2/2
A 10
Dry pump operational principle
G 03877 - Edition 04 - July 12
Tightness with
environment
The pump is fitted with ball bearings lubricated with fluorinated
grease.
An overpressure zone is created around the bearing by injecting a
neutral gas. The pressurization and the seals prevent pumped gases
from migrating towards the bearings.
Neutral gas purging for the bearings is imperative for
corrosive processes.
The bearings are lubricated by oil splashing.
The oil sump is sealed from stage HP
5
by a trap and a deflector.
The vacuum tightness is ensured by the motor design.
This system provides total safety regarding leaks outside the pump
and requires no maintenance.
The pump is fitted with an antisuckback valve in the exhaust tube,
that prevents the exhaust gases being sucked back (specific versions
are delivered without antisuckback valve, refer to ordering guide).
Tightness at low
pressure side
Tightness at motor side
(shaft passage)
Tightness at high
pressure side
Tightness at shutdown
The pump in
a pumping
installation
Process
chamber
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
High
pumping
A3H pump
HIGH
V
A
CUUM
ROUGH
V
A
CUUM
A
T
MOSPHERE
adixen Vacuum Products - A3H Series Operating instructions
