32
FLOW
Process
Vacuum Source
Inverse Mass Flow (or Volumetric Flow)Control with Vacuum
Process
Gas Source
Vacuum Source
Flowing Absolute Pressure Control
Back-Pressure Control
Positive Pressure Control
FLOW
Process
Gas Source
Vacuum Source
Bidirectional Mass Flow (or Volumetric Flow)Control
FLOW
FLOW
Closed Process
Gas Source
Atmosphere or Vacuum
Dead-Ended Absolute Pressure Control
FLOW