Ulvac UTM3400 Series, Инструкция по эксплуатации

Страница: 54 / 102

SECTION 6 OPERATION
40
6
6.2
Startup Preparation
NOTICE
When turning the POWER switch ON or OFF, a "clunk" sound may be heard from inside the
pump. This sound is from the rotor inside the pump being levitated or de-levitated. This is normal.
6.2.1 Start-up Preparation Sequence in LOCAL Mode
(1) Feed the cooling water into the cooling line.
(2) Turn on the POWER switch and check if the POWER lamp (Fig. 2-2 (5)) lights. And the
rotor of the turbo molecular pump is levitated by the magnetic bearing.
Maintained push the RESET button to change from REMOTE mode to LOCAL mode.
The POWER lamp blinks when becoming a LOCAL mode.
(3) Evacuate the turbo molecular pump by using a backing vacuum pump.
(4) Start-up preparation is complete if the pressure in the turbo molecular pump reduces below
200 Pa.
6.2.2 S
tart-up Preparation Sequence in REMOTE-control Connector
(1) Feed the cooling water into the cooling line.
(2) Turn on the POWER switch and check that the POWER lamp are illuminated and, in
addition, the "REMOTE" signal (Refer to Table 6-4) of the remote-control connector is ON
in this product of a standard spec. Under this condition, the rotor of the turbo molecular
pump is levitated by the magnetic bearing.
(3) Evacuate the turbo molecular pump by using a backing vacuum pump.
(4) Start-up preparation is complete if the pressure in the turbo molecular pump reduces below
200 Pa.