Servomex SERVOPRO Plasma, Operator'S Manual

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Plasma Gas Analyzer
11 02001001A _9
2.5 Calibration gas

The calibration gases must be clean, non-corrosive, free from oil and
condensates and compatible with the materials listed in Appendix 1
High calibration set point At least 90% FSD N
2
in Ar or He
Low calibration set point 6N Grade Ar or He
2.6 Performance
Detector type:
Plasma Emission Detector (PED). Material:
Quartz, single element, vacuum tight to 69 kPa (10
Psig)
Ranges:
Display Resolution:
Choice of one of the following -

0-1/0-10/0-100 ppm

0-10/0-50/0-100 ppm

0-10/0-50/0-250 ppm (3)

0-10/0-100/0-1000ppm (3)
0-1 ppm range: 10 ppb
0-10 ppm range: 0.1 ppm
0-50ppm range: 0.5 ppm
0-100, 250, 500, 1000 ppm ranges: 1ppm
Auto-zero, auto-span calibration system: (optional)
Serial port: RS-232 (optional)
Digital output: 3 range indication, 1 system status
0-1/ 0-10 /0-100
ppm 0-10 /0-50/ 0-100
ppm 0-10/ 0-50/ 0-250
ppm
(3)
0-10/ 0-100/
0-1000 ppm
(3)
Accuracy
(1)

±1% Range
(2)

±1% Range
(2)

± 5% Range
(2)

± 5% Range
(2)
Drift over 24
hours

±1% Range
(2)

±1% Range
(2)

± 1% Range
(2)

±1% Range
(2)
Noise
(1)

± 1% Range
(2)

± 1% Range
(2)

± 5% Range
(2)

± 5% Range
(2)
Zero temp
coefficient

± 0.25 ppm/10°C

± 0.25 ppm/10°C

± 0.63 ppm /10°C

± 2.5 ppm/10 °C
(1) The accuracy may be decreased by an additional 6% maximum range at some frequencies under the influence of
radiated RF fields specified for industrial environments.
(2) Calibrated Range
(3) N2 in Ar only