84
Corrections
1.1
Close the door more tightly or readjust
the door switch to activate earlier.
2.1
Check the valve as per para 10.4 sections
35 & 36. Replace either the fast exhaust
valve (73), no return valve or clean the
drain line as needed.
2.2
Clean clogged strainer.
Possible cause check-up and tests
1.1
As the pressure in the chamber rises
during the heat up stage it presses
outward on the door. This can cause the
door switch to be released and cause the
system to think the door is opened.
2.1
Fast exhaust valve (73) is faulty or the
discharge line from the chamber to drain
is clogged or the no return valve is faulty.
2.2
Strainer is clogged
10. TROUBLESHOOTING (cont.)
10.4
In Process Malfunction
Symptom
1.
Message DOOR UNLOCK
is displayed during the
heating stage, although the
door is closed.
2.
The fast exhaust
operation is too slow
Summary of Contents for 2540 EHS
Page 10: ...9 REAR VIEW...
Page 17: ...16 Layout diagram of the ANL T2 is provided below ANL T2 BOARD Top View Bottom View...
Page 19: ...18 AC T1 BOARD Top View Bottom View...
Page 30: ...29 6 4 Input Output Graph...
Page 31: ...30...
Page 32: ...31...
Page 33: ...32...
Page 34: ...33...
Page 35: ...34...
Page 66: ...65...
Page 68: ...67...
Page 120: ...119 VESSEL ASSEMBLY Model 2540 EHS Model 3870 EHS...
Page 121: ...120 OUTER CABINET ASSEMBLY Model 2540 EHS Model 3870 EHS...
Page 122: ...121 TRAY HOLDER For model 2540 TRH254 0009 For model 3870 TRH387 0001...
Page 126: ...125 PIPING DRAWING FOR 2540 EHS...
Page 127: ...126 PIPING DRAWING FOR 3870 EHS...
Page 128: ...127 ELECTRICAL DRAWING FOR 2540 EHS...
Page 129: ...128 ELECTRICAL DRAWING FOR 3870 EHS TILL S N 2307039...
Page 130: ...129 ELECTRICAL DRAWING FOR 3870 EHS AFTER S N 2307040...