1 00 19 November 2019 1 6 Figure 1 4 6530 Operational Integrator...

Страница 19: ...ger screws supplied The instrument has to be supported in the rack cabinet with adjustable support angles or a support bar In case of interference with other equipment mounted directly below the instr...

Страница 20: ...OWER Figure 2 1 Opening the Power Receptacle Check to see that the fuses inserted in the receptacle correspond to the correct type specified in Table 2 1 Table 2 1 POWER FUSE SELECTION Only fuses of t...

Страница 21: ...ages are present at several points within the instrument and under some operating conditions at the source connector Therefore ONLY QUALIFIED PERSONNEL WHO ARE AWARE OF THE NECESSARY PRECAUTIONS SHOUL...

Страница 22: ...move between menu levels of the 6530 2 4 1 4 Front Panel Programmable Function Keys This series of four momentary action keys allow for the selection of any one of 4 software controlled actions The ac...

Страница 23: ...considerably greater currents for short periods of time The SOURCE cable provided with the 6530 is HV BNC at the instrument end and Type N at the U U T end to provide direct connection with Guildline...

Страница 24: ...les can be obtained through Guildline Instruments Limited See Section 8 9 9 to determine which one is right for you 2 4 4 2 RS232 INTERFACE The RS232 interface consists of the standard RS232 DB9 inter...

Страница 25: ...240 V operation The voltage selector and fuse are set for the 240V operation at the factory see Section 2 2 2 4 4 7 EXTERNAL TRIGGER CONNECTOR This rear panel connector shown in Figure 2 4 works when...

Страница 26: ...TERNAL TRIGGER CONNECTOR EXTERNAL TRIGGER CONNECTOR PUSHBUTTON Figure 2 5 Typical External Trigger Circuits TEST ENCLOSURE INTERLOCK SWITCH RESISTVITY FIXTURE SURFACE VOLUME SWITCH PIN 1 PIN 4 PIN 5 I...

Страница 27: ...plied voltage with respect to the outer shield chassis ground Note Lethal voltages of up to 1000 volts may be present at this output and appropriate precautionary measures are necessary The Output cur...

Страница 28: ...typical 2 terminal resistance device connected to the 6530 Note that the known voltage is dropped on the U U T resistor element and the resultant current is returned to the electrometer to be measured...

Страница 29: ...stance device connected to the 6530 Note that the known voltage is dropped on the U U T resistor elements and the resultant current is ratio divided and partially returned to the electrometer to be me...

Страница 30: ...the operator must not take too long a measurement too many samples as this will allow more time for the meter and resistance standards to drift A good practice is to take 300 samples using the last 1...

Страница 31: ...ance standard typically k 2 URsm Measurement uncertainty of the measured resistance value of the resistance standard by the high resistance meter 2 times the standard deviation Umeter Uncertainty of t...

Страница 32: ...tainties of the reference resistor the 6530 bridge specification Using the following equations 1 and 2 defined earlier in terms of our 100 M to 1 G example we will use the following results Rxm Measur...

Страница 33: ...ures 3 3 Many current sources also use the chassis ground as their current output reference which can be fine to short to measurement ground using the standard cable set supplied with your 6530 Howeve...

Страница 34: ...urrent is actively driven from the unknown current source to the electrometer to be measured While many current sources are referenced to chassis ground some may not be Use caution and refer to your c...

Страница 35: ...System The basic screen structure of the 6530 has allocated the last two 2 lines of the screen to four 4 function keys The last line contains 10 character descriptions of the function to be performed...

Страница 36: ...location in an edit field The right arrow is used to move right to a desired location in an edit field The up arrow is used to enter the existing field and to select the previous field The down arrow...

Страница 37: ...ition the graph at the end of the buffer and activate automatic refresh as more data becomes available The up arrow causes the graph to scroll the graph right by the number of entries specified in the...

Страница 38: ...ill start its internal power on self test programming and display its opening banner When the instrument is turned on it performs a series of internal diagnostic checks The internal diagnostics check...

Страница 39: ...under password control Pressing any key will remove the opening banner routines The REMOTE DISPLAY screen will appear only when the model 6530 has been addressed by a remote communication device on th...

Страница 40: ...sured Selection of the Manual command function key puts the system in manual mode It should be noted at this point that the 6530 will now use the current state of the parameter settings NOTE that POTE...

Страница 41: ...imate setting that it is trying to use as it locates the best settings The 6530 will display the measurement values as they become available It will also display the voltage that is being supplied to...

Страница 42: ...l drastically affect the accuracy of the measurement Voltage reversals for measurements greater than 10 G require longer settling time If the system is configured in 6530 mode and autoranging is used...

Страница 43: ...ts command selects the voltage to be used during the measurement The valid ranges are the same as Max Volts however it will not allow the selection to exceed Max Volts The Max Volts will have to be in...

Страница 44: ...232C remote communication link The instrument then measures the integration time and calculates the value of the unknown resistance If the operator selects inappropriate measurement constants the full...

Страница 45: ...line on the test voltage graph top of the page The intersection of the 100 M line with the horizontal 10 V test voltage line gives an input current of 100 nA vertical line Following the 100 nA line to...

Страница 46: ...igger from Trigger function key to start a measurement Trigger is also available on the Ohms Measurement Menu if this mode is selected External external trigger contact closure required on external tr...

Страница 47: ...hine State None clears all trace elements Time Mode toggles between Relative Time and the Real Time Clock This is only traced if Timestamp is selected Time Stamp selects and removes the Time Stamp in...

Страница 48: ...the initial settling wait time after a change in voltage or polarity Sensor Time is the wait time between sensor measurements 4 4 7 Profiles Profiles allow the user to select standard default setups...

Страница 49: ...lay Time Soak Time Sensor Time Trigger Source Display Resolution Display Brightness Auto Reverse Mode Manual Mode GPIB status RS232 status Capacitor Threshold Polarity Max Voltage Output Test Voltage...

Страница 50: ...is kept from the last Clear Sum point A graphical summary is also maintained by averaging all samples within a 180 point array 4 4 8 1 Summary The Count entry indicates how many actual values have bee...

Страница 51: ...t Summary switches to the summary display The Up arrow scrolls the trace buffer left by Up Down Arrow Scroll Size The Down arrow scrolls the trace buffer right by Up Down Arrow Scroll Size The Left Ar...

Страница 52: ...fer up by one 1 entry The Down arrow scrolls the trace buffer down by one 1 entry The Left Arrow scrolls to the beginning of the trace buffer The Right Arrow scrolls the end of the buffer and sets the...

Страница 53: ...to approximately 100 by enabling the internal current shunt for currents to 10 mA and will reduce the expected current flow if the voltage compliance of the current source is not high enough To connec...

Страница 54: ...easurement process by selecting the appropriate polarity from the available options Polarity Polarity 9 Press the front panel menu control key PREVIOUS to return menu control to the Measure Option Men...

Страница 55: ...ain Menu 3 Select the Current function key in the Measure Option Menu 4 Select the Set Up function key in the Measure Option Menu to proceed to the Set Up Menu 5 Select Parameters in the Set Up Menu t...

Страница 56: ...0 pF 2700 pF Threshold 0 1 V 1 0 V 10 0 V Shunt On Off 4 6 Surface Resistivity Select Measure function key in the Main Menu Select Surface function key in the Measure Option Menu Continue will set the...

Страница 57: ...description of these parameters consult the Keithley Model 8009 manual This is only used for custom fixtures and is not part of the menu selection when the fixture is standard see configure 4 7 Volum...

Страница 58: ...Model 8009 manual Units allows the selection of inches or centimeters The configuration values are automatically converted 4 7 2 Volume Resistivity Configure The effective diameter and distance are f...

Страница 59: ...4 5 6 7 8 Auto Res Ramp The Ramp is the voltage output level of the integrating circuit of the electrometer It is a good status indicator to show the circuit operation Setting the Ramp to Digital dis...

Страница 60: ...ion Prompt selects the buffer clear mode The Prompt selection will prompt you before each new measurement to either clear or keep the last measurement in the buffer The Keep Data and Clear Data option...

Страница 61: ...Baud is the RS232 Baud Rate 1200 4800 9600 19200 38400 115200 Parity NONE EVEN ODD Stop Bits 1 2 Data Bits 7 8 Echo ON OFF Flow Control XON XOFF RTS CTS NONE Mode Talk Only Talk Listen Disable Ok is n...

Страница 62: ...the three 3 sensors The off state will stop all monitoring of the selected sensor 4 8 4 Sys Time This allows the updating of the system date and time The time is entered in 24 hour format 4 9 Sofcal...

Страница 63: ...ration Coefficients This menu displays the Calibration coefficients It can be updated to re enter the coefficients from the report given with you 6530 in the event of a non volatile memory failure The...

Страница 64: ...atus Bit 0 Non Volatile checksum failure Bit 1 Rom checksum failure Could be ROM Aux ROM Bit 2 Analog failure Bit 3 5 volts Bit 4 5 volts Bit 5 15 volts Bit 6 15 volts Bit 7 Precharge Bit 8 High volta...

Страница 65: ...ero parameters and shunt parameters 4 9 2 1 Utilities It should be noted that the instrument may not reach a stable state if it is running in a environment which has climate fluctuations or high level...

Страница 66: ...heir original state 4 9 2 1 2 Cap Calibration The calibration coefficient is the difference in parts per million ppm between the measured value and the current value of the three integrating capacitor...

Страница 67: ...viation ppm is displayed If for some reason the routine continues until the maximum retries has been reached then the last window of samples is used to generate the actual variance ppm and standard de...

Страница 68: ...t When the number of samples specified has been measured and have not exceeded the specification then the calibration routine has successfully completed and the actual variance ppm and standard deviat...

Страница 69: ...corrupted in the memory the 6530 is capable of re measuring the true value and entering the true value into memory Calc starts the calibration procedure If the specified variance or standard deviation...

Страница 70: ...calibration is complete it will allow the user to save the values or to select another capacitor and Calc the calibration coefficient 4 9 2 2 Calibration Coefficient Values This section allows the edi...

Страница 71: ...ach step A new value may be entered for each test voltage by pressing the Edit key and the numeric keys for the new value followed by the Ok key Press the UP or DN key to select the next test voltage...

Страница 72: ...ize 4 9 2 2 5 System Parameters Pressing the Sys Params key will display the system parameters stored for the 6530 Function key 3 selects the resistance range Function key 4 selects the available volt...

Страница 73: ...ection key will display the error stored for the internal series protection resistor By pressing the Edit key the number may be altered by pressing a new sequence of numbers followed by pressing the O...

Страница 74: ...of last calibration If a new calibration date is to be entered press the Edit key A new date may be keyed in with the numeric keys of the keypad The calibration date is saved when the Ok key is press...

Страница 75: ...itical that it be entered prior to calibration of the 6530 A separate value for variance standard deviation and sample size is used for 2700 pF 270 pF 27 pF 1 0 V threshold and 0 1 V threshold Varianc...

Страница 76: ...ectrical or other types of interference This will result in the 6530 running until the Maximum Sample Count is reached for each test that cannot satisfy the criteria set in Standard Deviation and Vari...

Страница 77: ...or high levels of electrical or other types of interference This will result in the 6530 running until the Maximum Sample Count is reached for each test that cannot satisfy the criteria set in Standar...

Страница 78: ...V at 0 C and has a sensitivity of 83 333 mV C 4 9 2 4 2 Humidity This example supports a sensor that generates 0 V at 0 rH and has a sensitivity of 50 mV rH 4 9 2 4 3 Pressure This example supports a...

Страница 79: ...ables Enables on screen error messages The diagnostics section is used by the service technician to monitor voltage and to allow the testing of some of the input and outputs of the system 4 9 3 1 Digi...

Страница 80: ...uildline test jig and is only used by a qualified Guildline technician It allows the monitoring of the digital outputs of the CPU board through the LED indicators on the test jig An example of this is...

Страница 81: ...external inputs It can also be used to test the inputs Interlock can be disabled from the Configure Menu 4 9 3 6 DAC7548 Calibrate This is a factory calibration procedure for aligning the DAC7548 and...

Страница 82: ...then the system will prompt for the new password Enter the new password then press Ok PREVIOUS will return to the Sofcal Menu 4 10 Menu System Hierarchy Diagrams The menu system hierarchy used by the...

Страница 83: ...Manual External BUS Continuous Trace Timers All None RT Clock Rel ative More 1 3 Trace Menu 1 Trace Menu 2 Time Stamp Temp Humidity More 2 3 Trace Menu 3 Delay Time Soak Time Sensor Timer Edit Ok Trig...

Страница 84: ...ore 1 3 Trace Menu 1 Trace Menu 2 Time Stamp Temp Humidity More 2 3 Trace Menu 3 Delay Time Soak Time Sensor Timer Edit Ok Trigger View Menu Summary Graph Detail Window Detail Graph Window Size Up Dow...

Страница 85: ...face Volume Surface Resistivity Menu Continue Configure Effective Perimeter Distance Edit Ok Main Menu Measure Configure Sofcal Volume Resistivity Menu Continue Thickness Configure Thickness Edit Ok D...

Страница 86: ...p Humidity Pressure On Off On Off On Off Address Mode Address Mode Ok 0 31 Talk Only Talk Listen Disable Baud Flow Control Parity Mode Stop Bits Data Bits Echo Baud 1200 2400 4800 9600 19200 38400 115...

Страница 87: ...Utilities Menu 1 Auto Cal Cap Cal Errors Calc Save Abort Ref Vals Menu 1 Serial Num Cal Date Ref Res Serial Number Edit Ok Date Time Edit Ok Reference Resistor Serial Number Edit Ok Sensors Adjust Men...

Страница 88: ...2700 pf 2700 pF Edit Ok Sys Params Cal Spec Thresholds 1 0 V 0 1 V Edit Ok Protection Count 27 pF 270 pF 2700 pF 0 1 V 1 0 V Press any key Edit Ok Protection Res System Parameters Sample Count 90 Samp...

Страница 89: ...iagnostic Menu 1 Digital PS Analog PS Relay Test More 1 3 Diagnostic Menu 2 Volt Test Ext Input DAC7548 More 2 3 Digital Supply Analog Supply Relay Test U704 J700 U800 J801 250 ms 500 ms 1 Second 2 Se...

Страница 90: ...r panel The IEEE 488 address defaults to a factory setting of 04 This setting can be viewed and set to a valid address using the front panel controls The RS 232C connector is mounted on the rear panel...

Страница 91: ...d character 0x0A and or optionally the controller should assert the EOI data byte control signal 5 2 2 IEEE 488 RESPONSES The reply to any IEEE 488 query command will be a sequence of ASCII characters...

Страница 92: ...y mode should be selected as the preferred mode of operation 5 2 6 IEEE 488 ELECTRICAL INTERFACE The 6530 meets the subsets of the IEEE 488 interface specification IEEE 488 1 shown in Table 5 1 The pi...

Страница 93: ...data from the 6530 the responses will come from the output buffer in first in first out order If for some reason the controller does not read the responses from its query commands the output buffer wi...

Страница 94: ...o remotely control the 6530 either interactively with a terminal or under computer control operation is the same as using an IEEE 488 controller connected to the IEEE 488 port for control with the fol...

Страница 95: ...ions 5 2 2 and 5 3 1 5 4 1 GENERAL SYNTAX FOR COMMANDS The 6530 uses a sophisticated command parser which can usually determine which command was desired even if the command is entered incorrectly Som...

Страница 96: ...mitted on commands all numbers must be entered in the base units for example 100 mV can be expressed as 100e 3 or 0 100 Expressions for example 7 20 X 3 are not allowed as parameters 5 4 3 REMOTE AND...

Страница 97: ...h lockout is similar to the remote state but restricted the remote key will not return to the local state To return the 6530 to the local state the controller must send a GTL interface command To retu...

Страница 98: ...efined items means is defined to be means or words inside square brackets i e means optional Required letters are shown in upper case but may be upper or lower case d 0 1 2 3 4 5 6 7 8 9 l A B C Z a b...

Страница 99: ...report event status register IDN report identity of unit OPC set operation complete bit in event status register OPC report operation complete OPT report any reportable options RST reset the instrume...

Страница 100: ...B SYSTem COMMunications SERial baud data stop parity echo flow control mode baud 1200 2400 4800 9600 19200 38400 databits 7 8 stop 1 2 parity NONE ODD EVEN echo ON OFF flowcontrol NONE XON RTS mode TA...

Страница 101: ...5 10 20 50 100 200 500 1000 calibration coefficient ppm OUTPut VOLTage CALibration PARameters PROTection variance ppm standard deviation ppm sample size maximum sample count PARameters PROTection CAL...

Страница 102: ...oefficient SYSTem COEFficient nominal value volts CALibrate SYSTem PARameters nominal value volts sample count sample size sample window SYSTem PARameters nominal value volts 5 5 3 Configuration Comma...

Страница 103: ...ty SENSe ATMospheric PRESsure SENSe CAPacitor 27 270 2700 CAPacitor SENSe HUMidity SENSe INTegration TIME SENSe INTegrator THReshold 0 1 1 0 10 0 THReshold SENSe MAXimum VOLTage 1 3 10 30 100 300 1000...

Страница 104: ...ommands TRACe CLEar TRACe DATA dump buffer TRACe DIAGnostics ON OFF SENSORS DIAGnostics TRACe ELEMents TIMEstamp HUMidity TEMPerature ATMOSpheric Pressure NONE ALL RELative Time RTClock ELEMents TRACe...

Страница 105: ...rigger Commands TRIGger SOURce MANual BUS EXTernal CONTinuous SOURce TRIGger DELay value 0 999999 999 seconds DELay TRIGger SOAK value 0 999999 999 seconds SOAK TRIGger SENSor TIMer value 0 999 second...

Страница 106: ...atus Registers summarized in the status byte register All queues except the Output Queue that are summarized in the status byte register are emptied The 6530 is forced into the Operation Complete Idle...

Страница 107: ...esponse to the OPC or OPC command It indicates that the 6530 has completed any pending operations and that the parser is ready to accept more program messages 1 RQC ReQuest Control This event bit indi...

Страница 108: ...RST is a MANDATORY IEEE 488 2 command 5 6 10 SRE u SERVICE REQUEST ENABLE COMMAND The service request enable command allows the 6530 to generate a service request on the IEEE 488 interface under a li...

Страница 109: ...failure Bit 1 Rom checksum failure Could be ROM Aux ROM Bit 2 Analog failure Bit 3 5 volts Bit 4 5 volts Bit 5 15 volts Bit 6 15 volts Bit 7 Precharge Bit 8 High voltage monitor Bit 9 10 volt referen...

Страница 110: ...the ROM checksum the AUX ROM checksum and the Non Volatile SRAM checksum Typical response 17574 12954 1065 5 6 17 SYSTem COMMunications GPIB UPDATE GPIB CONFIG address mode address0 31 mode TALK Only...

Страница 111: ...COMMunications SERial Typical response 9600 8 1 None On None Talk Only 5 6 21 SYSTem DATE UPDATE SYSTEM DATE YYYY MM DD YYYY limited to ranges 0 38 and 2000 2038 MM limit range to 1 12 DD limit range...

Страница 112: ...SERial NUMBer DISPLAY SYSTEM SERIAL NUMBER Typical response 67630 5 6 29 SYSTem STATe UPDATE SYSTEM STATE LOCAL REMote LOCKout 5 6 30 SYSTem STATe DISPLAY SYSTEM STATE Typical response LOCAL 5 6 31 S...

Страница 113: ...onse 2 5 6 36 SYSTem VERBose SET SYSTEM TO VERBOSE Set the system to display a text description of displayed responses 5 6 37 CALibration CAPacitor UPDATE COEFFICIENT 27 270 2700 error coefficient ppm...

Страница 114: ...t exceed 100 000 5 6 42 CALibration OUTPut VOLTage DISPLAY COEFFICIENTS Typical response 1 V 1 000189 3 V 3 000033 10 V 9 999963 30 V 29 99993 100 V 100 0014 300 V 299 9957 1000 V 999 916 1 V 999921 3...

Страница 115: ...Capacitor variance ppm 1 0 1000 0 standard deviation ppm 0 01 250 0 sample size 25 500 0 1 V Threshold variance ppm 1 0 1000 0 standard deviation ppm 0 01 250 0 sample size 25 500 1 0 V Threshold vari...

Страница 116: ...005 03 31 05 03 12 27pF 22926 97 30 26 389 7 951 0 0 0 0 0 0 2005 03 30 22 41 39 27pF 22908 111 30 21 759 6 067 0 0 0 0 0 0 2005 03 31 04 36 20 270pF 6298 88 30 21 991 5 333 0 0 0 0 0 0 2005 03 30 22...

Страница 117: ...ibration SYSTem REV Typical response user rev system rev 5 6 61 CALibration THReshold VOLTage 0 1 1 0 calibration coefficient ppm 5 6 62 CALibration THReshold VOLTage Typical response 0 1V 37 1 0V 160...

Страница 118: ...AMPS SURFACE resistivity VOLume Resistivity 5 6 67 MEASure UNITS DISPLAY MEASUREMENT MODE Typical response Ohms 5 6 68 READ RESistance Typical response 1 13499232e 16 5 6 69 READ CURRent Typical respo...

Страница 119: ...s is the time in seconds that it took to take the last measurement 5 6 77 SENSe INTEGrator THREShold 0 1 1 0 10 0 5 6 78 SENSe INTegrator THREShold Typical response 10 0V 5 6 79 SENSe MAXimum VOLTage...

Страница 120: ...INTerlock Typical response ON 5 6 89 SENSe RESistivity THICkness value This is the thickness of the material being measured It should be entered in either inches or centimetres depending on the curren...

Страница 121: ...It is normally set to 0 125 if unit is inches but can be set to another value if you are using the custom mode of measuring resistivity 5 6 96 SENSe RESistivity DISTance Typical response 0 125 5 6 97...

Страница 122: ...will retain the data stored in the trace buffer upon the start of a new measurement CLEAR provides a means to automatically clear the trace buffer upon the start of a new measurementt PROMPT will pro...

Страница 123: ...uous BUS is used if individual measurements wish to be controlled with the TRG remote command 5 6 112 TRIGger SOURce Typical response Continuous 5 6 113 TRIGger DELay value 0 999999 999 seconds This a...

Страница 124: ...cal response 0 0 5 6 117 TRIGger SENSor TIMer value 0 999 seconds This sets the rate for the instrument to take automatic readings of the Temperature Humidity and Atmospheric Pressure It is normally s...

Страница 125: ...ically it takes one additional hour to stabilize a unit that has been exposed to a temperature 10 C outside the specified temperature range 6 1 3 RECOMMENDED TEST EQUIPMENT Table 6 1 lists all test eq...

Страница 126: ...tion report Verify the error displayed for the CAPACITOR COEFFICIENTS matches the values listed in the calibration report Verify the error displayed for the THRESHOLD COEFFICIENTS matches the values l...

Страница 127: ...rated 12 month accuracy when the 6530 is used for current measurements A full resistance confirmation of the 6530 should be performed after the artifact calibration as this DOES AFFECT THE RESISTANCE...

Страница 128: ...ohm link Guildline 65224 Input Current optional Range 10m to 10 DC A 200 ppm Fluke 5700A or equivalent Table 6 2 Recommended Calibration Test Equipment 6 2 4 OUTPUT VOLTAGE CALIBRATION Connect the Di...

Страница 129: ...re the new coefficients Press the PREVIOUS key to exit back to the Sofcal Calibrate Menu 6 2 5 AUTO CALIBRATION The Auto Calibration routine is a built in process in the 6530 that will calibrate all t...

Страница 130: ...new calibration coefficient in the display window The automated calibration sequence will run each measurement until it has satisfied variance and standard deviation requirements for the sample size o...

Страница 131: ...ion key Press the Cap Cal function key Note Ensure that the 100 M reference resistor is connected Press the Calc key to start the automatic capacitor calibration sequence Note When the calibration seq...

Страница 132: ...to accept the new calibration date Press the PREVIOUS key to exit back to the Sofcal Calibrate Menu Press the PREVIOUS key to exit back to the Sofcal Calibrate Menu top Press the Utilites function key...

Страница 133: ...the new calibration date Press the Ok key to accept the new calibration date Press the PREVIOUS key to exit back to the Sofcal Calibrate Menu Press the PREVIOUS key to exit back to the Sofcal Calibra...

Страница 134: ...530 C1 00 19 November 2019 6 10 6 3 CALIBRATION REPORT Prepare a tabulated results sheet similar to that shown in Table 6 3 using the data reported by the instrument during the calibration procedure o...

Страница 135: ...1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 Zero Coefficient ______________________ Ohms Limits 90 000 ohms to 11 000 ohms Dated ____________________ Calibrated by ________________________...

Страница 136: ...ties The 6530 system software calls up the nominal value of each component and corrects each by use of the respective calibration coefficient before computing the resistance value 6 4 1 Rprotection CO...

Страница 137: ...sistance value a number representing the variance of the capacitor from its nominal value is computed The capacitor coefficient is automatically stored into the instruments Non Volatile memory see Sec...

Страница 138: ...dress skins also provide protection against dust in the interior of the instrument Operation without these panels in place necessitates more frequent cleaning However it is recommended that you remove...

Страница 139: ...MEMORY FAILURE Press any key to continue The 6530 will restore factory set default values and will calculate a new checksum then reinitialize all non volatile memory 7 3 TROUBLESHOOTING Symptom Possib...

Страница 140: ...KHZ The ADC interrupt rate is out of range as either too slow or too fast The measured unacceptable rate is displayed as XXX KHZ 5 Volts X XX 5 V analogue power supply out of limits measured X XX V 5...

Страница 141: ...5 Volts X X 5 V digital power supply out of limits measured X X V 5 Volts X X 5 V digital power supply out of limits measured X X V 15 Volts X X 15 V digital power supply out of limits measured X X V...

Страница 142: ...0 to 60 C 4 to 140 F Operating Humidity non condensing 20 to 50 rH Storage Humidity non condensing 15 to 80 rH Power Requirements 120 VA Voltage Requirements 100 120 220 240 10 V AC Line Frequency 50...

Страница 143: ...3 C 5 C Range Range Volts Base XR XP XPR 90 k to 200 k 1 V NA 50 NA 40 200 k to 2 M 1 V NA 15 NA 8 2 M to 20 M 1 V 25 15 8 8 20 M to 200 M 1 V to 10 V 25 15 8 8 200 M to 2 G 1 V to 100 V 25 15 8 8 2 G...

Страница 144: ...SOLUTION When the Model 6530 is used with short integration time periods the measurement resolution is limited by the quantization error in the time measuring circuit plus or minus one clock period Wh...

Страница 145: ...l measure in Direct Measurement mode to full rated specifications These alternate settings provide a method for voltage coefficient testing Bridge Mode is also valid in these areas 3 The white areas i...

Страница 146: ...200T 100T 1000 2700 0 1 54 45 50 6530 XR and 6530 XPR Models Range Nominal Test V Cap Thesh Ramp Auto Count Size 90k to 200k 100k 1 2700 10 0 0054 90 100 200k to 2M 1M 1 2700 10 0 054 45 50 1M 3 2700...

Страница 147: ...0G 30 2700 0 1 1 8 28 36 100G 100 2700 1 5 4 12 20 100G 300 2700 1 1 8 12 20 100G 1000 2700 10 5 4 12 20 200G to 2T 1T 1 27 0 1 5 4 45 50 1T 3 27 0 1 1 8 12 20 1T 10 270 0 1 5 4 12 20 1T 30 270 0 1 1...

Страница 148: ...nds Serial poll timeout 3 seconds Terminate read on EOS YES Set EOI with EOS on write YES Type of compare on EOS 7 bit EOS byte 0A hex Send EOI at end of writes YES Enable repeat addressing YES Progra...

Страница 149: ...ow test the status byte STB 560 REM If STB has bit 2 set then the 6530 Teraohm Bridge Meter 570 REM has finished its reading otherwise 580 REM loop around 590 REM 600 WRT STB CALL IBWRT DEV WRT 610 IF...

Страница 150: ...3040 REM take action appropriate to the 3050 REM application For errors during data 3060 REM transfers IBCNT may be examined to 3070 REM determine the actual number of bytes 3080 REM transferred 3090...

Страница 151: ...forms a significant source of electrical leakage The surface must be dry and free of conductive salts or other deposits 8 7 4 TEST LEAD ROUTING Although it is good general practice to use shielded te...

Страница 152: ...RES Mounting Bench top with extra flanges provided separately for 19 inch rack mounting Input Connector Front panel with rear panel access optional on request Power Selection Switch On rear panel IEEE...

Страница 153: ...ct against dirt dust oils and other hazards RH Accuracy 2 RH 0 100 RH non condensing 25 C 5 VDC supply RH Interchangeability 5 RH 0 60 RH 8 90 RH Typical RH Linearity 0 5 RH Typical RH Hysteresis 1 2...

Страница 154: ...n 0 1 C in still air The sensor is rated to operate over a 55 C to 150 C temperature range 8 9 1 4 Pressure Sensor The piezoresistive transducer is a state of the art monolithic silicon pressure senso...

Страница 155: ...e 6530 front panel controls starts the measurement process Resistivity Fixture Device Data Operating Temperature 30 C to 85 C Operating Humidity 65 R H up to 35 C derate 3 R H C above 35 C Storage Tem...

Страница 156: ...tainty with a coverage factor of k 2 Note 3 Maximum Voltage Rating 1000 DC V Note 4 The 100 M resistor is strongly recommended to maintain a total uncertainty ratio of 4 1 for the 6530 Model Nominal R...

Страница 157: ...ng the 65222 cover The box of the enclosure should always be connected to the ground lug on the rear panel of the 6530 Inside dimensions 342 228 152 mm 13 5 9 0 6 0 ins 8 9 6 Lead Set Model 65225 The...

Страница 158: ...Win 7 USB IEEE 488 2 Interface for Laptop PC Recommended IEEE PCMCIA Win 95 to Win XP PCMCIA IEEE 488 2 Interface Card for Laptop only IEEE Cable 1M N A 1 Meter Double Shielded IEEE 488 2 Interface C...

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