Servomex SERVOPRO Plasma Operator'S Manual Download Page 75

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Plasma Gas Analyzer

02001001A_9

CAUTION

The metal based trap is made with ¼” O.D. S.S. tubing. Don’t allow air or

high level of O2 to flow in it because excessive heat would be generated.

Install the trap only when all lines are purged. This trap must be installed to

get good results when operating under helium. This trap can be shipped

back to Servomex for proper regeneration. We strongly recommend

keeping one in stock.

Summary of Contents for SERVOPRO Plasma

Page 1: ...Part Number 02001001A Revision 9 Language UK English SERVOPRO Plasma OPERATOR MANUAL...

Page 2: ...This page intentionally blank...

Page 3: ...liamp output connections 18 4 2 4 Alarm remote range and status relay connections general 19 4 2 5 Alarm output option 20 4 2 6 RS232 connection option 22 4 3 Connect the sample auto calibration optio...

Page 4: ...ering Zero and span gas values 58 1 4 Manual Calibration 58 1 5 Automatic Calibration Mode 61 APPENDIX 2 TRACE NITROGEN IN HELIUM VERSION 65 2 TRACE NITROGEN IN HELIUM VERSION 66 2 1 User Manual 66 2...

Page 5: ...9 MAIN CALIBRATION 32 Figure 20 DISPLAYED WHEN ENTERING ZERO VALUE 32 Figure 21 DISPLAYED WHEN ENTERING SPAN VALUE 33 Figure 22 CALIBRATION SUB MENU 33 Figure 23 DIAGNOSTIC MAIN MENU 35 Figure 24 DIAG...

Page 6: ...Figure 47 AUTOMATIC CALIBRATION TIMERS 62 Figure 48 ANALOG OUTPUT HOLD TO TRACK TRANSFER DELAY 62 Figure 49 SERVOPRO PLASMA WITH AUTOMATIC CALIBRATION 64 Figure 50 OPERATING PARAMETERS MENU 70 Figure...

Page 7: ...Gs and CAUTIONs which are used as follows WARNING Warnings highlight specific hazards which if not taken into account may result in personal injury or death Where the above symbol is marked on the equ...

Page 8: ...he analyzer is designed to meet the needs of the control and product quality applications of industrial gas producers and users who require fast accurate and reliable gas analysis Gas sample measureme...

Page 9: ...1001A_9 1 3 2 02001 Analyzer layout Key Description 1 Keypad 2 LCD display 3 Power inlet 4 Gas connections 5 Service port 6 RS 232 port 7 IO Connector Figure 1 FRONT OF THE ANALYZER Figure 2 REAR OF T...

Page 10: ...Plasma Gas Analyzer 8 02001001A_9 Figure 3 INTERNAL SCHEMATIC...

Page 11: ...e the analyzer Always remove vent plug before connecting the sample inlet 2 1 General Dimensions Mass Height x Width x Depth 133 mm x 483 mm x 457 mm 5 25 ins x 19 ins x 18 ins 15 kg 2 2 Environmental...

Page 12: ...AC Normal sample measurement 4mA to 20 mA Fault condition 4 mA or 20 mA can be set high or low 1 The analyzer is supplied configured for operation with one of these voltage ranges You must specify the...

Page 13: ...3 0 1 ppm range 10 ppb 0 10 ppm range 0 1 ppm 0 50ppm range 0 5 ppm 0 100 250 500 1000 ppm ranges 1ppm Auto zero auto span calibration system optional Serial port RS 232 optional Digital output 3 ran...

Page 14: ...ive caps are kept on prior to fitting Inspect the analyzer and the other items supplied and check that they are not damaged If any item is damaged immediately contact Servomex or your local Servomex a...

Page 15: ...do sample measurements may not be accurate or the analyzer may be damaged CAUTION Do not install analyzer in an area where a strong electromagnetic field is present Never use radio transmitters near...

Page 16: ...Plasma Gas Analyzer 14 02001001A_9 Figure 4 DIMENSIONAL OUTLINE DRAWING...

Page 17: ...If you do not the analyzer may be damaged or may fall and damage other equipment Refer to Figure 5 and Figure 6 Prepare a cut out in a suitable panel capable of supporting 15kg Prepare a suitable base...

Page 18: ...be damaged The electrical supply coupler or plug must be easily accessible for disconnection from the electrical supply Ensure that your electrical supply can provide the necessary maximum power cons...

Page 19: ...gnated H05VV F For North America UL817 or CSA C22 2 No 21 and be designated SJT Ensure that the cables that you connect to the analyzer are routed so that they do not present a trip hazard The analyze...

Page 20: ...protection CAUTION To comply with EMC requirements screened cables must be used to connect the analogue outputs and the screen of the mA output shall be connected to the analyzer enclosure The remote...

Page 21: ...at least this level of protection CAUTION To comply with EMC requirements screened cables must be used to connect the relay outputs and the screen of the relay outputs shall be connected to the analyz...

Page 22: ...t board inside the analyzer When the ppm value of the sample gas exceeds the set point of alarm 1 or alarm 2 their respective contact will open To enter the set point value for alarms you should go in...

Page 23: ...N MENU fig 1 Pressing F4 brings the first page of the CONFIGURATION MENU and pressing F4 again brings back to MAIN MENU The values you enter must be in ppm You may enter any value from 0 to 100 ppm fo...

Page 24: ...he computer is connected to the analyzer by the mean of a DB 9 RS 232C Null modem cable The computer must have appropriate software to read the data transmitted by the analyzer The RS 232 port on the...

Page 25: ...ails of the transmission protocol for the Enhanced Interface for use with External Valve Box The different parameters are transmitted in the following order for the standard interface ppm value sign p...

Page 26: ...parated by a TAB character The end of one transmission packet or frame is indicated with a carriage return The checksum is the arithmetic sum of every transmitted byte excluding TAB bytes The checksum...

Page 27: ...so that they do not present a hazard to people WARNING The analyzer is not suitable for use with corrosive samples WARNING Ensure the connectors used to connect to the analyzer are compatible with the...

Page 28: ...or recovery time PR1 should be installed close to the sample point PR1 should be installed only if there is large pressure excursion over 69 kPa 10 PSIG Figure 13 POOR INSTALLATION EXAMPLE 1 Some user...

Page 29: ...t someone tries to control the flow with the valve mounted on this rotameter if any This will be in conflict with the analyzer internal flow control system Problems caused line pollution flow instabil...

Page 30: ...urged with good quality argon In this way the analyzer will be ready to use much faster Also and more importantly you will not send higher level of impurities in the plasma To power on the analyzer pr...

Page 31: ...ging In this case increase the flow to 190 cc to purge the analyzer for a minimum of 2 hours After the purge time is elapsed you may adjust down the by pass rotameter to an acceptable flow depending o...

Page 32: ...the E key for enter The allowed numeric value for the flow is any integer number between 0 and 200 The flow unit is cc m The new input value becomes immediately active and the flow valve will react ac...

Page 33: ...exit the configuration section by pressing F4 The analyzer will display the first page of the CONFIGURATION MENU Pressing F4 again brings up the MAIN MENU This is the standard configuration Other men...

Page 34: ...ally select the proper operating scale For this reason you must wait for signal stabilization before sampling the value for calibration From MAIN MENU when you press the F2 key the CALIBRATION MAIN ME...

Page 35: ...n the actual value field If not the value is rejected the input field is cleared and the actual value is left unchanged If you made an error when entering your value just press enter and start over On...

Page 36: ...ayed for 5 seconds NOTE an indicator is displayed on the right of the confirmation message informing the user if the re span or the re zero has not been performed yet After this delay the ZERO DONE me...

Page 37: ...23 DIAGNOSTIC MAIN MENU In the diagnostic menu the cell counts and flow counts are displayed It is very useful to verify stability and cell offset By selecting F2 it is possible to see the error and a...

Page 38: ...it easier to calibrate remote monitoring system and also makes it faster to verify the hardware part for the 4 20 mA signal isolation module NOTE the analogue output mode selected from the CONFIGURATI...

Page 39: ...re 26 DIAGNOSTIC MENU Below is a list of possible errors and their significance LOW FLOW The flow on sample is smaller than 10 cc min 10 sccm PLASMA OFF The plasma is shut down Occurs when there is lo...

Page 40: ...al number Figure 27 SERIAL NUMBER MENU It displays the analyzer serial number which corresponds to the one written at the back of the analyzer This can be useful if the back of the analyzer is not acc...

Page 41: ...e and the 3 key for maximum range In both cases i e manual or auto ranging the actual scale in use is shown on the display The gas sample flow is always displayed Normally the value displayed is the v...

Page 42: ...opriate message will be displayed When the flow comes back to normal the generator restarts 5 7 Special consideration about the 0 1 ppm range When the 0 to 1 ppm range is selected the system is very s...

Page 43: ...back to normal If for any reason the cell count value with the normal power applied to the cell is too close or oscillates around the starting count value the analyzer will go back and forth between s...

Page 44: ...These factors are entered at the factory during temperature drift tests Most of the time these factors will be set to 1 000 and should not be changed If you suspect there is an error call Servomex to...

Page 45: ...with the numeric keypad and then press E to validate the new value The menu to enter the compensation factor for the offset looks the same as the one for gain N B The ambient temperature is saved at e...

Page 46: ...e 32 TIME AND DATE SETTING 1 1 Enter the number 15 on the keypad Then press enter 2 Enter the number 46 on the keypad Then press enter 3 Enter the number 23 on the keypad Then press enter Now the menu...

Page 47: ...nd then press enter the analyzer refreshes the actual time and date and the menu should look like the following screen Figure 35 TIME AND DATE SETTING 4 If you enter an incorrect value the analyzer cl...

Page 48: ...this valve to set the amplification You may see it as a span potentiometer N B You must recalibrate the analyzer each time you change the system gain The smallest gain is 2 and the highest is 1000 Mi...

Page 49: ...ny of the three constants press 1 2 or 3 respectively for the proportional integral or derivative value Figure 38 CHANGING A PID VALUE The screen will display the preceding figure Type a new value on...

Page 50: ...nge can be set ON or OFF If the lock range is set OFF the user is allowed to manually change the range in the run menu If it is set ON the range cannot be changed NOTE To lock the range you must disab...

Page 51: ...ftware uses this parameter to determine the number of sample PPM values that are used in its moving average sub routine The number of samples ranges from 1 to 25 When entering 1 there is no moving ave...

Page 52: ...alogue to digital converter counts of the signal measured with the zero gas In front of Span we find the analogue to digital converter counts of the signal measured with the span gas The slope and the...

Page 53: ...not operate safely or provide accurate measurements WARNING Sample and calibration gases may be toxic or asphyxiant Never inspect the inlet filter s or service or repair the analyzer while such gases...

Page 54: ...ommended If you think that an electrical supply fuse has failed use the following procedure to inspect the fuses and replace it if necessary 1 Remove power cord 2 Pry door open at socket with a suitab...

Page 55: ...ciated equipment in its original packaging before storage Alternatively seal it inside a waterproof plastic bag sack or storage box Store the analyzer and any associated equipment in a clean dry area...

Page 56: ...not intended for disposal in a municipal waste stream but shall be submitted for material recovery and recycling in accordance with the local regulations which implement the WEEE Directive For additio...

Page 57: ...alyzer complies with the Class B digital apparatus requirements of ICES 003 of Canada through the application of EN 55011 2007 L analyseur est conforme aux Conditions B num riques d appareillage de cl...

Page 58: ...Plasma Gas Analyzer 56 02001001A_9 APPENDIX 1 AUTOMATIC CALIBRATION OPTION...

Page 59: ...mon outlet manifold and then to the bulkhead labeled Trap In At the same time the manifold also supplies gas to the two other unselected valves and the gas exits the valves through the purge port to a...

Page 60: ...nd span gas values From the main menu press F2 to enter the calibration menus of the analyzer proceed to the CALIBRATION MAIN MENU by pressing F3 and follow standard steps as described in section 5 4...

Page 61: ...U to enter the CALIBRATION FACTOR CALCULATION MENU Figure 43 CALIBRATION FACTOR CALCULATION MENU When the cell counts are stable press F1 to re zero the analyzer with the gas currently flowing Selecti...

Page 62: ...n a re span is about to be performed The previous procedure was intended for a manual calibration in which the user controls the various steps of calibration To enable the analyzer to recalibrate by i...

Page 63: ...ing The analog output remains at the value calculated just before the beginning of the calibration Figure 45 TRANSFER DELAY To configure the analyzer to perform automatic calibrations first set the di...

Page 64: ...in minutes followed by the E key to set the TIME ON CAL GAS To set the TRANSFER DELAY advance in the hidden menu by pressing F3 until the following page is displayed Figure 48 ANALOG OUTPUT HOLD TO T...

Page 65: ...c menu The value displayed next to ELAPSED TIME SINCE LAST CAL is the number of hours since the analyzer was put in automatic calibration mode The value displayed next to MINUTES ON CAL GAS is the num...

Page 66: ...Plasma Gas Analyzer 64 02001001A_9 Figure 49 SERVOPRO PLASMA WITH AUTOMATIC CALIBRATION...

Page 67: ...Plasma Gas Analyzer 65 02001001A_9 APPENDIX 2 TRACE NITROGEN IN HELIUM VERSION...

Page 68: ...f when the real flow is below 10 cc min The analyzer should be operated and calibrated with a flow set point of 75 cc min and stable inlet pressure The recommended inlet pressure range is between 5 to...

Page 69: ...sure regulator will maintain the line pressure constant 3 The third parameter temperature If the line temperature varies reading will also vary due to change in equilibrium conditions change in temper...

Page 70: ...Plasma Gas Analyzer 68 02001001A_9 APPENDIX 3 DUAL BACKGROUND ANALYZERS...

Page 71: ...for the Argon version This valve is not a tight shut off valve Its purpose is to maintain the flow at the default flow set point i e 75 cc min It is possible to have a little flow usually not more th...

Page 72: ...arting mode to normal mode If the cell count value value from the analog to digital converter this value may be observed under DIAGNOSTIC MENU is under the starting count value a higher power is appli...

Page 73: ...t the sample flow set point at 75 cc min You may change later the sample flow set point in the configuration menu See User s Manual After the selection is done use F3 to go in the next menu or F4 to q...

Page 74: ...menu and all calculated operating parameters will be saved in the memory when you change from argon to helium or vice versa Values for alarm set points if you have this option and temperature coeffici...

Page 75: ...or high level of O2 to flow in it because excessive heat would be generated Install the trap only when all lines are purged This trap must be installed to get good results when operating under helium...

Page 76: ...Plasma Gas Analyzer 74 02001001A_9 APPENDIX 4 INTERFACE FOR EXTERNAL VALVE BOX...

Page 77: ...VB 3 unit Not all Valve Boxes are the same Check with manufacturer of the valve Box that your selected model is compatible with the analyzer 4 2 Main Menu An analyzer fitted with the enhanced RS 232 p...

Page 78: ...rough the RS 232 Port The RS 232 serial communication port standard 9 pin D connector is used to connect the analyzer to a computer terminal or Valve Box The output data is updated twice a second The...

Page 79: ...bration is shown When that one is done right then the other bad calibration is shown Both are cleared when both calibrations are done right or unit is reset fw is used whenever a different kind of fai...

Page 80: ...h range and in fixed range They have to end with the range limits 0 xxxx ppm Example ranges are in the middle column the top limit can be any integer number ALARM 1 STATUS AL 1 ON AL 1 DISABLED Status...

Page 81: ...in the Valve Box When analyzer is powered up it defaults to local regime mode The Valve Box on receiving the string output through the RS 232 port will send the ar command to set the instrument in re...

Page 82: ...operator can select the sample stream and also issue calibration commands from the analyzer front panel The corresponding sample valve will be opened in the Valve Box The commands sent by analyzer to...

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