Air Products GASGUARD TE10, Инструкция по установке, эксплуатации и обслуживанию, Страница: 77 / 196

Section 3: Tubing Connections
Revision – February 2005 Page 3 - 11
Table 3
Exhaust Recommendations for Gasguard Equipment Containing
Gases with a TLV between 0.050 and 0.20 ppm (25% TLV: 0.0125 - 0.050 ppm)
[Includes the following pure (100%) gases: Chlorine Trifluoride, Diborane, Arsine]
Notes :
[1
] ERC (Expected Release Concentration) values are taken from actual test data.
[2] ESI (Ex hau st Stack Insert) may have been specified by the customer to enhance
the readability of the exhaust pressure monitor. Refer to the system’s
Specification Sheet to determine if this option is used.
[3] These exhaust flow values are applicable to the 30 inch and 24 inch standard flow
Gasguard VMB enclosures.
[4] All standard Gasguard enclosures are sized for a 6 inch outer diameter (OD) duct
connection to the vent stack.
[5] “Access Hatch Closed” values have been measured, or calculated at the exhaust
stack duct.
[6] The actual values presented in "Access Port Open" are from experiments done on
a two-cylinder MC source system enclosure. Due to the similar design and smaller
access port of the GG500 VMB enclosure, balancing to Tables 2 and 3 will satisfy
meet or exceed UFC 80 face velocity requirements.
3.7.1 Exhaust Flow Clarifications and Definitions:
1. Silane and disilane enclosures contain internal metal baffles, used to direct
exhaust flow across fittings. These internal metal baffles must not be
removed.
2. High-impact polycarbonate baffles are not supplied, or available for the
access hatch of 1 cylinder standard flow cabinets, high flow Silane VMBs, or
high flow Disilane source VMB’s.
3. Definitions:
Static pressure - The suction pressure provided by the exhaust system
measured near the entrance of the 6” (154 mm) round exhaust duct. Static
pressure does not provide a verification of exhaust flow. See velocity
pressure.
Maximum
ERC [1]
Exhaust
Flow
Static
Pressure
Velocity
Pressure
Exhaust
Flow
Velocity
Pressure
Average
Duct
Velocity
Minimum
Face
Velocity
Average
Face
Velocity
Baffle
ppm scfm
inches
H2O
inches
H2O
scfm
inches
H2O
fpm fpm fpm
No ESI [2] 0.007 120 -0.5 0.01 272 0.14 1392 240 266 33%
No ESI < 0.007 120 -1 0.05 349 0.26 1783 200 248 None
ESI < 0.007 120 -1 0.2 214 0.55 1095 180 216 33%
ESI < 0.007 120 -1.5 0.2 270 0.94 1380 180 200 None
Access Port Closed Access Port Open