82
Corrections
2.1
Replace DIG-T2 board
3.1
Replace DIG-T2 board.
4.1
Replace the keyboard.
4.2
Replace the DIG-T2 board.
5.1
Check that the Atmos.Press parameter
(sec 8.2.17) is set to the correct
atmospheric pressure.
5.2
The sensor is faulty. Replace sensor.
Possible cause check-up and tests
—
The voltage reading must be less than
5mV. A higher voltage may indicate
that the ANL-T2 board fastening
screws are loose or that the power
supply grounding cable is loose.
2.1
If the other functions are OK, the display
is probably damaged.
3.1
DIG-T2 board is faulty.
4.1
Keyboard is faulty.
4.2
DIG-T2 board is faulty.
5.1
Check if the displayed value is near the
atmospheric pressure.
5.2
If after setting the Atmos.Press parameter
the displayed value is significantly
different from the atmospheric pressure
there is a problem with the pressure
sensor.
10. TROUBLESHOOTING (cont.)
10.3 Pre-process malfunction
(cont.)
Symptom
1. (cont.)
2.
System is on and display is
not lit.
3.
System on and erroneous or
fragmented digits.
4.
No response from one of
the keys.
5.
The displayed readout for
the atmospheric pressure,
when the door of the
chamber is open, does not
conform to the actual
absolute pressure.
Summary of Contents for 2540 EHS
Page 10: ...9 REAR VIEW...
Page 17: ...16 Layout diagram of the ANL T2 is provided below ANL T2 BOARD Top View Bottom View...
Page 19: ...18 AC T1 BOARD Top View Bottom View...
Page 30: ...29 6 4 Input Output Graph...
Page 31: ...30...
Page 32: ...31...
Page 33: ...32...
Page 34: ...33...
Page 35: ...34...
Page 66: ...65...
Page 68: ...67...
Page 120: ...119 VESSEL ASSEMBLY Model 2540 EHS Model 3870 EHS...
Page 121: ...120 OUTER CABINET ASSEMBLY Model 2540 EHS Model 3870 EHS...
Page 122: ...121 TRAY HOLDER For model 2540 TRH254 0009 For model 3870 TRH387 0001...
Page 126: ...125 PIPING DRAWING FOR 2540 EHS...
Page 127: ...126 PIPING DRAWING FOR 3870 EHS...
Page 128: ...127 ELECTRICAL DRAWING FOR 2540 EHS...
Page 129: ...128 ELECTRICAL DRAWING FOR 3870 EHS TILL S N 2307039...
Page 130: ...129 ELECTRICAL DRAWING FOR 3870 EHS AFTER S N 2307040...