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GASGUARD



TE10 Distribution System Manual

Air Products and Chemicals, Inc.

Page i - vi

Europe (continued)

East Kilbride Tech Center
Units 5, 6, & 6A Scottish Enterprise Technology Park
East Kilbride G75 0QD Scotland
Phone: 44 1355 81 3380

Nijmegen Tech Center
Ooskanaaldikj 110
6534 AL Nijmegen, The Netherlands
Phone: 31 24 3523 642
Fax:

31 24 3523 659

Asia

Singapore Tech Center
8 Tuas Basin Link
Singapore 638762
Phone: 65-6863-8652
FAX:

65-6863-8654

Shanghai Tech Center
No. 238 Fenju Rd
WGQ Free Trade Zone
Shanghai, China. 200131
Phone: 86-21-5048-3905 (WGQ); 86-21-6360-5096 (EAP)
Fax:

86-21-5048-0590 (WGQ); 86-21-6360-9090 (EAP)

Factory Contact Information:

USA:

Air Products and Chemicals, Inc.

Semiconductor Equipment Manufacturing Center

1919 Vultee Street

Allentown, PA 18103
Phone: 866-257-6158

International:

Air Products and Chemicals, Inc.

Semiconductor Equipment Manufacturing Center

1919 Vultee Street

Allentown, PA 18103
Phone: 610-706-7377

Содержание GASGUARD TE10

Страница 1: ...ation and Maintenance Manual for the GASGUARD TE10 Distribution Systems Commodity Number 809 609287 Revision September 2009 Air Products and Chemicals Inc 1919 Vultee Street Allentown PA 18103 809 609...

Страница 2: ......

Страница 3: ...ing Connections February 2005 NRTL Requirements Section 4 Electrical Connections August 2005 Updated electrical ratings Section 5 Helium Leak Testing November 2004 First Edition Section 6 Distribution...

Страница 4: ...ARD TE10 Distribution System Manual Air Products and Chemicals Inc Page i ii Manual Section Revision Level Reason for Revision Appendix B November 2004 First Edition Appendix C November 2004 First Edi...

Страница 5: ...The operator MUST read and understand the safety section before operating the system All operating and maintenance personnel must receive training and instruction by Air Products and Chemicals Inc Sy...

Страница 6: ...374 toll free From all other locations 610 481 7711 FAX 610 481 3772 APCI Operator 610 481 4911 European Community Middle East Gases 44 500 02 02 02 Technical Support Contacts Visit www airproducts co...

Страница 7: ...ica Tech Center 5508 W Highway 290 Suite 150 Austin TX 78735 8817 Phone 512 892 7772 Western Tech Center 2880 Lakeside Drive Suite 150 Santa Clara CA 95054 Phone 408 492 9080 Pacific Northwest Tech Ce...

Страница 8: ...Center 8 Tuas Basin Link Singapore 638762 Phone 65 6863 8652 FAX 65 6863 8654 Shanghai Tech Center No 238 Fenju Rd WGQ Free Trade Zone Shanghai China 200131 Phone 86 21 5048 3905 WGQ 86 21 6360 5096 E...

Страница 9: ...20 1 9 7 Electrical Hazards 1 21 1 9 8 Purge Gas Backstream Hazard 1 21 1 10 Typical Minimal Lockout or Tagout System Procedures 1 21 1 11 Safety Signs and Labels 1 26 1 12 Equipment Safety Features 1...

Страница 10: ...re 7 1 7 2 Hazardous Gas Manifold Panel 7 3 7 3 Panel Schematic and Component Descriptions 7 4 7 4 GASGUARD TE10 Distribution System Controller 7 8 7 4 1 The Display Screen 7 9 7 5 1 Security Code Pro...

Страница 11: ...Delivery Pressure 9 8 9 6 4 High Branch Delivery Pressure or Very High Branch Delivery Pressure 9 8 9 6 5 Low Process Inlet Pressure or Very Low Process Inlet Pressure 9 9 9 6 6 High Process Inlet Pre...

Страница 12: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page i x...

Страница 13: ...igned and built in accordance with the Uniform Fire Code UFC and the National Fire Protection Association NFPA The source equipment must be installed and operated in accordance with the UFC NFPA and a...

Страница 14: ...echnical representative if you need assistance in preparation of standard work instruction Section 1 Safety Warnings This section provides the safety information needed to safely operate the system Ma...

Страница 15: ...equired in some cases Section 10 Maintenance This section provides a guide to routine maintenance operations Section 11 System Specific Information This section provides system specific information su...

Страница 16: ...Description 8 Operating Procedures 9 Troubleshooting 10 Maintenance 11 System Specific Information Appendices The information and data contained herein are proprietary to Air Products and Chemicals I...

Страница 17: ...e icons found in various sections of the manual and on the equipment The hazard warning labels used in the manual will correlate with those used on the equipment 1 1 1 Level or Intensity of Hazard Ind...

Страница 18: ...ause an explosion when combined with air The formation for explosive gas mixtures of flammable gas and air when exposed to an ignition source Pyrophoric gases which will ignite spontaneously without t...

Страница 19: ...equipped with automatic closers This symbol warns of the possibility of the distribution system tipping over if it is not installed properly Personal injury could result This symbol indicates the nee...

Страница 20: ...ty procedures and safety equipment self contained breathing apparatus emergency shutdown systems plant alarm locations etc Do not use this device in any manner other than specified in this manual Do n...

Страница 21: ...s Symptoms of asphyxia include Rapid breathing Nausea Vomiting Inability to move Convulsive movements Collapse Abnormal pulse Rapid fatigue Faulty judgment Insensitivity to pain Abnormal emotions Remo...

Страница 22: ...0 Distribution System Manual Air Products and Chemicals Inc Page 1 6 outside the suspect area but within view of the other person This method ensures that the other person can respond in the event of...

Страница 23: ...out the line before doing any work Follow Typical Minimal Lockout or Tagout System Procedures described by Occupational Safety and Health Admin Labor Para 1910 147 1 5 Electrical Hazard Electric shock...

Страница 24: ...en installing the system extreme care needs to be taken to support it properly Due to the top heavy nature of the system if not installed properly it could tip over injuring crushing or possibly killi...

Страница 25: ...onnel operate this equipment This equipment should be supplied by the customer prior to operating the GASGUARD system Safety shower Emergency phones Eye wash Gas leak detection system for gases to be...

Страница 26: ...or non flammable toxics ex nitrogen dioxide boron trifluoride All gases in Section 1 9 using the warning sign with POISON GAS on the left and FLAMMABLE GAS on the right REQUIRE the Nomex suit Personal...

Страница 27: ...Nomex suit Face shield Safety glasses with side shields Leather gloves Safety shoes Personal Protective Equipment for Flammables Hard hat fire hat with brim recommended Long sleeved Nomex suit Face s...

Страница 28: ...le and Pyrophoric Gases Hazards Oxidizer Hazards Inert Gas Hazards Pressurized Gases Electrical Hazard Not all of the gas related hazards may apply to your system For example you may not be using any...

Страница 29: ...uired for use with toxic gases is detailed in Section 1 8 of this manual A list of most of the toxic gases used in the GASGUARD system follows Ammonia Hydrogen fluoride Arsine Hydrogen sulfide Boron t...

Страница 30: ...rsonal injury or death Section 1 8 of this manual lists the personal protective equipment required for use with corrosive gases A list of most of the corrosive gases used in the GASGUARD system follow...

Страница 31: ...ecific gas Some flammable gases may accumulate as pockets in enclosed areas and subsequently explode if an ignition source is present A flammable gas also presents an asphyxiating hazard in sufficient...

Страница 32: ...em when the equipment is shut down Avoid venting of flammable gases through vents that do not contain an inert atmosphere Personal protective equipment required for use with pyrophoric and flammable g...

Страница 33: ...nd safe practices for these systems should be permitted to operate and maintain the system Use only equipment specifically designed for oxygen or oxidizer service Inappropriate materials of constructi...

Страница 34: ...clothing could come in contact with a source of ignition spark flame or other and ignite In some cases the elevated oxygen levels could linger even after the source has been shut off Never tie into an...

Страница 35: ...iousness Symptoms of asphyxia include Rapid breathing Nausea Vomiting Inability to move Convulsive movements Collapse Abnormal pulse Rapid fatigue Faulty judgment Insensitivity to pain Abnormal emotio...

Страница 36: ...e with inerts is listed in Section 1 8 A list of inert gases used in the GASGUARD system follows Argon Halocarbon 115 Carbon Dioxide Halocarbon 116 Halocarbon 11 Helium Halocarbon 12 Krypton Halocarbo...

Страница 37: ...personal injury or death The control circuits for the system use 115 220 VAC 50 60 Hz Do not attempt to work on the system without first turning the power off and tagging out and locking out the elec...

Страница 38: ...chines or equipment from energy sources To assist employers in developing a procedure which meets the requirements of the standard the following simple procedure is provided for use in both lockout an...

Страница 39: ...ized and the reason therefore The authorized employee shall know the type and magnitude of energy that the machine or equipment utilizes and shall understand the hazards thereof 2 If the machine or eq...

Страница 40: ...ut equipment each shall place his her own personal lockout device on the energy isolating devices s When an energy isolating device cannot accept multiple locks or tags a multiple lockout or tagout de...

Страница 41: ...ized to lockout or tagout 4 Name s Job title s of affected employees and how to notify 5 Type s and Location of energy isolating means 6 Type s of stored energy 7 Method s selected i e locks tags addi...

Страница 42: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 1 26 1 11 Safety Signs and Labels The following sign is located on the front of the Gasguard system...

Страница 43: ...face of the GASGUARD controller This label is required for GASGUARD systems located in certain hazardous areas i e Class I Division II locations in the United States or areas covered by the Explosive...

Страница 44: ...ASGUARD system They are identical to the labels on the process gas cylinder in the GASGUARD cabinet to provide verification that the correct process gas is being installed and used NOTE The signs show...

Страница 45: ...t The following label would be used with the gases listed below it Boron trifluoride Phosphorous pentafluoride Chlorine Sulfur dioxide Carbon tetrachloride Sulfur tetrafluoride Nitrogen dioxide Tungst...

Страница 46: ...ases listed below it The following label would be used with the gases listed below it Fluorine Fluorine mixtures Acetylene Hydrogen mixtures Butane Isobutane Disilane Isobutylene Deuterium Methane Eth...

Страница 47: ...it The following label would be used with the gases listed below it The following label would be used with the gases listed below it Arsine mixtures Germane Carbon monoxide Hydrogen selenide Diborane...

Страница 48: ...Halocarbon 125 Argon Halocarbon 128 Carbon dioxide Halocarbon C141B Halocarbon 11 Halocarbon C318 Halocarbon 12 Helium Halocarbon 13 Krypton Halocarbon 13B1 Neon Halocarbon 14 Nitrogen Halocarbon 21 P...

Страница 49: ...ure An exhaust monitor verifies ventilation through the cabinet The system may utilize a positive shutoff regulator This type of regulator is designed to close tightly if the pressure builds above the...

Страница 50: ...nd understood Material Safety Data Sheets for all gases used in system 1 14 Safety Literature for Handling and Use of Instrument Nitrogen Supply The safety literature listed below must be read and und...

Страница 51: ...n purposes For system specific details refer to the installation drawings supplied An installation drawing INS will be provided upon request 2 1 Outline Dimensions For overall dimensions see the follo...

Страница 52: ...Chemicals Inc Page 2 2 2 1 1 Outline Dimension Figures for 24 Distribution Systems 4 stick 2 1 1 1 24 Valve Manifold Box MC Rack 2 1 1 2 24 Valve Manifold Box MC Wall Mount 2 1 1 3 24 Valve Manifold P...

Страница 53: ...Section 2 Dimensions and Mounting Revision November 2004 Page 2 3 Approximate Weight 275 Pounds 124 74 Kilograms Figure 2 1 1 1 Outline Dimensions 24 Valve Manifold Box MC Rack 4 stick...

Страница 54: ...SGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 2 4 Approximate Weight 200 pounds 90 72 kilograms Figure 2 1 1 2 Outline Dimensions 24 Valve Manifold Box MC Wall Mount 4 sti...

Страница 55: ...Section 2 Dimensions and Mounting Revision November 2004 Page 2 5 Approximate Weight 275 pounds 124 74 kilograms Figure 2 1 1 3 Outline Dimensions 24 Valve Manifold Panel MC Rack 4 stick...

Страница 56: ...GUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 2 6 Approximate Weight 200 pounds 90 72 kilograms Figure 2 1 1 4 Outline Dimensions 24 Valve Manifold Panel MC Wall Mount 4 st...

Страница 57: ...Page 2 7 2 1 2 Outline Dimension Figures for 30 Distribution Systems 6 stick or 8 stick 2 1 2 1 30 Valve Manifold Box MC Rack 2 1 2 2 30 Valve Manifold Box MC Wall Mount 2 1 2 3 30 Valve Manifold Pan...

Страница 58: ...ARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 2 8 Approximate Weight 300 Pounds 136 08 Kilograms Figure 2 1 2 1 Outline Dimensions 30 Valve Manifold Box MC Rack 6 stick or 8...

Страница 59: ...ection 2 Dimensions and Mounting Revision November 2004 Page 2 9 Approximate Weight 250 pounds 113 40 kilograms Figure 2 1 2 2 Outline Dimensions 30 Valve Manifold Box MC Wall Mount 6 stick or 8 stick...

Страница 60: ...RD TE10 Distribution System Manual Air Products and Chemicals Inc Page 2 10 Approximate Weight 300 pounds 136 08 kilograms Figure 2 1 2 3 Outline Dimensions 30 Valve Manifold Box MC Rack 6 stick or 8...

Страница 61: ...ection 2 Dimensions and Mounting Revision November 2004 Page 2 11 Approximate Weight 250 pounds 113 40 kilograms Figure 2 1 2 4 Outline Dimensions 30 Valve Manifold Box MC Wall Mount 6 stick or 8 stic...

Страница 62: ...ons specified by SEMI S2 93A The facility floor mounting location should be clean and must be level The GASGUARD Distribution System Wall Mounts are mounted to vertical walls or supporting structure u...

Страница 63: ...Distribution Systems 4 stick For 24 rack anchoring see the following Mounting Hole Location Figure for proper floor location of four 4 9 16 14 3 mm diameter holes in the frame base 2 2 1 1 Mounting H...

Страница 64: ...ASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 2 14 Figure 2 2 1 1 Mounting Hole Locations 24 Valve Manifold Box MC Rack 4 stick or 24 Valve Manifold Panel MC Rack 4 stick...

Страница 65: ...tems 6 stick or 8 stick For 30 rack anchoring see the following Mounting Hole Location Figure for proper floor location of four 4 9 16 14 3 mm diameter holes in the frame base 2 2 2 1 Mounting Hole Lo...

Страница 66: ...0 Distribution System Manual Air Products and Chemicals Inc Page 2 16 Figure 2 2 2 1 Mounting Hole Locations 30 Valve Manifold Box MC Rack 6 stick or 8 stick or 30 Valve Manifold Panel MC Rack 6 stick...

Страница 67: ...he top rear of the source system Connections that terminate with a VCR fitting are either capped or plugged at the factory and are ready for connection to the facility piping Connections that terminat...

Страница 68: ...urge inlet 1 4 6 4 mm diameter 0 035 0 9 mm wall thickness Vent outlet 3 8 9 5 mm diameter 0 035 0 9 mm wall thickness or 1 4 6 4 mm diameter 0 035 0 9 mm wall thickness Specific piping connections fo...

Страница 69: ...nt may remain open be dead ended or be pressurized with inert gas depending on the method chosen to monitor the secondary containment tube for leaks Two methods of monitoring are typically used gas de...

Страница 70: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 3 4...

Страница 71: ...introduced to the vent system at any time in the event of certain multiple component failures therefore the vent line and pollution abatement system should be capable of handling a full process gas cy...

Страница 72: ...nitrogen to adequately produce the vacuum needed during purge cycles The supply is usually taken from a bulk liquid source but it can also originate from a cylinder manifold system The vacuum generat...

Страница 73: ...le material designed to prevent leakage and protect against mechanical damage If electrical power for the purge air is required this power shall be on a separate disconnect or before the gas source sy...

Страница 74: ...ller 1 Close the controller front and tighten both latches completely 2 Open the needle valve 4 to 5 turns counter clockwise Allow the controller to purge for 20 minutes 3 Adjust needle valve to satis...

Страница 75: ...inute minimum 3 In order to meet UFC criteria U S A only in Silane gas service air velocity across all unwelded fittings and connections must meet the following velocity requirements to minimize poten...

Страница 76: ...ane source cylinder valve per US Code requirement Table 2 Exhaust Recommendations for Gasguard Equipment Containing Gases with a TLV 0 20 ppm 25 TLV 0 050 ppm Notes 1 ERC Expected Release Concentratio...

Страница 77: ...smaller access port of the GG500 VMB enclosure balancing to Tables 2 and 3 will satisfy meet or exceed UFC 80 face velocity requirements 3 7 1 Exhaust Flow Clarifications and Definitions 1 Silane and...

Страница 78: ...rate They cannot provide an accurate measurement of exhaust flow due to their location and air flow characteristics in the round exhaust duct located on the enclosure High impact polycarbonate baffle...

Страница 79: ...ut off valve Weld Gas Inlet MV32 or MV30 It is located on the inside right of the enclosure where temporary tubing can be inserted and connected to the VCR fitting When the temporary gases are no long...

Страница 80: ...l operation of the distribution system This port is for vacuum service only Do not connect pressurized gas to this port 3 10 Hazardous Gas Leak Detection System Customer Requirement A gas leak detecti...

Страница 81: ...n the United States Reference to the use of this equipment in Hazardous Locations only applies to installations located within the United States of America Range of Environmental Conditions 0 to 60 C...

Страница 82: ...ethod Use 4 AWG ground wire for non EMI RFI protected systems installed in the United States Use Alpha 1239 1 3 8 flat braid or equivalent for EMI RFI protected and CE marked systems Total length not...

Страница 83: ...240 volts 3 amps 50 60 Hz and 10 000 rms symmetrical ampere interrupting capacity The device should be accessible to the operators marked as the disconnecting device for the gas cabinet and must have...

Страница 84: ...A maximum Overvoltage protection Recommended may be required by local code Sizing 25 minimum over required load add all cabinet loads and divide by 0 75 NOTE Power wiring must be sized to deliver the...

Страница 85: ...between the GASGUARD TE10 connectors and the conduit seals to facilitate these connections A maximum length of 18 457 mm is allowed between the last pour fitting and the cabinet connector All conduits...

Страница 86: ...it is supplied for connecting the 120 240 VAC power supply to the system The conduit hole is located on the top of the controller enclosure Two additional holes are supplied for customer I O See Figur...

Страница 87: ...Section 4 Electrical Connections Revision August 2005 Page 4 7 Figure 4 5 Conduit and Conduit Seals...

Страница 88: ...ons Figure 4 6 I O Terminal Blocks The tables on the following pages list recommended external I O communications and detail digital output and digital input connections Specific I O field wiring conn...

Страница 89: ...h is to be used as an input device This switch must have a 750 ohm resistor in parallel with the contacts and a 1K ohm resistor in series with the contacts When the switch contacts are open the circui...

Страница 90: ...m starting Emergency Stop Hardwired Shut down of GASGUARD System local reset required Master Solenoid Permissive Hardwired permissive for Master Solenoid allows remote inhibit of master solenoid Super...

Страница 91: ...Available 1 21 22 34 TEMP Gas Available 2 21 24 35 Gas Available 3 25 26 36 Gas Available 4 25 28 37 Gas Available 5 29 30 38 Gas Available 6 29 32 39 Gas Available 7 34 35 40 Gas Available 8 34 36 Di...

Страница 92: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 4 12...

Страница 93: ...Section 4 Electrical Connections Revision August 2005 Page 4 13 Supervised Inputs BC1 Analog Input Source BC1 Signal BC1 Supervisory L 43 44 Supervisory R 45 46...

Страница 94: ......

Страница 95: ...ith helium Outboard The component is pressurized with helium and sniffed externally with the detector NOTE It is recommended that the internal GASGUARD Source System tubing which was helium leak teste...

Страница 96: ...gas could be unintentionally vented Opening vent valves when high pressure process gas is present No process gas cylinders should be connected at this time If one is or was connected do not continue...

Страница 97: ...resentative for proper password as follows Press The LCD screen will prompt PASSWORD Press the empty box next to PASSWORD A keyboard will appear Using the keyboard type in the password Press the enter...

Страница 98: ...ose a valve 4 3 Touch the valve you wish to close 4 4 The valve state will toggle from open to closed Extreme care must be taken when operating valves manually Only those valves required for adequate...

Страница 99: ...r a cost The cost of this service may have been pre arranged during the sale and scope review of the project Contact your Air Products Representative to discuss this The Air Products and Chemicals Inc...

Страница 100: ...ed and checked see Section 4 4 6 GASGUARD Network wiring installed if applicable and configured on the host see Section 4 5 7 Process lines installed and helium leak tested see Section 3 2 8 Vent line...

Страница 101: ...Section 6 Distribution System Functional Checklist Revision November 2004 Page 6 3 Inspection Sign Offs Electrical Mechanical Quality Safety APCI Field Start Up Checklist Complete...

Страница 102: ...ectly per Specification Sheet No nylon collars stripped Distribution System information received circle Specification Sheet Flow Schematic Customer I O Drawing Inspection and Test Sheet leak test and...

Страница 103: ...from the back of the controller Do all valves operate Manual mode operation No audible solenoid leaks Re install pneumatic bulkheads from the back of the controller Firmware versions PLC HMI Network C...

Страница 104: ...ust be powered up a minimum of 15 minutes Zero and span should be checked a minimum of 4 times to insure repeatability Check and record the pressure before and after calibration in psig Analog Label Z...

Страница 105: ...h 1 A 2 Excess Flow Branch 2 B 3 Excess Flow Branch 3 C 4 Excess Flow Branch 4 D 5 Excess Flow Branch 5 E 6 Excess Flow Branch 6 F 7 Excess Flow Branch 7 G 8 Excess Flow Branch 8 H 9 High Temperature...

Страница 106: ...7 Relay 8 SECTION COMPLETED SIGNATURE____________________ DATE ________ NOTES ________________________________________________________________________ FUNCTIONAL TEST USER SET POINTS Check off line it...

Страница 107: ...____________ ________________________________________________________________________ FUNCTIONAL TEST FILE VERIFICATION Check off line item when completed Sign and date when section is completed Branc...

Страница 108: ..._________ _________________________________________________________ _________________________________________________________ _________________________________________________________ ________________...

Страница 109: ...a safe environment for personnel during operation and maintenance or in the unlikely event of a leak of hazardous gas For certain areas and gases regulations may require that the enclosure must be con...

Страница 110: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc 7 2 Figure 7 1 Typical GASGUARD MC Mass Customized Distribution System...

Страница 111: ...ic control valves Pneumatic control valves can be used to shut off process gas flow to control purge gas flow into the process panel to vent process gas and purge gas from the panel and to feed inert...

Страница 112: ...VENTURI PROCESS GAS TO TOOLS MV9 1 MV9 2 MV9 3 MV9 4 PT5 Figure 7 2 Typical Four Branch Distribution System Flow Schematic NOTE Some components shown here are optional Not all systems contain all comp...

Страница 113: ...tion Valve This manual valve isolates the Distribution System and downstream equipment from the process gas supply provides dual isolation with V1 MV2 High Pressure Process Valve branch 1 4 A D This m...

Страница 114: ...gas to enter the Distribution System panel through the purge gas supply line when used in conjunction with valve MV21 PCV1 Pressure Control Valve branch 1 4 A D This regulator controls the pressure of...

Страница 115: ...m Filter Optional This device removes particles from the gas stream CV Check Valve This safety device is used to prevent backflow of gas into another section of the system Vacuum Venturi This device i...

Страница 116: ...ondition arises The controller screen allows the operator to easily understand the operation and to quickly identify operating problems Closed valves are indicated in open valves are indicated in red...

Страница 117: ...troller the display screen is an LCD that contains a graphical display of the Distribution System gas panel shutdown and fault alarm boxes a Branch status box and the selection window The screen that...

Страница 118: ...Controller Main Menu 7 4 3 Alarm and Branch Status Boxes Shutdown alarms will appear in the ACTIVE ALARM box selected by pressing the SHUTDOWN ALARM indicator in the top left corner of the screen Fau...

Страница 119: ...not open the valves until the button is pulled out to its normal Branch See Figure 8 1 for location of the Emergency Stop pushbutton 7 4 6 Flow Valve Z Purge The flow valve is located on the right rea...

Страница 120: ...s in the Configuration Menu to change some operating parameters and view others 3rd level allows access to additional operating files for highly trained supervisory personnel Details of the password s...

Страница 121: ...g each of the operations in the Distribution Mode Menu Process Gas Flow This operation is highlighted when the desired Branch Target menu is selected It starts process gas flow to the process tool for...

Страница 122: ...wnstream process line The gas is vented through a vent valve at the tool or through the tool itself This purge process is used to reduce the concentration of hazardous gas to safe levels to allow main...

Страница 123: ...permit maintenance of this equipment NOTE Either the Flow Purge or the Rough Line Evacuation sequence will be installed in the TE10 controller per the original order See the System Specific Informatio...

Страница 124: ...files that the customer may access for changing parameters such as non critical setpoints or number of purge cycles or for viewing only 7 7 Manual Mode Operation The Manual Mode file in the Main Menu...

Страница 125: ...re 8 4 Line Purge and Process Line Purging Procedures 8 5 Process Gas Flow Procedure 8 6 Manual Mode Operation 8 7 Password Security 8 8 System Configuration Be sure you have read and understood the s...

Страница 126: ...e equipment and operating procedures the hazards and the safety procedures are permitted to operate this system 8 1 Emergency Shutdown Procedure In the event of an emergency press the EMERGENCY STOP p...

Страница 127: ...ctive within the controller Do not perform maintenance on the controller without disconnecting or switching off power externally and following the required Lockout or Tagout procedures If it is necess...

Страница 128: ...Upon Power Up Once the system is powered up a power up alarm will exist To silence this alarm press the button Pressing the button will then clear this and any other alarm If an alarm condition still...

Страница 129: ...the white box next to the PASSWORD prompt This will open the keyboard Enter the password using the keyboard Press on the keyboard once the password is entered Press the button on the Login window If...

Страница 130: ...in Menu sub menus are selected by pressing the appropriate menu key The Main Menu is shown in figure 8 2 0 3 Figure 8 2 0 3 Main Menu Note Selections that appear red are not selectable at this point o...

Страница 131: ...e Main Menu will display the following screen see figure 8 2 1 for the process line that is selected Figure 8 2 1 Mode Menu This screen allows the user to purge start process gas rough lines stick eva...

Страница 132: ...ation manual Check that the GASGUARD Distribution System and all plant piping have been leak checked with a helium mass spectrometer in accordance with the customer s specified procedure Check that th...

Страница 133: ...t If alarms are present do not continue Follow the troubleshooting procedures found in Section 9 If needed contact your Air Products factory representative for assistance 7 Check that all automatic va...

Страница 134: ...o continue with the program All manual valves on the Line purge inlets MV4 1 MV4 2 MV4 3 MV4 4 and vent outlets MV6 1 MV6 2 MV6 3 MV6 4 should be closed during process flow and idle modes The specific...

Страница 135: ...urther verify that process equipment and facility piping is ready to receive process gas 20 Press START PROCESS GAS on the MODE MENU 21 The controller will open the process gas inlet isolation valve o...

Страница 136: ...Line Purge and Process Line Purging Procedures 8 4 1 Line Purge Procedure This procedure purges hazardous gas from the selected Line prior to maintenance or other operations on the Line that require...

Страница 137: ...the appropriate status box at the top of the screen 6 Follow prompted manual steps on the screen 7 The controller will make several checks for adequate purge pressure and vacuum and proper closure of...

Страница 138: ...ed 10 During pressurization valves 6 1 and 7 will close green and the purge valve for Line 1 valve 4 1 will open red The screen to the right displays this portion of the purge sequence for Line 1 11 T...

Страница 139: ...valves at the process tool have been closed to isolate the process line from the process tool gas panel 2 Press and enter the password 3 On the Main Menu screen press the Mode Menu button for the Lin...

Страница 140: ...e used to reduce the concentration of hazardous gas to safe levels to allow maintenance to be performed on the process Line 1 and downstream components It is the customer s responsibility to establish...

Страница 141: ...low through purge will continue until the operator initiates STOP FLOW PURGE 8 Press and enter the password to obtain Main Menu 9 Press the appropriate Mode Menu button 10 Press STOP FLOW PURGE 11 Whe...

Страница 142: ...Verify that the downstream equipment is prepared to receive process gas 1 Press and enter the password 2 On the Main Menu screen press the Mode Menu button for the Line you want to operate 4 From the...

Страница 143: ...alves out of their proper sequence could potentially cause damage to the product by interrupting or providing insufficient gas flow Manual operation should not be used for normal daily operation Manua...

Страница 144: ...ss gas is present Process gas could be unintentionally vented Opening vent valves when high pressure process gas is present Alarms associated with normal process flow excess flow process pressure are...

Страница 145: ...is open to anyone 8 6 2 How to Open and Close Valves Valves are opened and closed from a window that opens when MANUAL MODE is selected from the Line Menu To open a valve 1 Select the valve by touchi...

Страница 146: ...ions 8 6 3 To SECURE Manual Mode 1 The Secure option will allow an operator to exit the Manual Mode menu while remaining in manual mode with valves open The Secure option will not be selectable if no...

Страница 147: ...security level allows normal sequence selection start and stop process flow and purge procedures Access to Manual Mode and the Configuration Menu is not permitted The second security level allows acce...

Страница 148: ...n files may be accessed from the CONFIGURATION MENU option on the Main Menu For safety considerations most configuration parameters may be changed only by Air Products technical personnel The paragrap...

Страница 149: ...eering units for each user defined alarm This window will allow the operator to enter a new setpoint value for one or more chosen alarms or exit the window without changes These setpoints may include...

Страница 150: ...plays the current values for the leak parameters You may increase these values but may not decrease them below their pre programmed minimum To change a setpoint first select the analog input by touchi...

Страница 151: ...ut Test as a reminder like that which is used in manual operation for critical valve operation 8 8 7 Analog Inputs This option displays a list of the analog inputs and their current values The current...

Страница 152: ...sed and not used states To change the condition of an alarm select the alarm by touching the Condition block that you wish to change This will toggle between the high and low states To change an alarm...

Страница 153: ...der in which the alarms came in in chronological order 8 8 13 System Setup The System Setup window allows the operator to choose language options and edit the date or time Touch the language option bu...

Страница 154: ......

Страница 155: ...he distribution system in the tubing between the process outlet of the source and the distribution system gas panel or branch inlet valve and then vent all pressure in the system Purge out all process...

Страница 156: ...Before performing troubleshooting review the Safety Section Section 1 and read the warnings If at any time during troubleshooting you are unsure what to do next DO NOT CONTINUE Contact Air Products a...

Страница 157: ...d device to the proper receptacle on the interface box Repair or replace as necessary Set the scaling values to the proper range of the field device Replace fuse Repair or replace faulty component as...

Страница 158: ...on output circuit Follow Troubleshooting Digital Outputs procedure to determine location of fault Adjust instrument supplypressure to 85 95 psig 5 9 6 6 barg Repair or replace as necessary Replace fu...

Страница 159: ...e Adjust to 85 95 psig 5 9 6 6 barg if necessary Purge gas pressure transducer s malfunctioning Check input to controller Check connections and signal from pressure transducers Repair connections repa...

Страница 160: ...ogen pressure Adjust to 85 95 psig 5 9 6 6 barg if necessary Process gas pressure transducer s malfunctioning Check input to controller Check connections and signal from pressure transducers Repair co...

Страница 161: ...als if the alarm displayed on the screen does not appear in this section NOTE Contact Air Products and Chemicals for the procedure for calibrating pressure transducers 9 6 1 Excess Flow Probable Cause...

Страница 162: ...ssure or Very Low Branch Delivery Pressure Probable Cause Corrective Action Branch delivery pressure is set below the low or very low delivery pressure setpoints Adjust branch delivery pressure regula...

Страница 163: ...anual process isolation valve at source cabinet is closed Open manual valve Process gas pressure from the source cabinet is below the low or very low setpoints Check delivery pressure from source pres...

Страница 164: ...as inlet pressure to the distribution system 9 6 8 High Purge Inlet Pressure or Very High Purge Inlet Pressure Probable Cause Corrective Action Purge gas inlet pressure is above the high or very high...

Страница 165: ...9 6 10 Low Vacuum Generated Probable Cause Corrective Action Vacuum Venturi supply pressure or flow is insufficient Verify a Venturi supply of 75 95 psig 5 2 6 6 barg at 50 60 slpm 106 127 cfh is obta...

Страница 166: ......

Страница 167: ...e services of Seller s installation and startup advisors to ensure the correct installation and successful operation of the equipment As to all apparatus and products not manufactured by Seller which...

Страница 168: ...azards of the system Before attempting to service the system or branch components all pressure in the system or branch should be relieved Close the manual inlet valve s to the distribution system in t...

Страница 169: ...xed to critical components Failure to label correctly could result in inadvertent operation of system possible resulting in personal injury or death When performing maintenance on a TE10 Distribution...

Страница 170: ...serious damage could occur to the electronic components Pressure transducers and gauges Check process and purge pressures for readings that are outside of the specification range found in Section 11 o...

Страница 171: ...r non corrosive gases Filters It may be desirable to measure flow through the filter with an inert gas to assure that it is not plugged Every six months for corrosive gases Yearly for non corrosive ga...

Страница 172: ...ted in Section 11 System Specific Information of this manual Item Task Frequency EFS2 Excess flow Verify that process flow rate above the setpoint shuts the system down Every six months PT2 Branch del...

Страница 173: ...hutdown The following maintenance should be performed to verify functioning of the Emergency Stop Button Item Task Frequency E Stop Activate E stop switch verify system down verify all solenoids close...

Страница 174: ......

Страница 175: ...on August 2009 11 1 Section 11 System Specific Information This section is provided as a placeholder for information specific to the system Some information is supplied with the equipment separate fro...

Страница 176: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc 11 2 11 1 System Specifications The specifications for the system follow this page...

Страница 177: ...alog input card 8 ch 12 bit 1 809 609278 Discrete I O card 32 DI 24VDC 1 809 609279 Discrete I O card 8 DO Relay 1 809 609280 Discrete I O card 32 DO 24VDC 1 809 609281 Optional Simatic Net CP342 5 Co...

Страница 178: ...rocess Out Spool Vacuum Venturi Spool Purge Gas Spool Purge Filter if used Contact Air Products and Chemicals Inc when ordering spare parts Your equipment commodity code number will be required when p...

Страница 179: ...Section 11 System Specific Information Revision August 2009 11 5 11 3 Program Logic Chart The program logic chart for the system follows this page...

Страница 180: ......

Страница 181: ...Appendix A Revision November 2004 Page A 1 Appendix A This Appendix contains the SEMC QAF030 UHP Tubing and Fitting Specification...

Страница 182: ...3 0 Responsibility 3 1 The Materials Management group of SEMC is responsible for communicating this requirement to its vendors and ensuring their full compliance 3 2 The vendor shall review and respon...

Страница 183: ...n actual range and does not allow for rounding of numbers as set forth in ASTM A269 6 1 4 Tubing shall conform to the requirements of ASTM A269 for sizes one half inch diameter and larger and ASTM A63...

Страница 184: ...han 0 02 microns at point of use 6 4 2 Deionized water used for cleaning shall have the following minimum point of use requirements and be verified on a monthly basis by an independent laboratory Resi...

Страница 185: ...pondence to the applicable mill test reports 6 8 Inspection and Testing 6 8 1 All tests and inspections required in this section shall be performed for each order unless otherwise stated in the purcha...

Страница 186: ...8 8 Moisture testing shall be performed on one length of cleaned and packaged tube from each heat for each size O D and nominal wall thickness Testing shall verify the addition of less than 1 ppm moi...

Страница 187: ...9 1 1 One set of reports shall be sent to SEMC QA prior to receipt of material at SEMC The components will be cross referenced to the received reports for acceptable vendor traceability numbers 6 9 1...

Страница 188: ......

Страница 189: ...Appendix B Revision November 2004 Page B 1 Appendix B This Appendix contains the Nitrogen N2 Material Safety Data Sheet...

Страница 190: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page B 2...

Страница 191: ...Appendix B Revision November 2004 Page B 3...

Страница 192: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page B 4...

Страница 193: ...Appendix B Revision November 2004 Page B 5...

Страница 194: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page B 6...

Страница 195: ...APPENDIX C Revision November 2004 C 1 Appendix C This Appendix contains the Gasguard Pressure Equipment Directive PED Assessment Certificate the PED is applicable only to the European Community...

Страница 196: ...size DN Less than DN25 Less than one inch nominal diameter Classification according to Table 7 SEP This equipment has been classified as SEP in accordance with Article 3 Section 1 3 of the Pressure E...

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