78
Corrections
7.1 fix
leakage.
7.2
replace faulty vacuum pump/
7.3
fix leaking piping.
7.4
replace stuck non-return valve
7.5.1
Replace faulty coil and/or plunger.
7.5.2 Fix
disconnection.
7.5.3
Replace faulty board.
7.5.4
Replace faulty board.
7.5.5
See item 10.4.8.
7.5.6
See item 10.4.35.
7.5.7
See item 10.4.30.
7.5.8
See item 10.4.29
Possible cause check-up and tests
7.1
Chamber is leaking.
7.2
Faulty vacuum pump.
7.3
Vacuum piping is leaking.
7.4
Non-return valve is stuck.
7.5
Vacuum valve (52) does not open during vacuum
stage due to:
7.5.1
Faulty coil or plunger.
7.5.2 Pump
disconnected.
7.5.3
Faulty digital board DIG-T2 (located in
the electronic box).
7.5.4
Faulty analogue board ANL-T2 (located
in the electronic box).
7.5.5
Air inlet valve (43) leaks or is stuck open.
7.5.6
Fast exhaust valve (73) leaks or is stuck
open.
7.5.7
Slow exhaust valve (74) leaks or is stuck
open.
7.5.8
Steam valve (93) leaks or is stuck open.
10. TROUBLESHOOTING
(cont.)
10.2 Preliminary
Troubleshooting
(cont.)
Symptom
7.
“Low vacuum” is
displayed.
\
Summary of Contents for 2540 EHS
Page 10: ...9 REAR VIEW...
Page 17: ...16 Layout diagram of the ANL T2 is provided below ANL T2 BOARD Top View Bottom View...
Page 19: ...18 AC T1 BOARD Top View Bottom View...
Page 30: ...29 6 4 Input Output Graph...
Page 31: ...30...
Page 32: ...31...
Page 33: ...32...
Page 34: ...33...
Page 35: ...34...
Page 66: ...65...
Page 68: ...67...
Page 120: ...119 VESSEL ASSEMBLY Model 2540 EHS Model 3870 EHS...
Page 121: ...120 OUTER CABINET ASSEMBLY Model 2540 EHS Model 3870 EHS...
Page 122: ...121 TRAY HOLDER For model 2540 TRH254 0009 For model 3870 TRH387 0001...
Page 126: ...125 PIPING DRAWING FOR 2540 EHS...
Page 127: ...126 PIPING DRAWING FOR 3870 EHS...
Page 128: ...127 ELECTRICAL DRAWING FOR 2540 EHS...
Page 129: ...128 ELECTRICAL DRAWING FOR 3870 EHS TILL S N 2307039...
Page 130: ...129 ELECTRICAL DRAWING FOR 3870 EHS AFTER S N 2307040...