SECTION 6
OPERATION
42
6
6.3
Start-up
6.3.1 S
tart-up Sequence in LOCAL Mode
(1) Start-up begins when the Section 6.2.1 "Start-up Preparation Sequence in LOCAL Mode"
is complete.
(2) Maintained push the START/STOP button (Fig. 2-2 (3)).
(3) Pump acceleration starts. The ROTATION lamp (Fig. 2-2 (6)) lights and the STATUS
(Fig. 2-2 (7)) green lamp blinks.
(4) When the rotational speed reaches 80 % rated value, the STATUS green lamp lights.
Pump start-up is complete.
6.3.2 S
tart-up Sequence in REMOTE-control Connector
(1) Start-up begins when the Section 6.2.2 "Start-up Preparation Sequence in REMOTE-
control Connector" is complete.
(2) "START" signal (Refer to Table 6-4) is input from the remote-control connector (Fig. 2-3
(1)).
(3) The pump starts to accelerate and after a few seconds ,the "ROTATION" signal turns on.
In this product of a standard spec, "ACCELERATION" signal (Refer to Table 6-4) from the
remote-control connector turns on when the pump starts to accelerate.
(4) When the rotational speed reaches 80 % rated value, the remote-control connector
"ACCELERATION" signal (Refer to Table 6-4) turns off and the "NORMAL" signal (Refer
to Table 6-4) turns on.
Pump start-up is complete.
6.3.3 S
tart-up Sequence in Other Communication Means
(1) Start-up begins when the Section 6.2.3 "Start-up Preparation Sequence in Other
Communication Means" is complete.
(2) "START" command is input via the communication means.
(3) The pump acceleration starts. Status is changed from "STOP" to "ACCELERATION".
(4) When the rotational speed reaches 80 % rated value, status is changed from
"ACCELERATION" to "NORMAL".
Pump start-up is complete.
Содержание UTM3400 Series
Страница 2: ...This page is intentionally left blank...
Страница 10: ...viii Location of Label...
Страница 20: ...6 1 1 2 Descriptions This page is intentionally left blank...
Страница 21: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit 2 2 Control Panel 2 3 External I F Panel...
Страница 25: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping 3 3 Controller...
Страница 30: ...16 3 3 3 Controller This page is intentionally left blank...
Страница 36: ...22 4 4 3 Standards Fulfilled This page is intentionally left blank...
Страница 50: ...36 5 5 5 Notes on Transportation This page is intentionally left blank...
Страница 72: ...58 6 6 8 Communication Specifications This page is intentionally left blank...
Страница 73: ...7 7GAS PURGE...
Страница 82: ...68 8 8 6 Turbo Molecular Pump Return Request This page is intentionally left blank...
Страница 95: ...10 10WARRANTY CLAUSES...
Страница 98: ...84 10 This page is intentionally left blank...
Страница 100: ...Index Index 2 This page is intentionally left blank...