
GASGUARD
®
TE10 Distribution System Manual
Air Products and Chemicals, Inc.
10 - 2
void and of no effect. Buyer agrees to assume responsibility and pay for such
defects which are attributable to it and for damages which may occur to the
Equipment after delivery to it. Seller shall not be responsible for any defects due
to or caused by normal wear and tear, corrosion, erosion or disregard of Seller's
operating and maintenance instructions, or improper use of equipment.
10.2 Routine Maintenance
The following maintenance needs to be done at the indicated times.
Maintenance is only to be performed by
trained personnel who understand the
hazards of the system.
Before attempting to service the system or
branch components, all pressure in the
system or branch should be relieved.
Close the manual inlet valve(s) to the
distribution system (in the tubing between
the process outlet of the source and the
distribution system gas panel or branch
inlet valve) and then vent all pressure in
the system. Purge out all process gas lines
and seal them. Tag out and lock out the
manual process inlet valve to the
distribution system (see Section 1.10 ) or
branch inlet valve to prevent opening while
service is being performed. Tag out and
lockout process valves at the tool gas panel
to prevent backflow of another hazardous
gas to the distribution system. Once the
maintenance is complete, helium leak test
the system using a mass spectrometer.
Follow the start-up procedure, in Section
8.3.
Содержание GASGUARD TE10
Страница 2: ......
Страница 12: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page i x...
Страница 70: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 3 4...
Страница 87: ...Section 4 Electrical Connections Revision August 2005 Page 4 7 Figure 4 5 Conduit and Conduit Seals...
Страница 92: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page 4 12...
Страница 94: ......
Страница 154: ......
Страница 166: ......
Страница 174: ......
Страница 180: ......
Страница 188: ......
Страница 189: ...Appendix B Revision November 2004 Page B 1 Appendix B This Appendix contains the Nitrogen N2 Material Safety Data Sheet...
Страница 190: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page B 2...
Страница 191: ...Appendix B Revision November 2004 Page B 3...
Страница 192: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page B 4...
Страница 193: ...Appendix B Revision November 2004 Page B 5...
Страница 194: ...GASGUARD TE10 Distribution System Manual Air Products and Chemicals Inc Page B 6...