Air Products GASGUARD TE10, Инструкция по установке, эксплуатации и обслуживанию, Страница: 139 / 196

Section 8: Operating Procedures
Revision – September 2009 8 - 15
8.4.2 Rough Line Evacuation Procedure
This procedure purges hazardous gas from the selected Line 1 and the process line
to the tool. Its purpose is to remove the major portion of the hazardous gas in the
process line through the vent system of the Distribution System.
The Rough Line Evacuation Procedure
does not remove hazardous gas from the
process line to non-hazardous levels
required for maintenance operations. A
manual purge of the Line 1 and process
line through the tool must be completed
prior to any maintenance operations.
1. Verify that the appropriate valves at the process tool have been closed to
isolate the process line from the process tool gas panel.
2. Press and enter the password.
3. On the Main Menu screen, press the Mode
Menu button for the Line you want to purge.
5. From the Mode Menu, select "START
ROUGH LINE".
6. Rough Line Running will appear in the
appropriate status box at the top of the
screen.
7. Follow prompted manual steps on the screen.
8. The controller will initiate a sequence of evacuation and pressurization steps
until the configured number of cycles are completed.
9. To stop the Rough Line Evac sequence before completion highlight "STOP
ROUGH LINE" on the Mode Menu. If the purge sequence is interrupted, the
full procedure will be repeated when restarted.
10. When completed, the major portion of the hazardous process gas in the
process line has been removed.