Plasma Gas Analyzer
47
02001001A_9
5.8.5 PID values
Figure 37 - GAS FLOW PID VALUES
The PID values are the proportional, integral and derivative constant of the loop controlling the
gas flow. Depending on the gas flowing in the analyzer, the PID values could have to be
changed in order to obtain a stable flow. To modify any of the three constants, press
“1”
,
“2”
or
“3”
respectively for the proportional, integral or derivative value.
Figure 38 - CHANGING A PID VALUE
The screen will display the preceding figure. Type a new value on the keypad and press E
(Enter) to update the current value. Press
“F4”
to modify another value or to leave the menu.
<<<PID values>>>
1-Proportional 2- Integral 3-Derivative
Sample flow(CC):25.0
F3:NEXT
F4:RET
F3:NEXT F4:RET
<<<PID values>>>
1-Proportional 2- Integral 3-Derivative
Proportional:0.900
New Value:0.000
F4:RET
F3:NEXT F4:RET
Summary of Contents for SERVOPRO Plasma
Page 1: ...Part Number 02001001A Revision 9 Language UK English SERVOPRO Plasma OPERATOR MANUAL...
Page 2: ...This page intentionally blank...
Page 10: ...Plasma Gas Analyzer 8 02001001A_9 Figure 3 INTERNAL SCHEMATIC...
Page 16: ...Plasma Gas Analyzer 14 02001001A_9 Figure 4 DIMENSIONAL OUTLINE DRAWING...
Page 58: ...Plasma Gas Analyzer 56 02001001A_9 APPENDIX 1 AUTOMATIC CALIBRATION OPTION...
Page 66: ...Plasma Gas Analyzer 64 02001001A_9 Figure 49 SERVOPRO PLASMA WITH AUTOMATIC CALIBRATION...
Page 67: ...Plasma Gas Analyzer 65 02001001A_9 APPENDIX 2 TRACE NITROGEN IN HELIUM VERSION...
Page 70: ...Plasma Gas Analyzer 68 02001001A_9 APPENDIX 3 DUAL BACKGROUND ANALYZERS...
Page 76: ...Plasma Gas Analyzer 74 02001001A_9 APPENDIX 4 INTERFACE FOR EXTERNAL VALVE BOX...