79
8.89mm
.350in
13.34mm
.525in
26.67mm
1.050in
3.81mm
.150in
.125in
3.18mm
.925in
23.50mm
2.225in
56.52mm
2X 8-32 UNC .350in 8.89mm
.350in
8.89mm
13.34mm
.525in
1/8 NPT
Both Sides
DATE
1/5/2016
1
REV.
MCS-20SLPM-D-MSPEC
116mm
4.567in
91.12mm
3.588in
3.18mm
.125in
23.50mm
56.52mm
2.225in
.925in
.150in
3.81mm
2X 8-32 UNC .175in[4.45mm]
8.53mm
(10-32 UNF)
M5X0.8
Both Sdes
.336in
.525in
13.34mm
8.53mm
.336in
.525in
13.34mm
1.050in
26.67mm
3.338in
84.77mm
4.397in
111.68mm
DATE
REV.
1
MCS-50SCCM-D-MSPEC
1/8/2016
MCS-Series:
0 – 0.5 sccm
0 – 1 sccm
0 – 2 sccm
0 – 5 sccm
0 – 10 sccm
0 – 20 sccm
0 – 50 sccm
MCS-Series:
0 – 100 sccm
0 – 200 sccm
0 – 500 sccm
0 – 1 slpm
0 – 2 slpm
0 – 5 slpm
0 – 10 slpm
0 – 20 slpm
0.5 sccm to 50 sccm approximate shipping weight: 1.1 lb.
100 sccm to 20 slpm approximate weight: 1.2 lb