67
Technical Data for Whisper Low Pressure Drop Mass Flow Controllers
0 to 0.5 sccm Full Scale through 0 to 500 slpm Full Scale
Performance
Whisper MCW & MCRW Mass Flow Controller
Accuracy at calibration
conditions after tare
± (0.8% of R 0.2% of Full Scale)
High Accuracy at calibration
conditions after tare
± (0.4% of R 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Repeatability
± 0.2% Full Scale
Zero Shift and Span Shift
0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio
0.5% to 100% Full Scale / 200:1 Turndown
Maximum Controllable Flow Rate
102.4% Full Scale
Typical Response Time
100 ms (Adjustable)
Warm-up Time
< 1 Second
Standard Specifications (Contact Alicat for available options.)
Communications / Power
Whisper MCW & MCRW Mass Flow Controller
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Input/Output Signal
1
Options
RS-232 Serial / RS-485 Serial / Modbus / PROFIBUS
3
Analog Input/Output Signal
2
Options
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog
Input/Output Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options
8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage
MCW:
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
MCRW:
24 to 30 Vdc
Supply Current
MCW
: 0.250 Amp
MCRW:
0.750 Amp
1. The
Digital Output Signal
communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The
Analog Output Signal
and
Optional Secondary Analog Output Signal
communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. See PROFIBUS specifications for supply voltages and
currents
(
www.alicat.com/profibus
). PROFIBUS units do not have the display.
Operating Conditions
Whisper MCW & MCRW Mass Flow Controller
Mass Reference Conditions (STP)
25ºC & 14.696 psia (standard — others available on request)
Operating Temperature
−10 to +50 ºCelsius
Humidity Range (Non–Condensing)
0 to 100%
Max. Internal Pressure (Static)
45 psig Higher line pressures available, please contact Alicat.
Proof Pressure
175 psig
Mounting Attitude Sensitivity
MCW:
None
MCRW:
Mount with valve cylinder vertical & upright
Valve Type
Normally Closed
Ingress Protection
IP40
Wetted Materials
MCW:
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 430FR Stainless Steel, Silicon, Glass.
MCRW:
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, 416 Stainless Steel, Nickel, Silicon, Glass.
If your application demands a different material, please contact Alicat.
Range Specific Specifications
Full Scale Flow Mass
Controller
Pressure Drop at FS Flow
(psid) venting to atmosphere
Mechanical
Dimensions
Process Connections
1
MCW
0.5 sccm to 2 sccm
0.06
3.9”H x 3.4”W x 1.1”D
M-5 (10-32) Female
Thread
2
MCW
5 sccm to 10 sccm
0.08
MCW
20 sccm
0.07
MCW
50 sccm to 200 sccm
0.07
4.1”H x 3.6”W x 1.1”D
1/8” NPT Female
MCW
500 sccm
0.08
MCW
1 slpm
0.10
MCW
2 slpm
0.18
MCRW
5 slpm
0.10
5.5”H x 7.7”W x 2.3”D
1/4” NPT Female
MCRW
10 slpm
0.12
MCRW
20 slpm
0.26
MCRW
40 slpm
0.14
5.5”H x 7.7”W x 2.3”D
1/2” NPT Female
MCRW
50 slpm
0.17
5.5”H x 7.3”W x 2.3”D
3/4” NPT Female
MCRW
100 slpm
0.30
MCRW
250 slpm
0.69
MCRW
500 slpm
0.69
5.5”H x 8.1”W x 2.7”D
3/4” NPT Female
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and
SAE connections upon request.
2. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.