G 03877 - Edition 04 - July 12
1/2
A 10
Dry pump operational principle
Designed to
minimize potentiel
residues
The equipment is designed to minimize potential residue deposits:
by limiting the internal volumes that contain gas,
by injecting N2 purge on each pump stage to dilute the process
gas,
by regulating the pump temperature and adjusting it to each
process in order to limit gas condensation.
Multi-stage Roots
principle
The Dry pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
The three stages on the low pressure side are called “LP stages” and
the two stages on the high pressure side are called “HP stages”.
LP 1
LP 2
LP 3
HP 4
HP 5
Inlet
Exhaust tube
Water
adixen Vacuum Products - A3H Series Operating instructions
