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Alicat Scientific MC Series, Installation & Maintenance Instructions Manual

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77

MCD-Series

0 - 20 slpm shown

MCRD-Series

0 - 2000 slpm shown

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Summary of Contents for MC Series

Page 1: ...Supplied by Call us on 44 0 118 916 9420 Email info 247able com com Installation Maintenance Instructions ALICAT SCIENTIFIC MC Series Laminar Mass Flow Controller ...

Page 2: ...Precision Gas Mass Flow Controllers The Fastest Flow Controller Company in the World Operating Manual MC Series MCS Series MCR Series WHISPER MCV Series ...

Page 3: ...ration see page 53 ACCESSORIES Now that you have your Alicat instrument are you sure you ve got everything you need Alicat accessories can make your job easier Many of our customers also order Power Supplies A universal wall power supply that makes it easy to power your Alicat unit just about anywhere in the world BB9 Alicat s multi drop box that allows easy connection of up to nine Alicat instrum...

Page 4: ... use with applications that require tight shut off see pages 30 and 71 MCP Series Mass Gas Flow Controllers MCP Series Flow Controllers are built with a high performance control valve for use with certain lower pressure applications see page 73 MCD Series Dual Valve Mass Gas Flow Controllers see pages 31 and 82 Unless otherwise noted the instructions in this manual are applicable to all of the abo...

Page 5: ...nformation for Alicat TFT Color Display Instruments 13 DISPLAYS AND MENUS 14 MAIN 15 Gas Absolute Pressure 15 Gas Temperature 15 Set Pt 15 Volumetric Flow Rate 15 Mass Flow Rate 16 Flashing Error Message 16 SELECT MENU 17 CONTROL SETUP 18 Set Point Source 18 Loop Variable 19 On Off Auto tare 19 PID Tuning 20 GAS SELECT 22 Composer 23 COMMUNICATION SELECT 25 Unit ID 25 Baud 25 MISCELLANEOUS 26 MISC...

Page 6: ...ies Densities and Compressibilities 41 Supported Units List 49 Troubleshooting 51 Maintenance and Recalibration 53 Option Totalizing Mode 54 Option Remote Electronics 56 Option Remote Panel Display 56 Accessory BB9 Multi Drop Box 57 Accessory Flow Vision SC 58 Accessory Flow Vision MX 58 Accessories 59 MC and MCR Technical Specifications 61 WHISPER Technical Specifications 67 MCV MCVS Technical Sp...

Page 7: ...ontrollers MC Series can usually be mounted in any position Large valve controllers MCR Series should be mounted so that the valve cylinder is vertical and upright Mounting a large valve controller in another position increases the risk of leakage when the controller is being held closed by the spring force No straight runs of pipe are required upstream or downstream of the controller Inlet Connec...

Page 8: ...ds can cause permanent damage to the controller should they get into the flow stream When changing fittings carefully clean any tape or debris from the port threads We recommend the use of in line sintered filters to prevent large particulates from entering the measurement head of the instrument Suggested maximum particulate sizes are as follows 5 microns for units with FS flow ranges of 0 1 sccm ...

Page 9: ...5Vdc 10Vdc or Basic Alarm Brown 3 Serial RS 232RX RS 485 Input Signal receive Red 4 Meters Gauges Remote Tare Ground to Tare Controllers Analog Set Point Input Orange 5 Serial RS 232TX RS 485 Output Signal send Yellow 6 0 5 Vdc or optional 0 10 Vdc Output Signal Green 7 Power In as described above Blue 8 Ground common for power communications and analog signals Purple Note The above pin out is app...

Page 10: ...providing set point to controllers Optional 0 10 Vdc If specified at time of order a 0 10 Vdc input signal can be applied to pin 4 with common ground on pin 8 Optional 4 20 mA If specified at time of order a 4 20 mA input signal can be applied to pin 4 with common ground on pin 8 NOTE This is a current sinking device The receiving circuit is essentially a 250 ohm resistor to ground NOTE 4 20mA out...

Page 11: ...ils on accessing RS 232 RS 485 input DB9 to Mini DIN Connection for RS 232 RS 485 Signals Electrical Connections and Basic Wiring http www alicat com support instructional videos 9 8 7 6 9 8 7 6 1 5 3 2 4 1 5 3 2 4 Serial Cable End PC Serial Port 1 8 7 6 5 4 3 2 8 Pin MiniDIN Cable End 8 Pin MiniDIN Connector 9 Pin Serial Connection 8 Pin MiniDIN Connection Pin Function Function Pin 5 Ground Groun...

Page 12: ...ange Ground for this signal is common on Pin 8 Optional Current 4 20 mA Output Signal If your controller was ordered with a 4 20 mA current output signal it will be available on Pin 1 See the Calibration Data Sheet that shipped with your controller to determine which output signals were ordered The current signal is 4 mA at 0 flow and 20 mA at the controller s full scale flow The output current is...

Page 13: ...connect this device to loop powered systems as this will destroy portions of the circuitry and void the warranty If you must interface with existing loop powered systems always use a signal isolator and a separate power supply 5 3 2 Purple Red Yellow Purple Red Yellow 5 4 3 2 1 9 8 7 6 Unit C Unit B Unit A Female Serial Cable Front Purple Ground Red Yellow ...

Page 14: ...lection arrow on the monochrome display LCD Contrast LCD contrast is ranged from 0 to 11 on color displays with 11 being the greatest contrast Display On Off Pushing the button under the Alicat name will turn the device display on or off This feature is not available on monochrome displays Technical Data for TFT Color Display Meters Gauges and Controllers The following specifications are applicabl...

Page 15: ...t Menu display If your controller was ordered with the Totalizer option page 54 pushing the TOTAL button once will bring up the Totalizing Mode display Pushing MENU will bring up the Select Menu display DISPLAYS AND MENUS ThedevicescreendefaultstoMaindisplayassoonaspowerisappliedtothecontroller Note See page 28 to rotate the display 180 Select Menu From Select Menu you can change the selected gas ...

Page 16: ...emperature scale To select a temperature scale use the UP and DOWN buttons to position the arrow in front of the desired scale Press SET to record your selection and return to the MAIN display The selected temperature scale will be displayed on the screen Set Point The set point SETPT is shown in the upper right of the display For information on changing the set point see SETPT SOURCE page 18 Volu...

Page 17: ...umetric or mass flow rate the gas being measured must be selected See Gas Select page 21 MENU Pressing MENU switches the screen to the Select Menu display Flashing Error Message An error message MOV mass overrange VOV volumetric overrange POV pressure overrange TOV temperature overrange flashes when a measured parameter exceeds the range of the sensor When any item flashes neither the flashing par...

Page 18: ...urer Data An explanation for each screen can be found on the following pages C 21 50 0 00 CCM MAIN SETPT 0 000 SCCM Air PSIA 13 60 0 00 SCCM Gas Select MODEL INFO BACK MAIN ALICAT SCIENTIFIC Ph 520 290 6060 Fax 520 290 0109 LOOP VAR ON AUTO TARE PID MAIN SETPT SOURCE MISC2 BACK DEVICE UNITS MAIN MISC1 DOWN CANCEL SELECT PAGE Recent Standard Factory Custom COMPOSER User Mixes Bioreactor Breathing C...

Page 19: ...l Front Panel refers to a set point applied directly at the controller Front Panel input must be selected prior to changing the set point at the device Analog refers to a remote analog set point applied to Pin 4 of the Mini DIN connector as described in the installation section of this manual The standard analog input is 0 5 Vdc To determine what type of analog set point your controller has refer ...

Page 20: ...ow rate The change from mass to volume can usually be accomplished without much if any change in the P and D settings When you change from controlling flow to controlling pressure sometimes fairly radical changes must be made to the P D variables See page 20 PID TUNING Contact Alicat if you are having difficulties with this procedure ON AUTO TARE OFF AUTO TARE refers to the standard auto tare or a...

Page 21: ...wing page for descriptions of the PID Loop Types PID Control Algorithms P refers to the Proportional term of the PID loop I refers to the Integral term of the PID loop D refers to the Differential term of the PID loop Press P I or D Then use SELECT to choose the digit with the arrow and the UP and DOWN buttons to change the value Press SET to record your value Press CLEAR to return to zero Before ...

Page 22: ...upon the square of the rate of change of the process value 2 The damping function is applied directly to the proportional error term before that term is used in the proportional and integral functions of the algorithm This provides a certain amount of look ahead capability in the control loop Because of these differences you will note the following 1 Increasing P gain can be used to damp out overs...

Page 23: ...46 Laser page 46 O2 Concentrator page 47 Pure Corrosive page 41 Pure Non Corrosive page 40 Refrigerant page 42 Stack page 47 Welding page 43 Press PAGE to view a new page in the gas category list Press SELECT to view the gases in the selected category Align the arrow with the desired gas Press SET to record your selection and return to the MAIN display The selected gas will be displayed on the scr...

Page 24: ...HANGE CASE is pushed again Press SET to save the name After naming the mix press ADD GAS and select the gas category and the component gas Select the digit with arrow and adjust the with the UP and DOWN buttons Press set to save Add up to 4 more gases as needed The total must equal 100 or an error message will appear GAS OPTNS allows you to adjust the percentage of the constituents or delete a gas...

Page 25: ...LECT MIXTURE to bring the custom mix onto the MAIN display MAIN SELECT MIXTURE CREATE SIMILAR COMPOSER USER MIX MyGas HAS BEEN SAVED CREATE NEW DOWN BACK CANCEL CLEAR SET SELECT DIGIT Percent of Air 50 00 UP DOWN BACK CANCEL CLEAR SET SELECT DIGIT Percent of Ar Argon 30 00 UP DOWN BACK CANCEL CLEAR SET SELECT DIGIT Percent of He Helium 20 00 UP ADD GAS CANCEL SAVE GAS OPTNS COMPOSER Mix MyGAS 50 A...

Page 26: ...e effect when Communication Select is exited If the symbol is selected as the Unit ID the device will enter streaming mode when Communication Select is exited See RS 232 Communications page 33 for information about the streaming mode Baud Both this instrument and your computer must send receive data at the same baud rate The default baud rate for this device is 19200 baud PressBAUD Use the UP and ...

Page 27: ...ressure and flow averaging can be adjusted between 1 no averaging and 256 maximum averaging These are geometric running averages where the number between 1 and 256 can be considered roughly equivalent to the response time constant in milliseconds This can be effective at smoothing high frequency process oscillations such as those caused by diaphragm pumps PressPRESSAVG ThenuseSELECTtochoosethedigi...

Page 28: ... the NTP TEMP and NTP PRESS screens Once a selection has been made and recorded usingtheSETbutton achangeacknowledgement message will be displayed on screen Selecting MAIN will revert screen to the Main display If the SET selection is already the currently stored value a message indicating that fact will appear STP PRESS enables you to select from a menu pressure settings Use the UP DOWN or PAGE b...

Page 29: ... together BACK MAIN SCROLL R8 AP Sig 7871 R9 Temp Sig 39071 R10 DP Side 9986 R11 DP Brdg 36673 R13 AP Brdg 36673 R16 Meter Func 199 R18 Power Up 32768 DEVICE UNITS Press DEVICE UNITS to access menus of units of measure for each parameter and totalizer if so equipped Scroll to the desired unit and press select Once selected you will see the message shown below Verify that all connected devices expe...

Page 30: ...MODEL INFO to show important information about your flow device including the model number serial number and date of manufacture Press BACK to return to the MFG DATA display Push MAIN to return to the Main display MODEL INFO BACK MAIN ALICAT SCIENTIFIC Ph 520 290 6060 Fax 520 290 0109 BACK MAIN MODEL MC 100SCCM D SERIAL NO 100903 DATE MFG 10 7 2014 DATE CAL 10 9 2014 CAL BY DL SW REV 5v00 G ...

Page 31: ...r actuating the shutoff valve incorporates a three way solenoid valve below Air pressure is applied to one side of the solenoid valve while the other side of the solenoid is left open to atmosphere When the solenoid is energized air pressure is delivered to the shutoff valve allowing it to open When the solenoid is returned to a relaxed state air pressure is removed from the shutoff valve allowing...

Page 32: ...source or to vacuum Control absolute pressure or back pressure in a flowing process Control absolute pressure in a closed volume with automatic venting Application examples are shown below and on the following page Please contact Alicat if you have any questions regarding MCD use FLOW Process Gas Source Mass Flow or Volumetric Flow Control MCD top view Process Connection Inlet Valve Outlet Valve M...

Page 33: ... Gas Source Vacuum Source Flowing Absolute Pressure Control Back Pressure Control Positive Pressure Control FLOW Process Gas Source Vacuum Source Bidirectional Mass Flow or Volumetric Flow Control FLOW FLOW Closed Process Gas Source Atmosphere or Vacuum Dead Ended Absolute Pressure Control FLOW ...

Page 34: ...screen If data still does not appear check all the connections and COM port assignments Streaming Mode Advanced The streaming data rate is controlled by register 91 The recommended default rate of data provision is once every 50 milliseconds and this is suitable for most purposes If a slower or faster streaming data rate is desired register 91 can be changed to a value from 1 millisecond to 65535 ...

Page 35: ...he RS 232 RS 485 line as all of the addresses will be reassigned Instead each should be individually attached to the RS 232 RS 485 line given an address and taken off After each unit has been given a unique address they can all be put back on the same line and polled individually Sending a Set point via RS 232 RS 485 To send a set point via RS 232 RS 485 Serial must be selected under the Input lis...

Page 36: ...nd by reading the current value for register 22 between 0 65535 It is good practice to write this value down so you can return to the factory settings if necessary Enter the value you wish to try by writing the new value to register 22 For example if you wished to try a D term of 25 you would type W22 25 followed by Enter where the bold number denotes the new value The computer will respond to the...

Page 37: ...CO 4 Carbon Dioxide CO2 5 Ethane C2H6 6 Hydrogen H2 7 Helium He 8 Nitrogen N2 9 Nitrous Oxide N2O 10 Neon Ne 11 Oxygen O2 12 Propane C3H8 13 normal Butane n C4H10 14 Acetylene C2H2 15 Ethylene C2H4 16 iso Butane i C4H10 17 Krypton Kr 18 Xenon Xe 19 Sulfur Hexafluoride SF6 20 75 Argon 25 CO2 C 25 21 90 Argon 10 CO2 C 10 22 92 Argon 8 CO2 C 8 23 98 Argon 2 CO2 C 2 24 75 CO2 25 Argon C 75 25 75 Argon...

Page 38: ...cat gas numbers between 236 and 255 You can assign any number in this range to your new mixture If another mixture with the same number exists it will be overwritten even if that gas is currently selected on the unit If you enter a 0 here the new mix will be assigned the next available number between 236 and 255 Percent 1 The percentage of the first constituent gas The percentage of each constitue...

Page 39: ...ke sure the column data format is set to General and click Finish This separates the data into columns for manipulation and removes symbols such as the plus signs from the numbers Once the data is in this format it can be graphed or manipulated as desired For extended term data capture see page 39 Data Format The data stream on the screen represents the flow parameters of the main mode in the unit...

Page 40: ...many as you like The time between each line will be set in HyperTerminal 4 When you have as many lines as you wish go to the File menu and select save In the save dialog box enter a path and file name as desired and in the Save as Type box select the plain text txt option It is important that it be saved as a generic text file for HyperTerminal to work with it 5 Click Save 6 A file conversion box ...

Page 41: ...ar streamline flow is established for the entire range of operation of the device Unlike other flow measuring devices in laminar flow meters the relationship between pressure drop and flow is linear Please visit the Alicat web site for a detailed explanation this principle http www alicat com technical information theory of operation STANDARD GAS DATA TABLES Those of you who have older Alicat prod...

Page 42: ... 1 0005 6 H2 Hydrogen 89 15355 0 08235 1 0005940 83 969 0 0899 1 0006 17 Kr Krypton 251 32490 3 43229 0 9979266 232 193 3 7490 0 9972 2 CH4 Methane 110 75950 0 65688 0 9982472 102 550 0 7175 0 9976 10 Ne Neon 311 12640 0 82442 1 0004810 293 822 0 8999 1 0005 8 N2 Nitrogen 178 04740 1 14525 0 9998016 166 287 1 2504 0 9995 9 N2O Nitrous Oxide 148 41240 1 80888 0 9945327 136 310 1 9779 0 9928 11 O2 O...

Page 43: ...7202 0 985328 33 Cl2 Chlorine 134 56600 2 93506 0 9874470 125 464 3 1635 0 98407 85 CH3OCH3 Dimethylether 90 99451 1 91822 0 9816453 82 865 2 1090 0 9745473 34 H2S Hydrogen Sulfide H2S 123 86890 1 40376 0 9923556 112 982 1 5361 0 9898858 31 NF3 NF3 Nitrogen Trifluoride 175 42500 2 91339 0 9963859 162 426 3 1840 0 9951506 30 NO NO Nitric Oxide 190 05950 1 22672 0 9997970 176 754 1 3394 0 9995317 36...

Page 44: ...ethane 104 20190 4 21632 0 9742264 95 092 4 6509 0 9640371 108 R 143a Trifluoroethane 110 86600 3 49451 0 9830011 101 344 3 8394 0 9765755 109 R 152a Difluoroethane 100 81320 2 75903 0 9785245 91 952 3 0377 0 9701025 110 R 22 Difluoromonochloromethane 126 30390 3 58679 0 9853641 115 325 3 9360 0 9801128 111 R 23 Trifluoromethane 149 13160 2 88404 0 9922734 136 997 3 1568 0 9895204 112 R 32 Difluor...

Page 45: ... 0 9988210 195 198 1 8215 0 9983605 20 C 25 25 CO2 75 Ar 206 97630 1 67658 0 9986652 191 436 1 8309 0 9981609 142 C 50 50 CO2 50 Ar 187 53160 1 71972 0 9977484 172 843 1 8786 0 9969777 24 C 75 75 CO2 25 Ar 168 22500 1 76344 0 9965484 154 670 1 9271 0 995401 25 He 25 25 He 75 Ar 231 60563 1 26598 0 9996422 216 008 1 3814 0 9999341 143 He 50 50 He 50 Ar 236 15149 0 89829 0 9999188 220 464 0 9800 1 0...

Page 46: ...52 Bio 40M 40 CH4 60 CO2 140 33250 1 34664 0 9962716 128 834 1 4710 0 9955239 153 Bio 45M 45 CH4 55 CO2 138 78134 1 28905 0 9964362 127 478 1 4080 0 9957564 154 Bio 50M 50 CH4 50 CO2 137 10815 1 23149 0 9966009 126 025 1 3450 0 9959779 155 Bio 55M 55 CH4 45 CO2 135 30261 1 17394 0 9967655 124 462 1 2821 0 9961886 156 Bio 60M 60 CH4 40 CO2 133 35338 1 11642 0 9969301 122 779 1 2193 0 9963885 157 Bi...

Page 47: ...e 219 24536 0 50683 1 0001363 205 140 0 5530 1 000565 170 HeOx 40 40 O2 60 He 218 59913 0 62132 1 0000244 204 307 0 6779 1 000502 171 HeOx 50 50 O2 50 He 216 95310 0 73583 0 9999125 202 592 0 8028 1 000401 172 HeOx 60 60 O2 40 He 214 82626 0 85037 0 9998006 200 467 0 9278 1 000257 173 HeOx 80 80 O2 20 He 210 11726 1 07952 0 9995768 195 872 1 1781 0 9998019 174 HeOx 99 99 O2 1 He 205 72469 1 29731 ...

Page 48: ...CO 20 CO2 11 CH4 155 64744 0 79774 0 9989315 144 565 0 8704 0 9992763 186 Syn Gas 2 64 H2 28 CO 1 CO2 7 CH4 151 98915 0 43715 1 0001064 142 249 0 4771 1 000263 187 Syn Gas 3 70 H2 4 CO 25 CO2 1 CH4 147 33686 0 56024 0 9991225 136 493 0 6111 0 9997559 188 Syn Gas 4 83 H2 14 CO 3 CH4 133 63682 0 24825 1 0003901 125 388 0 2709 1 000509 189 Nat Gas 1 93 CH4 3 C2H6 1 C3H8 2 N2 1 CO2 111 77027 0 70709 0...

Page 49: ...O2 85 7 N2 1 Ar 175 22575 1 22550 0 9992625 165 222 1 3379 0 9990842 201 FG 2 2 9 O2 14 CO2 82 1 N2 1 Ar 174 18002 1 24729 0 9991056 164 501 1 3617 0 9989417 202 FG 3 3 7 O2 15 CO2 80 3 N2 1 Ar 174 02840 1 25520 0 9990536 164 426 1 3703 0 9988933 203 FG 4 7 O2 12 CO2 80 N2 1 Ar 175 95200 1 24078 0 9991842 166 012 1 3546 0 9990116 204 FG 5 10 O2 9 5 CO2 79 5 N2 1 Ar 177 65729 1 22918 0 9992919 167 ...

Page 50: ...of water at 60 C inH2OA inH2OG inH2OD inch of water at 4 C NIST conventional inH2OA inH2OG inH2OD inch of water at 60 C atm atmosphere m asl meter above sea level only in ALT builds ft asl foot above sea level only in ALT builds V volt no conversions are performed to or from other units count count count setpoint count 0 64000 percent of full scale Flow Units Volumetric Standard Normal Notes uL m ...

Page 51: ...US gallon cm3 Scm3 Ncm3 cubic centimeter m3 Sm3 Nm3 cubic meter in3 Sin3 cubic inch ft3 Sft3 cubic foot kSft3 1000 cubic feet uP micropoise a measure of viscosity no conversions are performed to or from other units Total Mass Units Label Notes mg milligram g gram kg kilogram oz ounce lb pound These can be used for totalized mass on gas devices These can also be used for totalized volume on liquid ...

Page 52: ...fter installation there is no flow Alicat MC controllers incorporate normally closed valves and require a set point to operate Check that your set point signal is present and supplied to the correct pin and that the correct set point source is selected under the SETPT SOURCE list in the control set up display Also check that the unit is properly grounded The flow lags below the set point Be sure t...

Page 53: ... is not responding Check that your meter is powered and connected properly Be sure that the port on the computer to which the meter is connected is active Confirm that the port settings are correct per the RS 232 instructions in this manual Check the RS 232 RS 485 communications select screen for current meter readings Close Hyperterminal and reopen it Reboot your PC See pages 10 11 and 31 for mor...

Page 54: ...r units with FS flow ranges of 0 1 slpm or more Recalibration The recommended period for recalibration is once every year A label located on the back of the controller lists the most recent calibration date The controller should be returned to the factory for recalibration within one year from the listed date Before calling to schedule a recalibration please note the serial number on the back of t...

Page 55: ...nge of 1 100ths of a liter is specified on a meter which is totalizing in liters the maximum count would be 99999 99 liters If the same unit were specified with a 1 liter range the maximum count would be 9999999 liters ELAPSED TIME The small numbers below the mass total show the elapsed time since the last reset in hours minutes and seconds The maximum measurable elapsed time is 9999 hours 59 minu...

Page 56: ...e same size simply press RESET The Totalizer can reproduce any number of fixed Batches in this manner To start a smaller batch decrease the Batch value The new batch begins when you press RESET To continue the existing batch to a larger total volume increase the Batch value Flow resumes as soon as you press OK in the Batch Value screen To start a larger batch from scratch first clear the flow Set ...

Page 57: ...der 100 Celsius In these applications we recommend our custom gauge calibration at a gas temperature of up to 70 Celsius This will reduce zero shift errors that occur when actual gas flow temperatures deviate substantially from the gas calibration temperature This configuration is also used in integrations that require a compact flow package at the installation point Option Remote Panel Display Ou...

Page 58: ...e devices are powered via a terminal block on the front of the box If more than nine devices will be required additional Multi Drop Boxes can be daisy chained together with a double ended 8 pin Mini DIN cable plugged into any receptacle on both boxes BB9 Power Supply for Large Valve Controllers The PS24VHC Power Supply 24Vdc High Current is a 6 5Amp 24Vdc power supply designed for running multiple...

Page 59: ...ant with color coding zooming and printing functionality Alarms Create software alarms that will notify you of given parameter conditions Data Capture Logging Capture and log data to either a csv file or a txt file Improved Data Logging and Data Log File Splitting for easy to manage data Accessory Flow Vision MX Software Alicat s New Flow Vision MX software gives you an easy way to do GAS BLENDING...

Page 60: ...t length DC 251 8 Pin Male Mini DIN connector cable single ended 25 foot length DC 501 8 Pin Male Mini DIN connector cable single ended 50 foot length DC 751 8 Pin Male Mini DIN connector cable single ended 75 foot length DC 1001 8 Pin Male Mini DIN connector cable single ended 100 foot length DC 32RS 8 pin Male Mini DIN connector cable double ended no analog 3 foot length DC 62RS 8 pin Male Mini ...

Page 61: ... 1 2 3 8 SS 600 1 8 1 2 1 2 SS 810 1 8 1 2 3 4 SS 1210 1 8 1 2 6mm SS 6M0 1 8 1 2 8mm SS 8M0 1 8 1 2 12mm SS 12M0 1 8 1 2 16mm SS 16M0 1 8 3 4 1 4 SS 400 1 12 3 4 1 2 SS 810 1 12 3 4 3 4 SS 1210 1 12 3 4 12mm SS 12M0 1 12 3 4 16mm SS 16M0 1 12 Filters Elements FNPT MNPT 10 32 5μ 510053 10 32 20μ 510054 1 8 20μ ILF 1 8 20 1 4 40μ ILF 1 4 40 1 2 40μ ILF 1 2 40 3 4 40μ ILF 3 4 40 20μ element ILFE20 4...

Page 62: ...he display Operating Conditions MC MCR Mass Flow Controller Mass Reference Conditions STP 25ºC 14 696 psia standard others available on request Operating Temperature 10 to 50 ºCelsius Humidity Range Non Condensing 0 to 100 Max Internal Pressure Static 145 psig Proof Pressure 175 psig Mounting Attitude Sensitivity MC None MCR Mount with valve cylinder vertical upright Valve Type Normally Closed Ing...

Page 63: ...sccm 0 5 sccm to 50 sccm approximate shipping weight 1 1 lb 0 MC 0 5SCCM D DS MSPEC 1 30 2016 DATE REV 98 98mm 3 897in 84 77mm 3 338in 26 67mm 1 050in 13 34mm 525in 8 53mm 336in M5X0 8 10 32 UNF Both Sides 4 93mm 194in 13 34mm 525in 23 50mm 925in 8 32 UNC 175in 4 45mm 3 81mm 150in 2 225in 56 52mm 3 18mm 125in MC Series Downstream Valve 0 0 5 sccm 0 1 sccm 0 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm 0 50...

Page 64: ...5in 28 58mm Both Sides 1 4 NPT 57 15mm 2 250in 1 600in 40 64mm DATE 1 MC 20SLPM D MSPEC 1 5 2016 REV 3 738in 94 95mm 4 067in 103 30mm 525in 13 34mm 350in 8 89mm 1 050in 26 67mm 1 8 Both Sides 8 89mm NPT 350in 13 34mm 525in 125in 23 50mm 56 52mm 2 225in 3 18mm 150in 3 81mm 925in 2X 8 32 UNC 350in 8 89mm MC Series 0 100 sccm 0 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 3 slpm 0 5 slpm 0 10 slpm 0 20 sl...

Page 65: ...mm 36 20mm 1 425in MCR Series 0 250 slpm MCR 250 slpm approximate weight 9 0 lb 800in 20 32mm 800in 20 32mm 40 64mm 1 600in 57 15mm 2 250in 184 79mm 7 2750in DATE MCR 500SLPM D MSPEC 1 12 09 2015 REV 28 58mm 1 125in 1 120in 28 45mm Both Sides 3 4 NPT 375in 2 700in 4X 8 32 UNC 375in 9 53mm 82 550mm 3 250in 750in 68 58mm 19 050mm 4 45mm 175in 36 20mm 1 425in 47 63mm 1 875in 9 53mm 5 08mm 200in 328in...

Page 66: ...PM D MSPEC REV 139 56mm 5 495in 226 06mm 8 900in MCR Series 0 2000 slpm MCR 2000 slpm approximate weight 12 0 lb 5 495in 139 56mm 8 100in 205 74mm 2 900in 73 66mm 2 250in 57 15mm X 8 32 UNC 4 330in 8 38mm 107 95mm 4 250in 68 58mm 2 700in 200in 5 08mm 9 53mm 6 750in 375in 171 45mm 5 08mm 68 58mm 2 700in 200in 1 875in 47 63mm 4X 8 32 UNC 328in 8 33mm 28 45mm 1 120in 1 125in 28 58mm DATE MCR 2000SLPM...

Page 67: ...66 MCRH 5000 slpm approximate weight 28 0 lb MCRH Series 0 5000 slpm ...

Page 68: ...nal is available See PROFIBUS specifications for supply voltages and currents www alicat com profibus PROFIBUS units do not have the display Operating Conditions Whisper MCW MCRW Mass Flow Controller Mass Reference Conditions STP 25ºC 14 696 psia standard others available on request Operating Temperature 10 to 50 ºCelsius Humidity Range Non Condensing 0 to 100 Max Internal Pressure Static 45 psig ...

Page 69: ...8 8 53mm 336in 525in 13 34mm 3 897in 98 98mm 3 338in 84 77mm DATE 1 MCW 20SCCM D MSPEC 12 10 2015 REV 1 050in 26 67mm 8 53mm 336in 525in 13 34mm 56 52mm 2 225in 150in 3 81mm 3 18mm 125in 925in 23 50mm 2X 8 32 UNC 175in 4 45mm WHISPER MCW 0 0 5 sccm 0 1 sccm 0 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm MCW 0 5 sccm to 20 sccm approximate shipping weight 1 1 lb WHISPER MCW 0 50 sccm 0 100 sccm 0 200 sccm 0...

Page 70: ...in 139 56mm 12 10 2015 REV 1 MCRW 20SLPM D MSPEC DATE 1 600in 40 64mm 57 15mm 2 250in 194 31mm 7 650in 5 495in 139 56mm 15 75mm 620in 126 67mm 4 987in 3 250in 82 55mm 1 425in 36 20mm 4X 8 32 UNC 375in 9 53mm 2 700in 68 58mm 9 53mm 375in 47 63mm 750in 19 05mm 1 875in 175in 4 45mm 5 08mm 4X 8 32 UNC 375 200in 1 325in REF 33 66mm 800in 20 32mm 500in 12 70mm 28 45mm 1 120in 1 125in 28 58mm Both Sides ...

Page 71: ...205 74mm 28 58mm 1 125in 1 120in 28 45mm Both Sides 3 4 NPT 1 600in 40 64mm 57 15mm 2 250in 184 79mm 7 275in 800in 20 32mm 800in 20 32mm 8 13mm 320in 5 495in 139 56mm DATE MCRW 250SLPM D MSPEC 1 12 10 2015 REV 3 250in 82 55mm 375in 2 700in 4X 8 32 UNC 375in 9 53mm 750in 68 58mm 19 05mm 4 45mm 175in 36 20mm 1 425in 47 63mm 1 875in 9 53mm 5 08mm 200in 328in 8 33mm 4 8 32 UNC X 1 325in REF 33 66mm MC...

Page 72: ...otection IP40 Wetted Materials MCV 303 302 Stainless Steel Viton Heat Cured Silicone Rubber Glass Reinforced Polyphenylene Sulfide Heat Cured Epoxy Aluminum Gold Brass 430FR Stainless Steel Silicon Glass MCVS 316LSS 303SS 430FRSS FFKM Kalrez standard Viton EPDM Buna Neo prene as needed for some gases If your application demands a different material please contact Alicat Communications Power Whispe...

Page 73: ...41 73mm 1 125in 28 58mm 4X 375in 9 53mm 240in THRU 6 10mm 5 580in 141 73mm 1 125in 28 58mm 4X 375in 9 53mm 1 4 VCRM Both Sides 19 05mm 750in 628in 15 94mm 38 10mm 1 500in 4 76mm 6 330in 160 78mm 188in 4 755in 120 76mm 6 721in 170 71mm DATE MCV 0 5SCCM D MSPEC 1 1 8 2016 REV 15 94mm 628in 750in 19 05mm MCV Series All ranges MCV approximate weight 3 0 lb MCVS Series All ranges MCVS approximate weigh...

Page 74: ...15 30 Vdc for 4 20 mA outputs Supply Current 0 250 Amp 1 The Digital Output Signal communicates Mass Flow Volumetric Flow Pressure and Temperature 2 The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow Volumetric Flow Pressure or Temperature 3 If selecting PROFIBUS no analog signal is available See PROFIBUS specifications for supply voltages and...

Page 75: ...CP Series 50 slpm 100 slpm 10 slpm to 50 slpm approximate shipping weight 3 0 lb 20 32mm 800in 500in 12 70mm 9 16 18 UNF 725in 18 42mm J1926 Port Both Sides 20 32mm 800in 12 70mm 500in 1 600in 40 64mm X 750in 8 32 UNC 375in 9 53mm 19 05mm 4 4 45mm 175in 36 20mm 1 425in 82 55mm 3 250in 5 772in 146 60mm 4 367in 110 92mm 1 MCP 50SLPM D SAE MSPEC 12 9 2015 DATE REV MCP Series SAE 0 50 splm 0 100 slpm ...

Page 76: ...m 8 32 UNC 4 45mm 1 125in 28 58mm 175in 1 425in 92 08mm 3 625in 20 32mm 800in 500in 12 70mm Both Sides 1 4 NPT 800in 20 32mm 800in 20 32mm 1 600in 40 64mm 4 967in 126 16mm 158 92mm 6 257in MCP Series 250 slpm 100 slpm to 250 slpm approximate shipping weight 4 4 lb ...

Page 77: ...com profibus PROFIBUS units do not have the display Operating Conditions MCD Mass Flow Controller MCRD Mass Flow Controller Mass Reference Conditions STP 25ºC 14 696 psia standard others available on request Operating Temperature 10 to 50 ºCelsius Humidity Range Non Condensing 0 to 100 Max Internal Pressure Static 145 psig Proof Pressure 175 psig Mounting Attitude Sensitivity None Mount with valve...

Page 78: ...77 MCD Series 0 20 slpm shown MCRD Series 0 2000 slpm shown ...

Page 79: ... Air 1 Argon Ar 2 Methane CH4 3 Carbon Monoxide CO 4 Carbon Dioxide CO2 5 Ethane C2H6 6 Hydrogen H2 7 Helium He 8 Nitrogen N2 9 Nitrous Oxide N2O 10 Neon Ne 11 Oxygen O2 12 Propane C3H8 13 normal Butane n C4H10 14 Acetylene C2H2 15 Ethylene C2H4 16 iso Butane i C4H10 17 Krypton Kr 18 Xenon Xe 19 Sulfur Hexafluoride SF6 20 75 Ar 25 CO2 C 25 21 90 Ar 10 CO2 C 10 22 92 Ar 8 CO2 C 8 23 98 Ar 2 CO2 C 2...

Page 80: ...25in 150in 3 81mm 2X 8 32 UNC 175in 4 45mm 8 53mm 10 32 UNF M5X0 8 Both Sdes 336in 525in 13 34mm 8 53mm 336in 525in 13 34mm 1 050in 26 67mm 3 338in 84 77mm 4 397in 111 68mm DATE REV 1 MCS 50SCCM D MSPEC 1 8 201 MCS Series 0 0 5 sccm 0 1 sccm 0 2 sccm 0 5 sccm 0 10 sccm 0 20 sccm 0 50 sccm MCS Series 0 100 sccm 0 200 sccm 0 500 sccm 0 1 slpm 0 2 slpm 0 5 slpm 0 10 slpm 0 20 slpm 0 5 sccm to 50 sccm...

Page 81: ...2mm 800in 20 32mm 800in 1 600in 40 64mm 57 15mm 2 250in 194 31mm 7 650in 28 45mm 1 120in 1 125in 28 58mm Both Sides 1 4 NPT 800in 20 32mm 500in 12 70mm 7 275in 184 79mm 139 56mm 5 495in 15 75mm 620in 5 687in 144 45mm 175in 4 45mm 5 08mm 200in 2 700in 750in 68 58mm 9 53mm 375in 47 63mm 1 875in 19 05mm 4X 8 32 UNC 375 3 250in 82 55mm 1 425in 36 20mm 4X 8 32 UNC 375in 9 53mm 2 REV DATE 12 09 2015 MCR...

Page 82: ...8mm 4X 8 32 UNC 375in 9 53mm 28 45mm 1 120in 3 4 NPT Both Sides 28 58mm 188in 4 76mm 13 21mm 1 125in 520in 4X 8 32 UNC 438in 11 11mm DATE 12 10 2015 1 REV MCRS 500SLPM D MSPEC 2 250in 57 15mm 40 64mm 1 600in 5 976in 151 79mm 309in 7 85mm 139 28mm 5 484in 184 79mm 7 275in 328in 4X 8 32 UNC 8 33mm 9 53mm 375in 4X 8 32 UNC 68 58mm 2 700in 175in 4 45mm 750in 19 05mm 9 53mm 375in 200in 5 08mm 3 250in 8...

Page 83: ...in 9 53mm 375in 5 08mm 2 700in 200in 68 58mm 330in 8 38mm 4 8 32 UNC X 328in 8 33mm 47 63mm 8 32 UNC X 4 1 350in 34 29mm 3 850in 97 79mm 1 875in REF 1 550in 39 37mm 25 40mm 1 000in Both Sides 36 83mm 1 450in 1 1 4 NPT 24 38mm 960in 24 38mm 960in 1 125in 28 58mm MCRS Series 0 3000 slpm MCRS 3000 slpm approximate weight 12 0 lb ...

Page 84: ...in accordance with the standard Alicat Scientific device operating manual provided with the device Power and Signal Connections Connect to the device using two DB9 connectors The female top connection is PROFIBUS The male connection on the side is power and RS 232 or RS 485 Pin out diagrams for all PROFIBUS enabled Alicat devices are shown PROFIBUSMC1SLPMshowntoprovidePROFIBUSconnectordimensionson...

Page 85: ...arm Brown 3 Serial RS 232RX RS 485 Input Signal receive Red 4 Meters Gauges Remote Tare Ground to Tare Controllers Analog Set Point Input Orange 5 Serial RS 232TX RS 485 Output Signal send Yellow 6 0 5 Vdc or optional 0 10 Vdc Output Signal Green 7 Power In as described above Blue 8 Ground common for power digital communications analog signals and alarms Purple Note The above pin out is applicable...

Page 86: ...red Locking Industrial Connector Pin Outs If your Alicat Instrument was ordered with a Six Pin Locking Industrial connection please be sure to reference the following pin out diagram Pin Function 1 Power In 2 RS 232TX RS 485 3 RS 232RX RS 485 4 Meters Gauges Remote Tare Ground to Tare Controllers Analog Set Point Input 5 Ground common for power communications and signals 6 Signal Out Voltage or Cu...

Page 87: ...ons ordered Optional configurations are noted on the unit s calibration sheet Do not connect RS 485 to RS 232 units or cables Damage will occur Check part number or contact factory to verify RS 485 functionality Due to variance in cable manufacturing please identify proper wiring pins via continuity check color when using blunt cut multi strand cables Standard DB9 Pin out The following pin out cha...

Page 88: ... View 6 1 6 1 5 5 IfyourinstrumentwasorderedwithaDB9connection besuretocheckthe CalibrationLabelonthedeviceandreferencetheappropriatepin outdiagram Pin Function 1 Not Connected 2 0 5 Vdc Output Signal or 0 10 Vdc optional 3 Power In Vdc 4 Ground common for power digital communications analog signals and alarms 5 Serial RS 232TX or RS 485 6 Analog Input Signal 4 20mA 5Vdc or 10Vdc short to ground f...

Page 89: ... 9 Male Connector Front View 6 1 6 1 5 5 Pin Function 1 Power In Vdc 2 Analog Input Signal 4 20mA 5Vdc or 10Vdc short to ground for remote tare function on non controllers 3 0 5 Vdc Output Signal or 0 10 Vdc optional 4 Not Connected 5 Ground common for power digital communications analog signals and alarms 6 Ground common for power digital communications analog signals and alarms 7 Serial RS 232RX...

Page 90: ...6 1 6 1 5 5 IfyourinstrumentwasorderedwithaDB9connection besuretocheckthe CalibrationLabelonthedeviceandreferencetheappropriatepin outdiagram Pin Function 1 Serial RS 232TX or RS 485 2 0 5 Vdc Output Signal or 0 10 Vdc optional 3 Analog Input Signal 4 20mA 5Vdc or 10Vdc short to ground for remote tare function on non controllers 4 Ground common for power digital communications analog signals and a...

Page 91: ...6 1 6 1 5 5 IfyourinstrumentwasorderedwithaDB9connection besuretocheckthe CalibrationLabelonthedeviceandreferencetheappropriatepin outdiagram Pin Function 1 Serial RS 232TX or RS 485 2 0 5 Vdc Output Signal or 0 10 Vdc optional 3 Power In Vdc 4 Ground common for power digital communications analog signals and alarms 5 Not Connected 6 Analog Input Signal 4 20mA 5Vdc or 10Vdc short to ground for rem...

Page 92: ...6 1 6 1 5 5 Pin Function 1 Serial RS 232RX or RS 485 2 0 5 Vdc Output Signal or 0 10 Vdc optional 3 Power In Vdc 4 Ground common for power digital communications analog signals and alarms 5 Not Connected 6 Analog Input Signal 4 20mA 5Vdc or 10Vdc short to ground for remote tare function on non controllers 7 Ground common for power digital communications analog signals and alarms 8 Ground common fo...

Page 93: ...s 1 3 9 10 and 14 are connected together inside of the device and are common grounding points N C Not Connected Open can be used for custom pin assignments please consult factory The following pin out chart describes the safest and generally compatible arrangement when connecting a non Alicat DB15 wire to a DB15 equipped Alicat Not all features may be available between brands but the common denomi...

Page 94: ...in out diagram Pin Number Function 1 Ground 2 Primary Analog Signal Output 3 Analog Tare meters when grounded Analog Set Point Input controllers 4 Ground 5 Power Supply Common 6 Ground 7 Power Supply Vdc 8 RS 232 Tx send RS 485 9 Ground 10 N C 11 N C 12 Secondary Analog Signal Output fixed 5 12Vdc 13 N C 14 N C 15 RS 232 Rx receive RS 485 Check your device s calibration certificate and user manual...

Page 95: ... out diagram Pin Number Function 1 Ground 2 Primary Analog Signal Output 3 N C 4 N C 5 Power Supply Vdc 6 N C 7 N C 8 Analog Tare meters when grounded Analog Set Point Input controllers 9 Power Supply Common 10 Ground 11 Secondary Analog Signal Output fixed 5 12Vdc 12 N C 13 N C 14 RS 232 RX receive or RS 485 15 RS 232 TX send or RS 485 Check your device s calibration certificate and user manual f...

Page 96: ...und 12 Ground 13 RS 232 RX receive or RS 485 14 RS 232 TX send or RS 485 15 Ground Check your device s calibration certificate and user manual for the actual electrical input output requirements as all instruments are custom configured to some extent NOTE Pins 5 11 12 and 15 are connected together inside of the device and are common grounding points N C Not Connected Open can be used for custom pi...

Page 97: ... the device and are common grounding points N C Not Connected Open can be used for custom pin assignments please consult factory Added to allow for full use of features on Alicat devices may not be present on host wiring Male Connector Front View Female Connector Front View 11 15 14 10 2 6 11 15 14 10 2 6 7 7 The following pin out chart describes the safest and generally compatible arrangement whe...

Page 98: ...11 9 2 5 11 2 Pin Number Function 1 Ground 2 N C 3 N C 4 Primary Analog Signal Output 5 Power Supply Vdc 6 N C 7 Analog Tare meters when grounded Analog Set Point Input controllers 8 N C 9 Power Supply Common 10 Ground 11 Secondary Analog Signal Output fixed 5 12Vdc 12 N C 13 N C 14 RS 232 RX receive or RS 485 15 RS 232 TX send or RS 485 Check your device s calibration certificate and user manual ...

Page 99: ... of the device and are common grounding points N C Not Connected Open can be used for custom pin assignments please consult factory Added to allow for full use of features on Alicat devices may not be present on host wiring Male Connector Front View Female Connector Front View 11 14 13 12 2 9 11 14 13 9 2 8 8 12 The following pin out chart describes the safest and generally compatible arrangement ...

Page 100: ...NON HAZARDOUS EXPLOSION HAZARD SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR CLASS I DIVISION 2 II 3 G Alicat CSA ATEX approved devices are equipped with either a locking six pin industrial connector IC locking D sub 15 pin connector DB15 or locking D sub 9 pin connector DB9 Please see pages 85 98 for the correct power and signal connections for each type of connector See the following pag...

Page 101: ...ARNINGS EXPLOSION HAZARD DO NOT DISCONNECT WHILE CIRCUIT IS LIVE UNLESS AREA IS KNOWN TO BE NON HAZARDOUS EXPLOSION HAZARD SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR CLASS I DIVISION 2 www AlicatScientific com Alicat Scientific Inc Tucson AZ USA Tel 520 290 6060 II 3 G USE of Alicat instruments L LC LCR M MS MC MCS MCR MCRS P PS PC PCS PCR and PCRS product families only in applications ...

Page 102: ... Products covered by this warranty Alicat Scientific does not recommend warrant or assume responsibility for the use of the Products in life support applications or systems Alicat s warranties as herein above set forth shall not be enlarged diminished or affected by and no obligation or liability shall arise or grow out of Alicat s rendering of technical advice in connection with Buyer s order of ...

Page 103: ...5 11 Oxygen O2 205 5021 1 3088 0 9994 12 Propane C3H8 81 4631 1 8320 0 9838 13 normal Butane n C4H10 74 0536 2 4493 0 9699 14 Acetylene C2H2 104 4480 1 0720 0 9928 15 Ethylene C2H4 103 1839 1 1533 0 9943 16 iso Butane i C4H10 74 7846 2 4403 0 9735 17 Krypton Kr 251 3249 3 4323 0 9979 18 Xenon Xe 229 8483 5 3950 0 9947 19 Sulfur Hexafluoride SF6 153 5320 6 0383 0 9887 Gas Absolute Viscosity 25 C De...

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