manualshive.com logo in svg

BOC Edwards iL600, Инструкция по эксплуатации

Поделиться
Скачать
BOC Edwards iL600 Скачать руководство пользователя страница 146

BOC Edwards is a trading name used by affiliate
companies of The BOC Group plc. BOC Edwards and
the stripe symbol are trademarks of The BOC Group plc.

Addresses

EUROPE
HEADQUARTERS
BOC EDWARDS
Manor Royal
CRAWLEY
West Sussex RH10 2LW

UNITED KINGDOM
Tel: +(44) 1293 528844
Fax: +(44) 1293 533453
GUILDFORD, ENGLAND
Tel: +(44) 1483 579857
Fax: +(44) 1483 505211
CUMBERNAULD, SCOTLAND
Tel: +(44) 1236 730575

BELGIUM
BRUSSELS
Tel: +(32) 2 363 0030

FRANCE
PARIS
Tel: +(33) 1 47 98 24 01

GERMANY
MUNICH
Tel: +(49) 89 9919180
MARBURG
Tel: +(49) 6420 82 41 0

ITALY
MILAN
Tel: +(39) 2 48 4471

SWITZERLAND
OBERWIL-BASEL
Tel: +(41) 61 401 4344
Fax: +(41) 61 401 4352

ISRAEL
TEL AVIV
Tel: +(972) 3 649 1262
Fax: +(972) 3 6475112
JERUSALEM
Tel: +(972) 2 321122

ASIA
HEADQUARTERS
BOC EDWARDS (ASIA)
Suite 1308 Tower 2
World Trade Square
123 Hoi Bun Road
Kwun Tong, Kowloon

HONG KONG
Tel: +(852) 2 796 9111
Fax: +(852) 2 796 9095

CHINA
BOC GASES (SHANGHAI)
Tel: +(86) 21 5899 0272
TIANJIN BOC INDUSTRIAL
GASES
Tel: +(86) 22 2834 1981

TAIWAN, R.O.C.
HSIN CHU CITY
Tel: +(886) 35 280 354

SOUTH EAST ASIA
BOC EDWARDS
26 Changi South Street I
Changi South Industrial Estate
SINGAPORE 486773
Tel: +(65) 546 8408
Fax: +(65) 546 8407

KOREA
HEADQUARTERS
SONGWON EDWARDS LTD
625-7 Upsong-dong
CHUNAN CITY
Chungchong Nam-do

KOREA
Tel: +(82) (0) 417 554 7070
Fax: +(82) (0) 417 554 7300
SEOUL
Tel: +(82) (0) 2 501 7070

AMERICAS
HEADQUARTERS
BOC EDWARDS
301 Ballardvale Street
WILMINGTON, MA 01887

USA
Tel: +(1) 978 658 5410
Toll free (USA only): 800 848 9800
Fax: +(1) 978 658 7969
MILPITAS, CA
Tel: +(1) 408 428 1037
TEMPE, AZ
Tel: +(1) 602 777 7007
AUSTIN, TX
Tel: +(1) 512 491 6622

CANADA
MISSISSAUGA, ONTARIO
Tel: +(1) 905 336 9119
Toll free (Canada only): 800 387 4076
Fax: +(1) 905 845 4924

BRAZIL
SAO PAULO
Tel: +(55) 11 8580377
Fax: +(55) 11 2652766

JAPAN
HEADQUARTERS
Shuwa Shiba Park Building A-3F
2-4-1 Shibakoen, Minato-ku

TOKYO 105-0011
(Vacuum/Abatement)
NIPPON EDWARDS KK
Tel: +(81) 3 5470 6530
Fax: +(81) 3 5470 6521
(Electronic Gases)
OSAKA SANSO KOGYO KK
Tel: +(81) 3 3434 6789
Fax: +(81) 3 5472 8728
OSAKA
Tel: +(81) 6 384 7052
KYUSHU
Tel: +(81) 96 326 7300
SENDAI
Tel: +(81) 22 373 8525

CORPORATE HEADQUARTERS
BOC EDWARDS
Manor Royal
CRAWLEY
West Sussex, RH10 2LW
UNITED KINGDOM

Содержание iL600

Страница 1: ...A533 71 880 Issue A Manor Royal Crawley West Sussex RH10 2LW UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com iL Dry Pumping Systems Instruction Manual...

Страница 2: ...ates is in conformity with the following standard s or other normative document s EN50081 2 Electromagnetic Compatibility General Emission Standard Generic Standard Class Industrial Environment EN5008...

Страница 3: ...ms Setup Password The setup password for this equipment is preset as follows SETUP PASSWORD 202 You can remove this sheet from the instruction manual and retain it in a safe place to prevent unauthori...

Страница 4: ...as Module sensor configured iL systems only 1 15 1 9 Controls and indicators 1 15 1 10 Control functions 1 16 1 10 1 Priority of control 1 16 1 10 2 Setpoints warning and alarm conditions 1 17 1 10 3...

Страница 5: ...3 16 3 15 Connect to your emergency stop circuit optional 3 16 3 16 Electrical supply and RF earth ground connections 3 18 3 16 1 Reconfigure the iL system for your electrical supply if necessary 3 1...

Страница 6: ...connector 6 2 6 2 2 Reconnect Swagelok connector 6 4 6 3 Maintenance frequency 6 4 6 4 Inspect the connections pipelines cables and fittings 6 4 6 5 Inspect and clean the exhaust pipe and check valve...

Страница 7: ...nection Kit 8 4 RETURN OF BOC EDWARDS EQUIPMENT Tables Table Title Page 1 1 Safety sensors 1 18 2 1 Technical data 2 2 2 2 Full load current ratings 2 11 2 4 Sensor Monitoring Module default setpoints...

Страница 8: ...m the pallet 3 4 3 2 Lifting bolt positions 3 5 3 3 Remove refit the enclosure panels 3 7 3 4 Reconfigure the cooling water connections if required 3 9 3 5 Remove the vibration isolator transit bracke...

Страница 9: ...strations continued Figure Title Page 6 2 Retighten a Swagelok fitting 6 3 6 1 Fit a Swagelok fitting 6 3 6 3 Clean the exhaust check valve 6 7 6 4 Try to turn the LCDP pump 6 24 vi iL Dry Pumping Sys...

Страница 10: ...e to observe the instruction could result in damage to the equipment associated equipment or process Throughout this manual page figure and title numbers are in the form S N where S specifies the sect...

Страница 11: ...erent materials seeSection2 8 chosen toberesistant toattackbychemicalsusuallyfoundincleanapplications Pumping a chemical that will aggressively attack any of these barrier materials may over time resu...

Страница 12: ...B oil level sight glass 5 Gas Module 6 LCDP pump motor gearbox 7 LCDP oil filler plug 8 Levelling foot 9 Castor 10 LCDP oil level sight glass 11 LCDP pump 12 Nitrogen pressure regulator 13 Pump Displa...

Страница 13: ...ystem to pump dangerous gases you must take special precautions before you remove the oil filler plugs refer to Section 6 1 2 You must not use the iL system in an application where incompatible gases...

Страница 14: ...motor The LCMB operates at inlet pressures of 5 mbar 5 x 102 Pa and below and is backed by the LCDP pump When you start the LCDP pump the iL system delays the start of the LCMB pump for a preset time...

Страница 15: ...A motor protection thermistor is fitted to the pump motor This thermistor is a solid state device which has an electrical resistance of less than 750 at normal pump motor operational temperature When...

Страница 16: ...ectrics and Pump Control Module 1 a Sensor Monitoring Module 3 a Gas Module 2 an optional Pump Display Module 4 sensors and accessories see previous sections The standard iL system has an Electrics an...

Страница 17: ...nnector 21 Internal emergency stop loop 22 LCMB shut down thermal snap switch 23 LCDP shut down thermal snap switch 24 Not used 25 Emergency stop switch 26 Not used 27 Gas Module and Sensor Monitoring...

Страница 18: ...iL Dry Pumping Systems 1 9 Figure 1 3 Schematic diagram of the electrical system...

Страница 19: ...the electrical supply to the Electrics and Pump Control Module is on Tool Interface Module connector 8 Use this to connect an iL Tool Interface Module to the iL system LON Interface Connector 9 Use th...

Страница 20: ...ool Interface Module connector 9 LON interface connector 10 Electrical supply connector Sensor configured iL systems only iL600 only 11 Protective earth ground stud 12 GRC relay connector 13 d c elect...

Страница 21: ...1 12 iL Dry Pumping Systems Figure 1 4 Services and electrical connections on the rear of the iL system...

Страница 22: ...ctrics and Pump Control Module to the Sensor Monitoring Module LCMB thermistor cable 19 On an iL600 system this is used to connect the output of the thermistor in the LCMB pump to the Electrics and Pu...

Страница 23: ...1 14 iL Dry Pumping Systems Figure 1 5 Electrical components shown without enclosure for clarity...

Страница 24: ...icroprocessor see Section 1 10 3 1 8 4 Gas Module sensor configured iL systems only The Gas Module communicates with the Sensor Monitoring Module 1 9 Controls and indicators RefertoFigure1 6 Thecontro...

Страница 25: ...network or press the appropriate button to release control Any Module which requires control must then take control that is you must send the appropriate message to the iL system or press the appropri...

Страница 26: ...continue to operate the iL system if you have configured the iL system to run til crash see Section 5 9 If an alarm or warning condition exists an appropriate alarm or warning message is displayed on...

Страница 27: ...re 1 7 which shows the front panel of the Pump Display Module Use the On button 1 to switch on the iL system refer to Section 5 4 The On button has a green LED which is on when the iL system is on Use...

Страница 28: ...d select Run til Crash change other display parameters such as the pressure units used when pressures are displayed and the timeout time The Setup menu also allows you to select the Service menu in th...

Страница 29: ...cation Refer to Section 8 4 for descriptions of these accessories 1 20 iL Dry Pumping Systems Figure 1 7 Front panel of the Pump Display Module optional accessory 1 On button 2 Display 3 Down button 4...

Страница 30: ...o C Maximum ambient operating humidity 90 RH Maximum exhaust back pressure 3 p s i 0 207 bar 2 07 x 104 Pa Noise level measured at 1 m from the pump with enclosure panels fitted iL70 62 dB A iL600 62...

Страница 31: ...ssure differential across LCMB pump 50 Hz mbar 70 Pa 7 x 103 60 Hz mbar 70 Pa 7 x 103 Maximum inlet pressure 50 Hz mbar See figure 2 6 Pa See figure 2 6 60 Hz mbar See figure 2 6 Pa See figure 2 6 Max...

Страница 32: ...iL Dry Pumping Systems 2 3 Figure 2 1 iL70 dimensions mm A Side view B Plan view 1 Inlet 2 Outlet as supplied 3 Air extraction port...

Страница 33: ...2 4 iL Dry Pumping Systems Figure 2 2 iL600 dimensions mm A Side view B Plan view 1 Inlet 2 Outlet as supplied 3 Air extraction port...

Страница 34: ...pplied 2 Cooling water inlet as supplied 3 Nitrogen inlet sensor configured iL systems only as supplied 4 Cooling water outlet alternative position 5 Cooling water inlet alternative position 6 Nitroge...

Страница 35: ...re of mass dimensions mm and mass distribution Mass distribution on levelling feet kg 1 2 3 4 iL70 69 54 2 51 7 55 3 iL600 122 2 87 9 95 2 88 A iL70 B iL600 1 Levelling foot 2 Levelling foot 3 Levelli...

Страница 36: ...mping speed against pressure Figure 2 6 Typical pumping speeds for iL600 pumping speed against pressure 1 60 Hz 1 60 Hz 2 50 Hz Note The discontinuity at inlet pressure of 20 mbar 2 x 103 Pa indicates...

Страница 37: ...t against inlet pressure Figure 2 8 iL600 power curves electrical power input against inlet pressure 1 60 Hz 2 50 Hz 1 60 Hz 2 50 Hz Note The discontinuity at inlet pressure of 20 mbar 2 x 103 Pa indi...

Страница 38: ...ed water or non corrosive industrial water to cool the iL system Maximum supply pressure 100 psig 6 9 bar 6 9 x 105 Pa Water supply temperature 10 to 30 C Typical pressure differential across supply a...

Страница 39: ...ectrical supply Supply voltage 200 208 380 415 V at 50 Hz 3 phase 200 230 460 V at 60 Hz 3 phase Voltage tolerance 10 except for 208 V and 415 V at 50 Hz which are 6 and 10 Full load current ratings S...

Страница 40: ...recommend that the stability of your nitrogen supply is such that the supply pressure remains within 20 psi of the adjusted pressure Nitrogen supply pressure range 20 to 100 psig 2 4 to 7 9 bar absolu...

Страница 41: ...for your application so that suitable warnings and alarms can be generated 2 10 Connections Inlet and outlet See Table 2 1 Electrical supply connector Type Harting HAN K 4 2 Cable outside diameter ran...

Страница 42: ...alues Low alarm Low warning High warning High alarm LCDP pump temperature o C ADJ ADJ 129 159 LCDP motor cooling water return temperature o C ADJ ADJ 44 ADJ LCMB pump temperature o C ADJ ADJ 99 119 iL...

Страница 43: ...80 415 V 50 Hz 3 phase A533 71 946 A533 72 946 230 V 60 Hz 3 phase A533 71 957 A533 72 957 2 11 2 Sensor configured iL systems Electrical supply iL70 iL600 460 V 60 Hz 3 phase A533 74 908 A533 75 908...

Страница 44: ...nd clean contaminated components and drain oil inside a fume cupboard If the iL system is to replace an existing pumping system vent and purge the process system with nitrogen for 15 minutes before yo...

Страница 45: ...actory extraction system optional 3 11 Connect the nitrogen supply sensor configured iL systems only 3 12 Leak test the system 3 13 Install additional safety equipment optional 3 14 Connect to your em...

Страница 46: ...e 4 Refer to Figure 3 1 Remove the nut and washer 2 which secures each of the four brackets 5 to the blocks 4 on the pallet Retain the nuts and washers for future use 5 Refer to Figure 3 3 Use a flat...

Страница 47: ...move the brackets Retain the brackets nuts and washers for future use Qty Description Check 1 iL dry pumping system Fitting kit which contains the following 1 Inlet O ring 1 Cooling water quick releas...

Страница 48: ...iL Dry Pumping Systems 3 5 Figure 3 2 Lifting bolt positions A iL70 B iL600 1 Lifting bolts 2 Lifting bolt holder...

Страница 49: ...front of the iL system as shown in detail B You will need an Alternative Nitrogen Connection Kit see Section 8 4 10 if you want to reconfigure the nitrogen connection Reconfigure the nitrogen connect...

Страница 50: ...ry Pumping Systems 3 7 Figure 3 3 Remove refit the enclosure panels 1 Top panel 2 Catches on rear of item 1 3 Catches 4 Right hand side panel 5 Locating plates 6 Screws 2 off 7 Lower cover A iL600 B i...

Страница 51: ...e pressure gauge If the pressure has fallen by less than 0 1 bar 1 x 104 Pa continue at Step 11 If the pressure has fallen by more than 0 1 bar 1 x 104 Pa contact your supplier or BOC Edwards for advi...

Страница 52: ...ing water connections if required 1 Water manifold 2 Water return hose 3 Water supply hose 4 Rear bulkhead 5 Cooling water inlet quick release connector 6 Cooling water outlet quick release connector...

Страница 53: ...l operating position 2 Refer to Figure 3 5 Remove the nuts and washers 4 which secure the four transit brackets 2 to the vibration isolators 3 then remove the transit brackets 3 Wheel the iL system on...

Страница 54: ...systems The iL600 system is supplied with both the LCDP and LCMB pumps filled with oil We recommend that you check the LCDP and LCMB oil levels as described below 1 Check the LCDP pump oil level refer...

Страница 55: ...which is greater than the highest pressure that can be generated in your system Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent loading of...

Страница 56: ...ure 3 6 Fit the Pump Display Module optional accessory 5 Recess 6 Cable 7 Pump Display Module 8 Viewing angle adjuster 1 Blanking panel 2 Front panel 3 Connector 4 Connector A Remove the blanking pane...

Страница 57: ...ng of coupling joints We recommend that you use BOC Edwards braided flexible pipelines You must be able to isolate the exhaust outlet from the atmosphere if you have pumped or produced hazardous corro...

Страница 58: ...of dangerous substances out of the system and leakage of air into the system Note Ifyouneedfurtherinformationonleaktesting contactyoursupplierorBOCEdwardsforadvice Leak test the system after installa...

Страница 59: ...must ensure that your installation remains safe if the iL system shuts down automatically 3 15 Connect to your emergency stop circuit optional Note If you do not connect to your own control equipment...

Страница 60: ...iL Dry Pumping Systems 3 17 Figure 3 7 Leak test port position 1 Inlet spool piece 2 Leak test port blanked 3 LCDP pump 4 LCMB pump 5 Leak test port blanked 6 Support manifold A iL70 B iL600...

Страница 61: ...tem will be supplied correctly configured for your electrical supply the Item Number of the iL system shown on the rating plate Figure 3 9 item 1 specifies how the system is configured refer to Sectio...

Страница 62: ...ms 3 19 Figure 3 8 Reconfigure the iL system for your electrical supply if necessary 1 iL70 system 2 Electrics and Pump Control Module 3 iL600 system 4 Cover 5 Screw 6 Common cable 7 Voltage select ca...

Страница 63: ...Module 6 to the rear of the iL system and secure with thefourscrews 7 ensurethatyou donottrapanyofthe cablesconnected totheModule 3 16 3 Connect the electrical supply to the iL system WARNING Connect...

Страница 64: ...0 system B iL600 system C High voltage configuration D Low voltage configuration 1 Rating plate on Electrics and Pump Control Module 2 Pump motor terminal box cover 3 Screws 4 off 4 Blanking plate 5 S...

Страница 65: ...ire Pin number Figure 3 10 key Phase 1 R Phase 2 S Phase 3 T 1 2 3 Table 3 4 Pins in the electrical supply connector 3 16 4 Connect an additional RF earth optional An earth ground cable is connected t...

Страница 66: ...upply cable to the connector mating half A iL70 B iL600 1 Pin 1 phase 1 2 Pin 2 phase 2 3 Pin 3 phase 3 4 Earth ground screw 5 Strain relief bush 6 Electrical supply cable 7 Cover 8 Connector block 9...

Страница 67: ...reeze If you do not cooling water may freeze in the iL system and damage the pump s and or the cooling water pipelines Notes For optimum water cooling ensure that your cooling water supply and return...

Страница 68: ...alves in the exhaust extraction system are open 4 Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed then switch on the iL system 5 If the iL system starts and c...

Страница 69: ...mmediately but there is a delay before the LCMB pump is started This is to ensure that the vacuum system and vacuum inlet pipelines are partially evacuated by the LCDP pump so that the maximum inlet p...

Страница 70: ...e required booster start delay for your installation 11 If the required booster start delay is less than or equal to 30 seconds continue at Step 13 12 If the required booster start delay is greater th...

Страница 71: ...3 28 iL Dry Pumping Systems...

Страница 72: ...is used for the up and down buttons and for the on and off buttons This symbol is used for the two line display on the Pump Display Module With the exception of variable text see Section 4 4 the text...

Страница 73: ...u Then regardless of the current menu and display status when you press any of these buttons you exit the current menu and enter the corresponding new menu Figure 4 2 shows this menu control logic 4 2...

Страница 74: ...ext shown without chevron brackets in the two line display symbol is the actual text that will be shown on the display In this text the symbol is used to show where a digit will be shown the value of...

Страница 75: ...display line so if the iL system does not have an oil monitor fitted to the LCDP pump where Figure 4 6 shows the DP OIL status display the actual display line will be DP OIL NP Note also that there ar...

Страница 76: ...played in the units you selected Menu Figure Switch on 4 3 Switch off 4 4 Normal 4 5 Status 4 6 Control 4 7 Setup 4 8 Inlet purge 4 8 Gas Ballast 4 8 Gate Valve 1 4 8 Gate Valve 2 4 8 Run Til Crash 4...

Страница 77: ...l Status Control Setup Status 4 6 Control 4 7 Setup 4 8 Switch on 4 3 Switch off 4 4 From any menu Figure 4 2 Menu logic If the Pump Display Module does not have control when you try to switch on or s...

Страница 78: ...have an iL Interface Module fitted with an Auxiliary Interface Card connected to the iL system Only available if you have an iL Interface Module fitted with an Auxiliary Interface Card connected to t...

Страница 79: ...ock pump is connected Multi pump menu that is a load lock pump is connected AUTO SHUTDOWN FAST SHUTDOWN AUTO SHUTDOWN FAST SHUTDOWN ENTER ENTER Pump off CANCEL Clears ENTER Only available if you have...

Страница 80: ...f the normal display Second page of the normal display To change the information shown on the two pages refer to Section 5 Figure 4 5 Normal menu On a standard iL system NP will be shown instead of a...

Страница 81: ...ESS CYCLES MB TEMP C DP MOTOR C EXHAUST NP DP BODY C Next parameter 4 6 2 Prev parameter 4 6 2 Figure 4 6 Status menu sheet 1 of 2 Last parameter 4 6 2 On a standard iL system NP will be shown instead...

Страница 82: ...y will show the DP pump current and power again Last parameter 4 6 1 Wng Alarm messages 4 19 Status 4 6 1 AG NP GAS TYPE iL If there are warnings or alarms present the warnings or alarms will be displ...

Страница 83: ...4 12 iL Dry Pumping Systems Control Release control Take control ENTER Release control Take control ENTER Normal 4 5 Normal 4 5 Figure 4 7 Control menu...

Страница 84: ...first digit of the password Press ENTER when the digit is set correctly Use the up and down buttons to increase or decrease the third digit of the password Press ENTER when the digit is set correctly...

Страница 85: ...allast SETUP MENU Valve 1 SETUP MENU Valve 2 SETUP MENU Run til crash Next option 4 8 3 Prev option 4 8 3 Figure 4 8 Setup menu sheet 2 of 3 Turn on off 4 16 3 Turn on off 4 16 3 Open close 4 16 2 Ope...

Страница 86: ...UP MENU Normal Display SETUP MENU Service SETUP MENU Messages ENTER ENTER ENTER ENTER Service 4 12 1 Figure 4 8 Setup menu sheet 3 of 3 Units 4 10 Normal Display 4 11 Messages 4 18 Prev option 4 8 2 N...

Страница 87: ...4 16 iL Dry Pumping Systems Figure 4 9 Run til crash menu Run til crash RUN TIL CRASH On RUN TIL CRASH Off ENTER Exit Return to 4 8 2 ENTER...

Страница 88: ...ew units PSI or kPa Temperature Unit units Pressure Units units Use the up and down buttons to select the new units Fahrenheit or Centigrade Active Gauge units Use the up and down buttons to select th...

Страница 89: ...nge the second line of page 1 of the Normal Display Change the first line of page 2 of the Normal Display Change the second line of page 2 of the Normal Display Use the up and down buttons to select t...

Страница 90: ...and down buttons to increase or decrease the first digit of the password Press ENTER when the digit is set correctly Use the up and down buttons to increase or decrease the third digit of the password...

Страница 91: ...2 SERVICE MENU Serial Numbers SERVICE MENU Zero Sensors SERVICE MENU Manual SERVICE MENU View status SERVICE MENU Gas Valve Contrl ENTER ENTER ENTER ENTER ENTER Serial Menu 4 13 Zero sensors 4 14 Manu...

Страница 92: ...Serial Menu ENTER ENTER ENTER ENTER SERIAL MENU User Tag DP SYSTEM S N serial no tag DP S N serial no tag MB S N serial no tag GAS MODULE S N serial no tag ENTER USER TAG serial no tag Press the CANCE...

Страница 93: ...O SENSORS NO Exit ZERO SENSORS YES ENTER ENTER Press ENTER or CANCEL to exit menu and return to 4 12 2 Normal 4 5 Note This menu is not used in the iL system you can select the menu and press buttons...

Страница 94: ...15 Gas valve control menu Exit 2 3 Interstage N2 Flow SLM Inlet Purge N2 Flow SLM Exhaust Purge N2 Flow SLM ENTER ENTER ENTER ENTER ENTER Return to 4 12 2 Note This menu is not used in the iL system y...

Страница 95: ...Nitrogen Supply MANUAL MENU Gas Ballast MANUAL MENU Inlet Purge ENTER Turn on off 4 16 3 ENTER Turn on off 4 16 3 ENTER Turn on off 4 16 3 ENTER Turn on off 4 16 3 ENTER Turn on off 4 16 3 Figure 4 16...

Страница 96: ...ion 4 16 1 MANUAL MENU Valve 1 MANUAL MENU Valve 2 ENTER Open close 4 16 2 ENTER Open close 4 16 2 Manual 4 16 1 Open close VALVE Open VALVE Close ENTER ENTER Exit Return to above or to 4 8 1 Figure 4...

Страница 97: ...Figure 4 16 Manual menu sheet 3 of 3 Turn on off parameter On parameter Off ENTER ENTER Exit parameter is the prev iously selected device DP MB Load Lock Pump Nitrogen supply Gas Ballast or Inlet Purg...

Страница 98: ...A MB POWER kW RUN HOURS H PROCESS H PROCESS CYCLES MB TEMP C DP MOTOR C EXHAUST NP DP BODY C Next parameter 4 17 2 Prev parameter 4 17 2 Last parameter 4 17 2 On a standard iL system NP will be shown...

Страница 99: ...there are no warnings or alarms present the display will show the DP pump current and power again Last parameter 4 17 1 FINAL NP AUX NP View Status 4 17 1 Wng Alarm Messages 4 19 PUMP STOP s ZERO TIM...

Страница 100: ...iL Dry Pumping Systems 4 29 Figure 4 18 Messages menu Messages MESSAGES English MESSAGES Downloaded ENTER Exit Return to 4 8 3 ENTER...

Страница 101: ...30 iL Dry Pumping Systems Figure 4 19 Warning and alarm messages menu Wng Alarm Messages WARNING e no message ENTER message message ENTER Normal 4 5 ALARM e no message Display advisory message if any...

Страница 102: ...rstand the use of the Pump Display Module menus and buttons before you operate the iL system Refer to Section 4 which fully defines the menus the use of the buttons and the display formats Note that y...

Страница 103: ...odule Figure 1 7 item 9 must be on If the LED is not on use the Control menu to take control You cannot take control with the PDM if another module already has control If you need to use another modul...

Страница 104: ...dy on 2 Ensure that the exhaust extraction system is not blocked and that valves in the exhaust extraction system are open 3 Ensure that the Pump Display Module has control of the iL system refer to S...

Страница 105: ...pressure 1 Refer to Figure 1 6 Pull up the top of the pressure regulator 3 to unlock it 2 Adjust the pressure regulator 3 until the pressure high and pressure low LEDs 4 5 are both on Alternatively u...

Страница 106: ...s acceptable CHECK indicates that the flow is too low or that the water flow switch is faulty or disconnected see Section 6 Shaft seals purge pressure kPa psi Pump stop time seconds Time remaining unt...

Страница 107: ...cause of the fault and to rectify the fault When you have read the message press the ENTER button again the display will then change to normal display see Section 5 2 5 8 Manual shut down WARNING If y...

Страница 108: ...seconds the gas solenoid valve is closed to switch off shaft seals purge to the LCDP pump and at the same time the LCDP pump is switched off The LED on the On button on the Pump Display Module goes of...

Страница 109: ...stop Notes The emergency stop switch is not an electrical isolator The use of emergency stop will not automatically shut down the load lock pump if fitted you must shut down the load lock pump separa...

Страница 110: ...you can restart the iL system Restart the iL system as described in Section 5 4 5 13 Operation of iL system components WARNING Ensure that it is safe to start the iL system If you do not and for exam...

Страница 111: ...ation of the gate valves that is open or close the valves Use the Setup Service Manual DP Only menu to control the operation of the LCDP pump that is switch the LCDP pump on and off 5 14 Operation of...

Страница 112: ...Note that the emergency stop switch on the iL system is not an electrical isolator Note however that you must operate the iL system to purge the pump refer to Section 6 1 2 Recheck the pump rotation...

Страница 113: ...bar 1 x 105 Pa for five minutes 5 The concentration of process gas in the gearbox es will then have been reduced by a factor of 4 Vf where Vf is the volume of the foreline in litres Example Suppose th...

Страница 114: ...Systems 6 3 Figure 6 2 Retighten a Figure 6 1 Fit a Swagelok fitting 1 Swagelok connector 2 Front tapered ferrule 3 Rear ferrule 4 Nut 5 Tube 1 Swagelok connector 2 Front tapered ferrule 3 Rear ferrul...

Страница 115: ...in its original position then tighten the nut slightly 6 3 Maintenance frequency The iL system requires little user maintenance The maintenance operations you can carry out are described in the follow...

Страница 116: ...2 Remove the NW40 clamp and trapped O ring which secures the check valve 17 to the exhaust pipe 18 and remove the check valve 17 Dispose of the trapped O ring 3 Inspect the exhaust pipe 18 If you do n...

Страница 117: ...lange sealing faces for damage refinish if necessary 4 Position the O ring in its groove in the valve body 4 5 Ensure that the fluoroelastomer ball 3 is correctly positioned in the valve body then scr...

Страница 118: ...Dry Pumping Systems 6 7 Figure 6 3 Clean the exhaust check valve 1 Spider leg 2 Valve body female 3 Fluoroelastomer ball 4 Valve body male 5 Inlet flange 6 O ring 7 Flow direction arrow 8 Outlet flan...

Страница 119: ...s or the spinning filters may have failed You cannot replace these items Contact your supplier or BOC Edwards for advice You must check the oil level every three months use the following procedure 1 P...

Страница 120: ...mp may be damaged You must check the oil level every three months use the following procedure 1 Purge the system refer to Section 6 1 2 then shut down the iL system refer to Section 5 8 and allow it t...

Страница 121: ...it to cool 2 Removetheright handsideLCDP enclosure panelfromthe iLsystem refertoSection3 4 3 Refer to Figure 1 1 Remove the LCDP oil filler plug 7 then use a suitable pump or syringe to suck the oil...

Страница 122: ...with a new O ring available as a spare refer to Section 8 3 5 Fill the pump through the filler hole with the correct grade and quantity of oil Allow the oil to drain into the pump then check the oil l...

Страница 123: ...place it there may be an electrical fault contact your supplier or BOC Edwards for advice 1 Use a flat bladed screwdriver to undo the fuse holder 13 14 or 15 by a 1 4 of a turn then remove the fuse ho...

Страница 124: ...vacuum system and disconnect the outlet 16 from your exhaust extraction system Fit blanking caps to your vacuum and exhaust extraction pipelines and to the iL inlet and outlet 1 16 5 If necessary disc...

Страница 125: ...sory text if any and the meaning of the error recommended actions The warning messages are given in error number order in this table Table 6 2 shows all of the alarm messages the corresponding lines o...

Страница 126: ...ECTION The electrical current drawn by the LCDP pump is less than normal Check that the electrical connections are correct and rectify as necessary If the electrical connections are correct a fuse in...

Страница 127: ...s higher than normal There may be a leak in the system or process debris in the pump or the pump motor may have failed Inspect the pipelines and service the pump WARNING 809 MB POWER LOW OPEN CIRCUIT...

Страница 128: ...INCE SERVICE The iL system has been operated for xxxxx switch on off cycles since it was last serviced Service the system WARNING 3113 There is a fault in the ADC analogue to digital convertor in the...

Страница 129: ...sensor and replace it if it has failed WARNING 5511 DP MOTOR TEMP MOTOR WATER LOW CHECK WATER The temperature of the LCDP pump motor is too high Check the cooling water connections in the iL system an...

Страница 130: ...WARNING 12101 There is a fault in the Tool Interface Card in the iL Interface Module Refer to the instruction manual supplied with the iL Interface Module WARNING 15101 There is a fault in the Auxili...

Страница 131: ...H LEAK DEBRIS SERVICE PUMP Refer to the recommended actions for error number 411 see Table 6 1 ALARM 512 The pump motor has tripped out because the motor windings are too hot either the cooling system...

Страница 132: ...d no electrical current was drawn by the LCMB pump Check whether the pump motor is open circuit If not the current sensor may have failed ALARM 5412 MB TEMP MB TEMP HIGH SEE MANUAL Refer to the recomm...

Страница 133: ...have tried to open or close one of the gate valves if fitted but the valve has failed to respond Identify and rectify the cause for the failure of the valve to open or close then try again c A value f...

Страница 134: ...Process cycles since last service 20 Switch on off cycles since last service 31 ADC analogue to digital convertor 40 Shaft seals purge pressure transducer 51 Sensor Monitoring Module status 53 Active...

Страница 135: ...condition 11 High warning condition 12 High alarm condition 13 Device error Last two digits of the error number For example a pressure transducer has drifted outside the valid range For example sensor...

Страница 136: ...100mm A F hexagonal key to remove the 3 8 BSP plug and O ring 2 from the motor shaft 4 Fit the hexagonal key to the end of the motor shaft and try to turn the shaft clockwise in the direction shown b...

Страница 137: ...6 26 iL Dry Pumping Systems Figure 6 4 Try to turn the LCDP pump A iL70 B iL600 1 Rear cover 2 Plug and O ring 3 8 BSP 3 Correct direction of rotation arrow...

Страница 138: ...stances have been pumped or if you are unsure whether dangerous substances have been pumped or not leave the oil in the pump s Do not drain the oil Drain the oil from the pump s as described in Sectio...

Страница 139: ...e oilmayleakintothe sweptvolumeofthepump s You must provide a correctly completed Return of Equipment Declaration form HS2 if you return the iL system to BOC Edwards refer to Section 8 2 If you want t...

Страница 140: ...OC Edwards Service Centre or other BOC Edwards company you must comply with the requirements of Section 7 3 and with the requirements of the Return of BOC Edwards Equipment Procedure see forms HS1 and...

Страница 141: ...re Extraction Fan Kit provides air extraction of the iL enclosure at a rate of 2 8 m3 min 1 100 cfm Accessory Item Number iL Enclosure Extraction Fan Kit A505 39 000 8 4 2 Pump Display Module The Pump...

Страница 142: ...status of the iL system through your process tool or other control equipment The Tool Interface Card has a setpoints store The setpoints store can be preset to contain sensor setpoints suitable for a...

Страница 143: ...o allow your Process Tool or PC based software to control and monitor the operation of the iL system through a serial port and or through a parallel port with a small number of digital lines Serial po...

Страница 144: ...following procedure 1 Contact your supplier and obtain a Return Authorisation Number for your equipment 2 Turn to the next page s photocopy and then complete the Declaration HS2 3 Remove all traces o...

Страница 145: ...__________________________________________________ Print your name _____________________________ Print your job title _____________________________________ Print your organisation ____________________...

Страница 146: ...WAN R O C HSIN CHU CITY Tel 886 35 280 354 SOUTH EAST ASIA BOC EDWARDS 26 Changi South Street I Changi South Industrial Estate SINGAPORE 486773 Tel 65 546 8408 Fax 65 546 8407 KOREA HEADQUARTERS SONGW...

Отзывы:

Нет отзывов

Бренды по названию

Популярные бренды

Загрузить еще бренды