63
1
MCR-100SLPM-D-MSPEC
12/16/2015
REV.
DATE
15.75mm
5.495in
139.56mm
.620in
7.650in
194.31mm
68.58mm
2.700in
3.250in
82.55mm
5.08mm
9.53mm
.200in
19.05mm
.750in
.175in
1.425in
.375in
36.20mm
4X 8-32 UNC .375in[9.53mm]
1.875in
4.45mm
47.63mm
1.325in REF
33.66mm
2X 8-32 UNC .375in[9.53mm]
.800in
20.32mm
.500in
12.70mm
28.45mm
1.120in
1.125in
28.58mm
Both Sides
1/4 NPT
57.15mm
2.250in
1.600in
40.64mm
DATE
1
MC-20SLPM-D-MSPEC
1/5/2016
REV.
3.738in
94.95mm
4.067in
103.30mm
.525in
13.34mm
.350in
8.89mm
1.050in
26.67mm
1/8
Both Sides
8.89mm
NPT
.350in
13.34mm
.525in
.125in
23.50mm
56.52mm
2.225in
3.18mm
.150in
3.81mm
.925in
2X 8-32 UNC .350in[8.89mm]
MC-Series:
0 - 100 sccm
0 - 200 sccm
0 - 500 sccm
0 - 1 slpm
0 - 2 slpm
0 - 3 slpm
0 - 5 slpm
0 - 10 slpm
0 - 20 slpm
100 sccm to 20 slpm approximate weight: 1.2lb
MCR-Series:
0 - 50 slpm
0 - 100 slpm
MCR 50 slpm to 100 slpm approximate weight: 9.0 lb.