Ulvac UTM3400 Series, Инструкция по эксплуатации

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9.5 Alarm Detection Capabilities
75
9
Table 9-4 If the STATUS Orange Lamp Lights
Alarm
code
Alarm name Possible cause Remedy
Sec-
tion
1
11
12
TD COUNTER LIMIT
PF COUNTER LIMIT The number of high
speed or power failure
touch-downs has
exceeded the
prescribed number. The touch-down bearing may have
deteriorated. Consult ULVAC or an
approved service company regarding
replacement of the touch-down
bearing.
2
14
15 AC LOW VOLTAGE
POWER FAILURE Power failure or
reduction in the power
supply voltage. Wait for the power to be restored. An
unfamiliar sound will be heard a few
minutes after a power failure. This
sound occurs when the rotor contacts
the protective bearing as magnetic
levitation cannot be maintained. This
is not an abnormal sound.
POWER switch was
turned off by mistake. Wait about 5 seconds before turning
the POWER switch back on. Re-
acceleration is possible after resetting
and start-up.
3
16 TMP:OVERLOAD Drop in rotation speed
during rotation at rated
speed (increased
internal pump
pressure). Check that the outlet and inlet
pressures are below the specified
maximum pressures.
Check for leakage.
Check that too much purge gas is not
flowing.
Check that process gas flow rate is
not too high. 4.1
4
21
24 TMP TEMP/MB CABLE
TMP:OVER TEMP High pump unit
temperature. Check that the ambient temperature
around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges.
Check that no load in excess of the
specified range is continuously
applied to the pump. 4.1
5
22
46
47 TMP:SENSOR ERROR
MOTOR OVERSPEED
EI:R-SPEED ERROR Rotation detection
signal from the motor
cannot be detected
correctly. Check that equipment causing noise
is not used around the pump and
power cable. 5.2
6
23
34 EI:MOTOR OVERCURR
EI:INV. OVERCURR Overcurrent supplied
to the motor. Check that the ambient temperature
around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges. 4.1
5.3
7
31
32 EI:BR OVERTEMP
EI:DC-DC OVERTEMP Temperature increase
in the control system. Check that the ambient temperature
around the pump is within the
specified range.
Check that the temperature and flow
rate of the cooling water are within
the specified ranges. 4.1
5.3
8
35
36
37
38
45 EI:INV. OVERVOLT
EI:DC-DC LOW VOLT
EI:DC-DC OVERCURR
EI:DC-DC OVERVOLT
EI:BRAKE OVERTIME Defective circuit in the
power supply unit. Turn the power on again after the
pump stops. The power supply unit
must be repaired if the problem
occurs again.