G 03878 - Edition 04 - August 12
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A3H Series dry pump range
A3H series is a range of dry pumps dedicated to the harshest
applications of the semi-conductor industry.
The range includes 4 compact pumping systems, integrated into
covered frame including FB203 roughing pump, roots blower
(except for A203H model) and monitoring :
A203H
A803H
A1503H
A1803H
.
Main key features of A3H range are robustness, high inlet flows
capability, and optimized thermal management.
Thermal management models : three versions are available.
STD
version:
ST
an
D
ard version for most of the applications (all
models).
EHT
version:
E
xtended
H
igh
T
emperature (A1503H and A1803H).
This configuration is recommended for all applications requiring the
pump and gas temperature to be as high as possible to avoid any
by-product condensation inside the pump.
Please contact the manufacturer for process recommendations.
ELT
version:
E
xtended
L
ow
T
emperature (A803H, A1503H and
A1803H)
This configuration is recommended for all applications requiring the
pump and gas temperature to be as low as possible to avoid any by-
product deposition inside the pump.
Please contact the manufacturer for process recommendations.
Pumps
STD
EHT
ELT
A203H
yes
no
no
A803H
yes
no
yes
A1503H
yes
yes
yes
A1803H
yes
yes
yes
Model’s description
A803H
adixen Vacuum Products - A3H Series Operating instructions
