Air Products GASGUARD TE10, Инструкция по установке, эксплуатации и обслуживанию

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Section 3: Tubing Connections
Revision – February 2005 Page 3 - 9
3.7 Enclosure Exhaust System Requirements
1. In order to meet SEMI S2 criteria in HPM (Hazardous Production Material)
gas service, the enclosure should control emissions into the room to less
than 25% TLV (Threshold Limit Value) of the HPM gas in the event of an
internal leak.
2.
In order to meet UFC (Uniform Fire Code) criteria (U.S.A. only) in HPM
gas service, air velocity across the opened access hatch must meet the
following velocity requirements to minimize potential operator exposure to
hazardous gas: 200 feet per minute average, with 150 feet per minute
minimum at any point (61
meters per minute average, with 46 meters per
minute minimum).
3.
In order to meet UFC criteria (U.S.A. only) in Silane gas service, air
velocity across all unwelded fittings and connections must meet the
following velocity requirements to minimize potential pocketing of Silane
gas: 200 feet per minute (61
meters per minute).
The values listed in the tables below should
serve as a guideline for reference only.
Enclosure ventilation systems must:
(1) Be designed, installed, and balanced to
suit individual facility requirements.
(2) Comply with applicable local, state, and
federal codes.
This exhaust system must be independent of
any general plant exhaust system and must
be designed for the types of gases being used.
Ensure only compatible gases are fed into
each exhaust system. Be certain the exhaust
system power and shut down interlocks
comply with with all applicable local, state,
and federal codes (i.e., UFC and NFPA code
in U.S.) requirements.