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Parameter
Units
iL70
iL600
Typical peak pumping speed
50 Hz m
3
h
-1
70
518
60 Hz m
3
h
-1
84
600
Utimate vacuum
50 Hz
mbar
< 5 x 10
-2
< 3 x 10
-3
Pa
< 5
< 3 x 10
-1
60 Hz
mbar
< 3 x 10
-2
< 2 x 10
-3
Pa
< 3
< 2 x 10
-1
Maximum pressure differential
across LCMB pump *
50 Hz
mbar
-
70
Pa
-
7 x 10
3
60 Hz
mbar
-
70
Pa
-
7 x 10
3
Maximum inlet pressure
50 Hz
mbar
-
See figure 2-6
Pa
-
See figure 2-6
60 Hz
mbar
-
See figure 2-6
Pa
-
See figure 2-6
Maximum operating time at
maximum inlet pressure *
50 Hz
hour
-
1
60 Hz
hour
-
1
Inlet connection
-
ISO63 bolted
ISO100 bolted
Outlet connection
-
NW40
NW40
* iL600 only
Table 2-1 - Technical data
2-2
iL Dry Pumping Systems
Содержание iL600
Страница 18: ...iL Dry Pumping Systems 1 9 Figure 1 3 Schematic diagram of the electrical system...
Страница 21: ...1 12 iL Dry Pumping Systems Figure 1 4 Services and electrical connections on the rear of the iL system...
Страница 23: ...1 14 iL Dry Pumping Systems Figure 1 5 Electrical components shown without enclosure for clarity...
Страница 71: ...3 28 iL Dry Pumping Systems...